TY  - JOUR
AU  - Petrović, Suzana
AU  - Peruško, Davor
AU  - Milovanović, Dubravka S.
AU  - Kovač, Janez
AU  - Čekada, Miha
AU  - Panjan, Peter
AU  - Gaković, Biljana M.
AU  - Trtica, Milan
PY  - 2010
UR  - https://vinar.vin.bg.ac.rs/handle/123456789/4044
AB  - A study of morphological and composition changes of the WTi/Si system induced by nanosecond and picosecond laser pulses is presented. A 190 nm thick WTi film was deposited on a silicon substrate of n-type (100). The pulsed laser systems used were: nanosecond TEA CO(2) laser (emission, 10.6 mu m; pulse FWHM; pulse duration 120 ns) and picosecond Nd:YAG laser (emission, 532 nm; pulse FWHM; pulse duration 40 ps). During experiments the used fluences (Phi) had similar values, Phi(1) = 20 J cm(-2) in case of the TEA CO(2) laser and Phi(2) = 16 J cm(-2) for the Nd: YAG laser. The laser-induced morphological and composition modifications showed a dependence on pulse duration. Generally, the following morphological changes were observed: (i) ablation/exfoliation of the WTi thin film, (ii) appearance of hydrodynamic features such as resolidified material, and (iii) formation of nano-sized grains and globules. Overall morphological modifications were more pronounced after the picosecond laser action. The surface composition analysis showed a quite different distribution of sample components depending on the pulse duration. Formation of the silicon dioxide (SiO(2)) was recorded only in the case of irradiation of the WTi/Si system by picosecond laser pulses.
T2  - Journal of Optics
T1  - Effects of the pulse duration in laser modification of nano-sized WTi film on Si substrate
VL  - 12
IS  - 7
DO  - 10.1088/2040-8978/12/7/075602
ER  - 

@article{
author = "Petrović, Suzana and Peruško, Davor and Milovanović, Dubravka S. and Kovač, Janez and Čekada, Miha and Panjan, Peter and Gaković, Biljana M. and Trtica, Milan",
year = "2010",
abstract = "A study of morphological and composition changes of the WTi/Si system induced by nanosecond and picosecond laser pulses is presented. A 190 nm thick WTi film was deposited on a silicon substrate of n-type (100). The pulsed laser systems used were: nanosecond TEA CO(2) laser (emission, 10.6 mu m; pulse FWHM; pulse duration 120 ns) and picosecond Nd:YAG laser (emission, 532 nm; pulse FWHM; pulse duration 40 ps). During experiments the used fluences (Phi) had similar values, Phi(1) = 20 J cm(-2) in case of the TEA CO(2) laser and Phi(2) = 16 J cm(-2) for the Nd: YAG laser. The laser-induced morphological and composition modifications showed a dependence on pulse duration. Generally, the following morphological changes were observed: (i) ablation/exfoliation of the WTi thin film, (ii) appearance of hydrodynamic features such as resolidified material, and (iii) formation of nano-sized grains and globules. Overall morphological modifications were more pronounced after the picosecond laser action. The surface composition analysis showed a quite different distribution of sample components depending on the pulse duration. Formation of the silicon dioxide (SiO(2)) was recorded only in the case of irradiation of the WTi/Si system by picosecond laser pulses.",
journal = "Journal of Optics",
title = "Effects of the pulse duration in laser modification of nano-sized WTi film on Si substrate",
volume = "12",
number = "7",
doi = "10.1088/2040-8978/12/7/075602"
}

Petrović, S., Peruško, D., Milovanović, D. S., Kovač, J., Čekada, M., Panjan, P., Gaković, B. M.,& Trtica, M.. (2010). Effects of the pulse duration in laser modification of nano-sized WTi film on Si substrate. in Journal of Optics, 12(7).
https://doi.org/10.1088/2040-8978/12/7/075602

Petrović S, Peruško D, Milovanović DS, Kovač J, Čekada M, Panjan P, Gaković BM, Trtica M. Effects of the pulse duration in laser modification of nano-sized WTi film on Si substrate. in Journal of Optics. 2010;12(7).
doi:10.1088/2040-8978/12/7/075602 .

Petrović, Suzana, Peruško, Davor, Milovanović, Dubravka S., Kovač, Janez, Čekada, Miha, Panjan, Peter, Gaković, Biljana M., Trtica, Milan, "Effects of the pulse duration in laser modification of nano-sized WTi film on Si substrate" in Journal of Optics, 12, no. 7 (2010),
https://doi.org/10.1088/2040-8978/12/7/075602 . .