Thermal stability of nanocrystalline (Ti,Zr)(0.54)Al0.46N films implanted by He+ ions
Само за регистроване кориснике
2015
Аутори
Uglov, Vladimir VasilevichAbadias, Gregory
Rovbut, A. Y.
Zlotski, Sergey V.
Saladukhin, Ihar A.
Skuratov, Vladimir A.
Petrović, Srđan M.
Чланак у часопису (Објављена верзија)
Метаподаци
Приказ свих података о документуАпстракт
The influence of irradiation with He+ ions on the thermal stability of TiZrN and (Ti,Zr)(0.54)Al0.46N nanocrystalline films was studied. The TiZrN and (Ti,Zr)(0.54)Al0.46N films were prepared by reactive magnetron sputtering. XRD research showed that the TiZrN and (Ti,Zr)(0.54)Al0.6N films were single-phase systems (based on cubic c-(Ti,Zr)N and cubic c-(Ti,Zr,AI)N solid solutions) with nanocrystalline (grain size 30 and 21 nm, respectively) structure. The irradiation with He ions and thermal annealing up to 800 degrees C do not affect the structure and phase composition of the (Ti,Zr)(0.54)Al0.46N film. The prior irradiation of the (Ti,Zr)(0.54)Al0.46N film with He+ ions activates spinodal decomposition of the c-(Ti,Zr,Al)N solid solution after thermal annealing at 1000 degrees C due to redistribution of the components of the solid solution inside the grains. (C) 2014 Elsevier B.V. All rights reserved.
Кључне речи:
Nanocrystalline nitrides / Helium ion irradiation / Radiation and thermal stability / Spinodal decompositionИзвор:
Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 2015, 354, 269-273Финансирање / пројекти:
- Физика и хемија са јонским сноповима (RS-MESTD-Integrated and Interdisciplinary Research (IIR or III)-45006)
- Belarusian Republic Foundation for Fundamental Research [F13F-003], Centre National de la Recherche Scientifique (bilateral project CNRS/FRFRB) [EDC25728]
DOI: 10.1016/j.nimb.2014.11.012
ISSN: 0168-583X; 1872-9584
WoS: 000356193900060
Scopus: 2-s2.0-84939953835
Институција/група
VinčaTY - JOUR AU - Uglov, Vladimir Vasilevich AU - Abadias, Gregory AU - Rovbut, A. Y. AU - Zlotski, Sergey V. AU - Saladukhin, Ihar A. AU - Skuratov, Vladimir A. AU - Petrović, Srđan M. PY - 2015 UR - https://vinar.vin.bg.ac.rs/handle/123456789/612 AB - The influence of irradiation with He+ ions on the thermal stability of TiZrN and (Ti,Zr)(0.54)Al0.46N nanocrystalline films was studied. The TiZrN and (Ti,Zr)(0.54)Al0.46N films were prepared by reactive magnetron sputtering. XRD research showed that the TiZrN and (Ti,Zr)(0.54)Al0.6N films were single-phase systems (based on cubic c-(Ti,Zr)N and cubic c-(Ti,Zr,AI)N solid solutions) with nanocrystalline (grain size 30 and 21 nm, respectively) structure. The irradiation with He ions and thermal annealing up to 800 degrees C do not affect the structure and phase composition of the (Ti,Zr)(0.54)Al0.46N film. The prior irradiation of the (Ti,Zr)(0.54)Al0.46N film with He+ ions activates spinodal decomposition of the c-(Ti,Zr,Al)N solid solution after thermal annealing at 1000 degrees C due to redistribution of the components of the solid solution inside the grains. (C) 2014 Elsevier B.V. All rights reserved. T2 - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms T1 - Thermal stability of nanocrystalline (Ti,Zr)(0.54)Al0.46N films implanted by He+ ions VL - 354 SP - 269 EP - 273 DO - 10.1016/j.nimb.2014.11.012 ER -
@article{ author = "Uglov, Vladimir Vasilevich and Abadias, Gregory and Rovbut, A. Y. and Zlotski, Sergey V. and Saladukhin, Ihar A. and Skuratov, Vladimir A. and Petrović, Srđan M.", year = "2015", abstract = "The influence of irradiation with He+ ions on the thermal stability of TiZrN and (Ti,Zr)(0.54)Al0.46N nanocrystalline films was studied. The TiZrN and (Ti,Zr)(0.54)Al0.46N films were prepared by reactive magnetron sputtering. XRD research showed that the TiZrN and (Ti,Zr)(0.54)Al0.6N films were single-phase systems (based on cubic c-(Ti,Zr)N and cubic c-(Ti,Zr,AI)N solid solutions) with nanocrystalline (grain size 30 and 21 nm, respectively) structure. The irradiation with He ions and thermal annealing up to 800 degrees C do not affect the structure and phase composition of the (Ti,Zr)(0.54)Al0.46N film. The prior irradiation of the (Ti,Zr)(0.54)Al0.46N film with He+ ions activates spinodal decomposition of the c-(Ti,Zr,Al)N solid solution after thermal annealing at 1000 degrees C due to redistribution of the components of the solid solution inside the grains. (C) 2014 Elsevier B.V. All rights reserved.", journal = "Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms", title = "Thermal stability of nanocrystalline (Ti,Zr)(0.54)Al0.46N films implanted by He+ ions", volume = "354", pages = "269-273", doi = "10.1016/j.nimb.2014.11.012" }
Uglov, V. V., Abadias, G., Rovbut, A. Y., Zlotski, S. V., Saladukhin, I. A., Skuratov, V. A.,& Petrović, S. M.. (2015). Thermal stability of nanocrystalline (Ti,Zr)(0.54)Al0.46N films implanted by He+ ions. in Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 354, 269-273. https://doi.org/10.1016/j.nimb.2014.11.012
Uglov VV, Abadias G, Rovbut AY, Zlotski SV, Saladukhin IA, Skuratov VA, Petrović SM. Thermal stability of nanocrystalline (Ti,Zr)(0.54)Al0.46N films implanted by He+ ions. in Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms. 2015;354:269-273. doi:10.1016/j.nimb.2014.11.012 .
Uglov, Vladimir Vasilevich, Abadias, Gregory, Rovbut, A. Y., Zlotski, Sergey V., Saladukhin, Ihar A., Skuratov, Vladimir A., Petrović, Srđan M., "Thermal stability of nanocrystalline (Ti,Zr)(0.54)Al0.46N films implanted by He+ ions" in Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 354 (2015):269-273, https://doi.org/10.1016/j.nimb.2014.11.012 . .