Effects of the pulse duration in laser modification of nano-sized WTi film on Si substrate
Само за регистроване кориснике
2010
Аутори
Petrović, SuzanaPeruško, Davor
Milovanović, Dubravka S.
Kovač, Janez
Čekada, Miha
Panjan, Peter
Gaković, Biljana M.
Trtica, Milan
Чланак у часопису (Објављена верзија)
Метаподаци
Приказ свих података о документуАпстракт
A study of morphological and composition changes of the WTi/Si system induced by nanosecond and picosecond laser pulses is presented. A 190 nm thick WTi film was deposited on a silicon substrate of n-type (100). The pulsed laser systems used were: nanosecond TEA CO(2) laser (emission, 10.6 mu m; pulse FWHM; pulse duration 120 ns) and picosecond Nd:YAG laser (emission, 532 nm; pulse FWHM; pulse duration 40 ps). During experiments the used fluences (Phi) had similar values, Phi(1) = 20 J cm(-2) in case of the TEA CO(2) laser and Phi(2) = 16 J cm(-2) for the Nd: YAG laser. The laser-induced morphological and composition modifications showed a dependence on pulse duration. Generally, the following morphological changes were observed: (i) ablation/exfoliation of the WTi thin film, (ii) appearance of hydrodynamic features such as resolidified material, and (iii) formation of nano-sized grains and globules. Overall morphological modifications were more pronounced after the picosecond laser ac...tion. The surface composition analysis showed a quite different distribution of sample components depending on the pulse duration. Formation of the silicon dioxide (SiO(2)) was recorded only in the case of irradiation of the WTi/Si system by picosecond laser pulses.
Кључне речи:
WTi thin films / surface modification / nanosecond laser / picosecond laser / mosaic structureИзвор:
Journal of Optics, 2010, 12, 7Финансирање / пројекти:
- Ministry of Science and Technological Development of the Republic of Serbia
- Ministry of Science and Technology of the Republic of Slovenia
- Vinca Institute of Nuclear Sciences in Belgrade
- Jozef Stefan Institute, Ljubljana
DOI: 10.1088/2040-8978/12/7/075602
ISSN: 2040-8978
WoS: 000279944900014
Scopus: 2-s2.0-77954523405
Колекције
Институција/група
VinčaTY - JOUR AU - Petrović, Suzana AU - Peruško, Davor AU - Milovanović, Dubravka S. AU - Kovač, Janez AU - Čekada, Miha AU - Panjan, Peter AU - Gaković, Biljana M. AU - Trtica, Milan PY - 2010 UR - https://vinar.vin.bg.ac.rs/handle/123456789/4044 AB - A study of morphological and composition changes of the WTi/Si system induced by nanosecond and picosecond laser pulses is presented. A 190 nm thick WTi film was deposited on a silicon substrate of n-type (100). The pulsed laser systems used were: nanosecond TEA CO(2) laser (emission, 10.6 mu m; pulse FWHM; pulse duration 120 ns) and picosecond Nd:YAG laser (emission, 532 nm; pulse FWHM; pulse duration 40 ps). During experiments the used fluences (Phi) had similar values, Phi(1) = 20 J cm(-2) in case of the TEA CO(2) laser and Phi(2) = 16 J cm(-2) for the Nd: YAG laser. The laser-induced morphological and composition modifications showed a dependence on pulse duration. Generally, the following morphological changes were observed: (i) ablation/exfoliation of the WTi thin film, (ii) appearance of hydrodynamic features such as resolidified material, and (iii) formation of nano-sized grains and globules. Overall morphological modifications were more pronounced after the picosecond laser action. The surface composition analysis showed a quite different distribution of sample components depending on the pulse duration. Formation of the silicon dioxide (SiO(2)) was recorded only in the case of irradiation of the WTi/Si system by picosecond laser pulses. T2 - Journal of Optics T1 - Effects of the pulse duration in laser modification of nano-sized WTi film on Si substrate VL - 12 IS - 7 DO - 10.1088/2040-8978/12/7/075602 ER -
@article{ author = "Petrović, Suzana and Peruško, Davor and Milovanović, Dubravka S. and Kovač, Janez and Čekada, Miha and Panjan, Peter and Gaković, Biljana M. and Trtica, Milan", year = "2010", abstract = "A study of morphological and composition changes of the WTi/Si system induced by nanosecond and picosecond laser pulses is presented. A 190 nm thick WTi film was deposited on a silicon substrate of n-type (100). The pulsed laser systems used were: nanosecond TEA CO(2) laser (emission, 10.6 mu m; pulse FWHM; pulse duration 120 ns) and picosecond Nd:YAG laser (emission, 532 nm; pulse FWHM; pulse duration 40 ps). During experiments the used fluences (Phi) had similar values, Phi(1) = 20 J cm(-2) in case of the TEA CO(2) laser and Phi(2) = 16 J cm(-2) for the Nd: YAG laser. The laser-induced morphological and composition modifications showed a dependence on pulse duration. Generally, the following morphological changes were observed: (i) ablation/exfoliation of the WTi thin film, (ii) appearance of hydrodynamic features such as resolidified material, and (iii) formation of nano-sized grains and globules. Overall morphological modifications were more pronounced after the picosecond laser action. The surface composition analysis showed a quite different distribution of sample components depending on the pulse duration. Formation of the silicon dioxide (SiO(2)) was recorded only in the case of irradiation of the WTi/Si system by picosecond laser pulses.", journal = "Journal of Optics", title = "Effects of the pulse duration in laser modification of nano-sized WTi film on Si substrate", volume = "12", number = "7", doi = "10.1088/2040-8978/12/7/075602" }
Petrović, S., Peruško, D., Milovanović, D. S., Kovač, J., Čekada, M., Panjan, P., Gaković, B. M.,& Trtica, M.. (2010). Effects of the pulse duration in laser modification of nano-sized WTi film on Si substrate. in Journal of Optics, 12(7). https://doi.org/10.1088/2040-8978/12/7/075602
Petrović S, Peruško D, Milovanović DS, Kovač J, Čekada M, Panjan P, Gaković BM, Trtica M. Effects of the pulse duration in laser modification of nano-sized WTi film on Si substrate. in Journal of Optics. 2010;12(7). doi:10.1088/2040-8978/12/7/075602 .
Petrović, Suzana, Peruško, Davor, Milovanović, Dubravka S., Kovač, Janez, Čekada, Miha, Panjan, Peter, Gaković, Biljana M., Trtica, Milan, "Effects of the pulse duration in laser modification of nano-sized WTi film on Si substrate" in Journal of Optics, 12, no. 7 (2010), https://doi.org/10.1088/2040-8978/12/7/075602 . .