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Thermal stability of nanocrystalline (Ti,Zr)(0.54)Al0.46N films implanted by He+ ions
(Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 2015)
The influence of irradiation with He+ ions on the thermal stability of TiZrN and (Ti,Zr)(0.54)Al0.46N nanocrystalline films was studied. The TiZrN and (Ti,Zr)(0.54)Al0.46N films were prepared by reactive magnetron sputtering. ...