TY  - JOUR
AU  - Uglov, Vladimir Vasilevich
AU  - Abadias, Gregory
AU  - Rovbut, A. Y.
AU  - Zlotski, Sergey V.
AU  - Saladukhin, Ihar A.
AU  - Skuratov, Vladimir A.
AU  - Petrović, Srđan M.
PY  - 2015
UR  - https://vinar.vin.bg.ac.rs/handle/123456789/612
AB  - The influence of irradiation with He+ ions on the thermal stability of TiZrN and (Ti,Zr)(0.54)Al0.46N nanocrystalline films was studied. The TiZrN and (Ti,Zr)(0.54)Al0.46N films were prepared by reactive magnetron sputtering. XRD research showed that the TiZrN and (Ti,Zr)(0.54)Al0.6N films were single-phase systems (based on cubic c-(Ti,Zr)N and cubic c-(Ti,Zr,AI)N solid solutions) with nanocrystalline (grain size 30 and 21 nm, respectively) structure. The irradiation with He ions and thermal annealing up to 800 degrees C do not affect the structure and phase composition of the (Ti,Zr)(0.54)Al0.46N film. The prior irradiation of the (Ti,Zr)(0.54)Al0.46N film with He+ ions activates spinodal decomposition of the c-(Ti,Zr,Al)N solid solution after thermal annealing at 1000 degrees C due to redistribution of the components of the solid solution inside the grains. (C) 2014 Elsevier B.V. All rights reserved.
T2  - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
T1  - Thermal stability of nanocrystalline (Ti,Zr)(0.54)Al0.46N films implanted by He+ ions
VL  - 354
SP  - 269
EP  - 273
DO  - 10.1016/j.nimb.2014.11.012
ER  - 

@article{
author = "Uglov, Vladimir Vasilevich and Abadias, Gregory and Rovbut, A. Y. and Zlotski, Sergey V. and Saladukhin, Ihar A. and Skuratov, Vladimir A. and Petrović, Srđan M.",
year = "2015",
abstract = "The influence of irradiation with He+ ions on the thermal stability of TiZrN and (Ti,Zr)(0.54)Al0.46N nanocrystalline films was studied. The TiZrN and (Ti,Zr)(0.54)Al0.46N films were prepared by reactive magnetron sputtering. XRD research showed that the TiZrN and (Ti,Zr)(0.54)Al0.6N films were single-phase systems (based on cubic c-(Ti,Zr)N and cubic c-(Ti,Zr,AI)N solid solutions) with nanocrystalline (grain size 30 and 21 nm, respectively) structure. The irradiation with He ions and thermal annealing up to 800 degrees C do not affect the structure and phase composition of the (Ti,Zr)(0.54)Al0.46N film. The prior irradiation of the (Ti,Zr)(0.54)Al0.46N film with He+ ions activates spinodal decomposition of the c-(Ti,Zr,Al)N solid solution after thermal annealing at 1000 degrees C due to redistribution of the components of the solid solution inside the grains. (C) 2014 Elsevier B.V. All rights reserved.",
journal = "Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms",
title = "Thermal stability of nanocrystalline (Ti,Zr)(0.54)Al0.46N films implanted by He+ ions",
volume = "354",
pages = "269-273",
doi = "10.1016/j.nimb.2014.11.012"
}

Uglov, V. V., Abadias, G., Rovbut, A. Y., Zlotski, S. V., Saladukhin, I. A., Skuratov, V. A.,& Petrović, S. M.. (2015). Thermal stability of nanocrystalline (Ti,Zr)(0.54)Al0.46N films implanted by He+ ions. in Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 354, 269-273.
https://doi.org/10.1016/j.nimb.2014.11.012

Uglov VV, Abadias G, Rovbut AY, Zlotski SV, Saladukhin IA, Skuratov VA, Petrović SM. Thermal stability of nanocrystalline (Ti,Zr)(0.54)Al0.46N films implanted by He+ ions. in Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms. 2015;354:269-273.
doi:10.1016/j.nimb.2014.11.012 .

Uglov, Vladimir Vasilevich, Abadias, Gregory, Rovbut, A. Y., Zlotski, Sergey V., Saladukhin, Ihar A., Skuratov, Vladimir A., Petrović, Srđan M., "Thermal stability of nanocrystalline (Ti,Zr)(0.54)Al0.46N films implanted by He+ ions" in Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 354 (2015):269-273,
https://doi.org/10.1016/j.nimb.2014.11.012 . .