TY  - JOUR
AU  - Peruško, Davor
AU  - Milinović, Velimir
AU  - Mitrić, Miodrag
AU  - Petrović, Suzana
AU  - Jeynes, C.
AU  - Milosavljević, Momir
PY  - 2009
UR  - https://vinar.vin.bg.ac.rs/handle/123456789/3905
AB  - Aluminum/titanium multilayers were sputter deposited on (100) Si wafers and irradiated with 200keV Ar(+) and N(2)(+) ions. Irradiation fluences were in the range from 5 . 10(15) to 4 . 10(16) ions cm(-2), for argon ions, and 1 . 10(17) to 2 . 10(17) ions cm(-2) for nitrogen. The samples were analyzed by Rutherford backscattering spectroscopy (RBS), transmission electron microscopy (TEM), and X-ray diffraction (XRD). Nano-hardness measurements were performed by Vickers method. Irradiation with argon ions induces mixing between Ti and Al layers, which is most pronounced in the vicinity of the projected range of implanted species. TEM cross-section analysis shows significant growth of grain size with the increase of Ar ion fluence. Implantation with nitrogen ions, up to these high fluences, causes a full intermixing of Al/Ti layers, resulting in multilayered structures with different content of Al, Ti, and N. In the latter case, nitrogen ion irradiation, probably, induces the formation of nitrides of titanium, aluminum, and AlTi. Nano-hardness measurements show significant increase of hardness for all applied ion fluences.
T2  - Materials and Manufacturing Processes
T1  - Ion Beam Modification of Al/Ti Multilayers
VL  - 24
IS  - 10-11
SP  - 1130
EP  - 1133
DO  - 10.1080/10426910903032246
ER  - 

@article{
author = "Peruško, Davor and Milinović, Velimir and Mitrić, Miodrag and Petrović, Suzana and Jeynes, C. and Milosavljević, Momir",
year = "2009",
abstract = "Aluminum/titanium multilayers were sputter deposited on (100) Si wafers and irradiated with 200keV Ar(+) and N(2)(+) ions. Irradiation fluences were in the range from 5 . 10(15) to 4 . 10(16) ions cm(-2), for argon ions, and 1 . 10(17) to 2 . 10(17) ions cm(-2) for nitrogen. The samples were analyzed by Rutherford backscattering spectroscopy (RBS), transmission electron microscopy (TEM), and X-ray diffraction (XRD). Nano-hardness measurements were performed by Vickers method. Irradiation with argon ions induces mixing between Ti and Al layers, which is most pronounced in the vicinity of the projected range of implanted species. TEM cross-section analysis shows significant growth of grain size with the increase of Ar ion fluence. Implantation with nitrogen ions, up to these high fluences, causes a full intermixing of Al/Ti layers, resulting in multilayered structures with different content of Al, Ti, and N. In the latter case, nitrogen ion irradiation, probably, induces the formation of nitrides of titanium, aluminum, and AlTi. Nano-hardness measurements show significant increase of hardness for all applied ion fluences.",
journal = "Materials and Manufacturing Processes",
title = "Ion Beam Modification of Al/Ti Multilayers",
volume = "24",
number = "10-11",
pages = "1130-1133",
doi = "10.1080/10426910903032246"
}

Peruško, D., Milinović, V., Mitrić, M., Petrović, S., Jeynes, C.,& Milosavljević, M.. (2009). Ion Beam Modification of Al/Ti Multilayers. in Materials and Manufacturing Processes, 24(10-11), 1130-1133.
https://doi.org/10.1080/10426910903032246

Peruško D, Milinović V, Mitrić M, Petrović S, Jeynes C, Milosavljević M. Ion Beam Modification of Al/Ti Multilayers. in Materials and Manufacturing Processes. 2009;24(10-11):1130-1133.
doi:10.1080/10426910903032246 .

Peruško, Davor, Milinović, Velimir, Mitrić, Miodrag, Petrović, Suzana, Jeynes, C., Milosavljević, Momir, "Ion Beam Modification of Al/Ti Multilayers" in Materials and Manufacturing Processes, 24, no. 10-11 (2009):1130-1133,
https://doi.org/10.1080/10426910903032246 . .