Ion Beam Modification of Al/Ti Multilayers
Нема приказа
Аутори
Peruško, DavorMilinović, Velimir
Mitrić, Miodrag
Petrović, Suzana
Jeynes, C.
Milosavljević, Momir
Чланак у часопису
Метаподаци
Приказ свих података о документуАпстракт
Aluminum/titanium multilayers were sputter deposited on (100) Si wafers and irradiated with 200keV Ar(+) and N(2)(+) ions. Irradiation fluences were in the range from 5 . 10(15) to 4 . 10(16) ions cm(-2), for argon ions, and 1 . 10(17) to 2 . 10(17) ions cm(-2) for nitrogen. The samples were analyzed by Rutherford backscattering spectroscopy (RBS), transmission electron microscopy (TEM), and X-ray diffraction (XRD). Nano-hardness measurements were performed by Vickers method. Irradiation with argon ions induces mixing between Ti and Al layers, which is most pronounced in the vicinity of the projected range of implanted species. TEM cross-section analysis shows significant growth of grain size with the increase of Ar ion fluence. Implantation with nitrogen ions, up to these high fluences, causes a full intermixing of Al/Ti layers, resulting in multilayered structures with different content of Al, Ti, and N. In the latter case, nitrogen ion irradiation, probably, induces the formation of... nitrides of titanium, aluminum, and AlTi. Nano-hardness measurements show significant increase of hardness for all applied ion fluences.
Кључне речи:
Al/Ti multilayers / Intermetalics / Ion beam mixing / Ion implantationИзвор:
Materials and Manufacturing Processes, 2009, 24, 10-11, 1130-1133Финансирање / пројекти:
- Ministry of Science and Technological Development of the Republic of Serbia [OI-141013], EPSRC (UK Engineering and Physical Sciences Research Council) [EP/D032210/1]
DOI: 10.1080/10426910903032246
ISSN: 1042-6914
WoS: 000274699700015
Scopus: 2-s2.0-77949565123
Колекције
Институција/група
VinčaTY - JOUR AU - Peruško, Davor AU - Milinović, Velimir AU - Mitrić, Miodrag AU - Petrović, Suzana AU - Jeynes, C. AU - Milosavljević, Momir PY - 2009 UR - https://vinar.vin.bg.ac.rs/handle/123456789/3905 AB - Aluminum/titanium multilayers were sputter deposited on (100) Si wafers and irradiated with 200keV Ar(+) and N(2)(+) ions. Irradiation fluences were in the range from 5 . 10(15) to 4 . 10(16) ions cm(-2), for argon ions, and 1 . 10(17) to 2 . 10(17) ions cm(-2) for nitrogen. The samples were analyzed by Rutherford backscattering spectroscopy (RBS), transmission electron microscopy (TEM), and X-ray diffraction (XRD). Nano-hardness measurements were performed by Vickers method. Irradiation with argon ions induces mixing between Ti and Al layers, which is most pronounced in the vicinity of the projected range of implanted species. TEM cross-section analysis shows significant growth of grain size with the increase of Ar ion fluence. Implantation with nitrogen ions, up to these high fluences, causes a full intermixing of Al/Ti layers, resulting in multilayered structures with different content of Al, Ti, and N. In the latter case, nitrogen ion irradiation, probably, induces the formation of nitrides of titanium, aluminum, and AlTi. Nano-hardness measurements show significant increase of hardness for all applied ion fluences. T2 - Materials and Manufacturing Processes T1 - Ion Beam Modification of Al/Ti Multilayers VL - 24 IS - 10-11 SP - 1130 EP - 1133 DO - 10.1080/10426910903032246 ER -
@article{ author = "Peruško, Davor and Milinović, Velimir and Mitrić, Miodrag and Petrović, Suzana and Jeynes, C. and Milosavljević, Momir", year = "2009", abstract = "Aluminum/titanium multilayers were sputter deposited on (100) Si wafers and irradiated with 200keV Ar(+) and N(2)(+) ions. Irradiation fluences were in the range from 5 . 10(15) to 4 . 10(16) ions cm(-2), for argon ions, and 1 . 10(17) to 2 . 10(17) ions cm(-2) for nitrogen. The samples were analyzed by Rutherford backscattering spectroscopy (RBS), transmission electron microscopy (TEM), and X-ray diffraction (XRD). Nano-hardness measurements were performed by Vickers method. Irradiation with argon ions induces mixing between Ti and Al layers, which is most pronounced in the vicinity of the projected range of implanted species. TEM cross-section analysis shows significant growth of grain size with the increase of Ar ion fluence. Implantation with nitrogen ions, up to these high fluences, causes a full intermixing of Al/Ti layers, resulting in multilayered structures with different content of Al, Ti, and N. In the latter case, nitrogen ion irradiation, probably, induces the formation of nitrides of titanium, aluminum, and AlTi. Nano-hardness measurements show significant increase of hardness for all applied ion fluences.", journal = "Materials and Manufacturing Processes", title = "Ion Beam Modification of Al/Ti Multilayers", volume = "24", number = "10-11", pages = "1130-1133", doi = "10.1080/10426910903032246" }
Peruško, D., Milinović, V., Mitrić, M., Petrović, S., Jeynes, C.,& Milosavljević, M.. (2009). Ion Beam Modification of Al/Ti Multilayers. in Materials and Manufacturing Processes, 24(10-11), 1130-1133. https://doi.org/10.1080/10426910903032246
Peruško D, Milinović V, Mitrić M, Petrović S, Jeynes C, Milosavljević M. Ion Beam Modification of Al/Ti Multilayers. in Materials and Manufacturing Processes. 2009;24(10-11):1130-1133. doi:10.1080/10426910903032246 .
Peruško, Davor, Milinović, Velimir, Mitrić, Miodrag, Petrović, Suzana, Jeynes, C., Milosavljević, Momir, "Ion Beam Modification of Al/Ti Multilayers" in Materials and Manufacturing Processes, 24, no. 10-11 (2009):1130-1133, https://doi.org/10.1080/10426910903032246 . .