TY  - JOUR
AU  - Peruško, Davor
AU  - Cizmovic, M.
AU  - Petrović, Suzana
AU  - Siketic, Z.
AU  - Mitrić, Miodrag
AU  - Pelicon, P.
AU  - Dražić, Goran
AU  - Kovač, Janez
AU  - Milinović, Velimir
AU  - Milosavljević, Momir
PY  - 2013
UR  - https://vinar.vin.bg.ac.rs/handle/123456789/5457
AB  - Multilayered 5x(Al/Ti) structures, deposited on a Si substrate to a total thickness of 130 nm, were treated by unfocused Nd:YAG laser pulses (150 ps) with energies of 85 and 65 mJ. Irradiations were performed in air with 10, 50 and 100 successive laser pulses. Characterizations were done by using Rutherford backscattering spectrometry (RBS), elastic recoil detection analysis (ERDA), x-ray diffraction (XRD) and transmission electron microscopy (TEM). The results obtained show that laser irradiation, at either energy, induced almost full intermixing of deposited layers and formation of intermetallic compounds, but this was more pronounced for the applied laser pulses with a higher energy. The intermixed layer-silicon interface remains intact for all numbers of applied laser pulses and for both energies. The formation of an oxide layer on the sample surfaces was also observed, the thickness of which is greater for the higher laser beam energy.
T2  - Laser Physics
T1  - Laser irradiation of nano-metric Al/Ti multilayers
VL  - 23
IS  - 3
DO  - 10.1088/1054-660X/23/3/036005
ER  - 

@article{
author = "Peruško, Davor and Cizmovic, M. and Petrović, Suzana and Siketic, Z. and Mitrić, Miodrag and Pelicon, P. and Dražić, Goran and Kovač, Janez and Milinović, Velimir and Milosavljević, Momir",
year = "2013",
abstract = "Multilayered 5x(Al/Ti) structures, deposited on a Si substrate to a total thickness of 130 nm, were treated by unfocused Nd:YAG laser pulses (150 ps) with energies of 85 and 65 mJ. Irradiations were performed in air with 10, 50 and 100 successive laser pulses. Characterizations were done by using Rutherford backscattering spectrometry (RBS), elastic recoil detection analysis (ERDA), x-ray diffraction (XRD) and transmission electron microscopy (TEM). The results obtained show that laser irradiation, at either energy, induced almost full intermixing of deposited layers and formation of intermetallic compounds, but this was more pronounced for the applied laser pulses with a higher energy. The intermixed layer-silicon interface remains intact for all numbers of applied laser pulses and for both energies. The formation of an oxide layer on the sample surfaces was also observed, the thickness of which is greater for the higher laser beam energy.",
journal = "Laser Physics",
title = "Laser irradiation of nano-metric Al/Ti multilayers",
volume = "23",
number = "3",
doi = "10.1088/1054-660X/23/3/036005"
}

Peruško, D., Cizmovic, M., Petrović, S., Siketic, Z., Mitrić, M., Pelicon, P., Dražić, G., Kovač, J., Milinović, V.,& Milosavljević, M.. (2013). Laser irradiation of nano-metric Al/Ti multilayers. in Laser Physics, 23(3).
https://doi.org/10.1088/1054-660X/23/3/036005

Peruško D, Cizmovic M, Petrović S, Siketic Z, Mitrić M, Pelicon P, Dražić G, Kovač J, Milinović V, Milosavljević M. Laser irradiation of nano-metric Al/Ti multilayers. in Laser Physics. 2013;23(3).
doi:10.1088/1054-660X/23/3/036005 .

Peruško, Davor, Cizmovic, M., Petrović, Suzana, Siketic, Z., Mitrić, Miodrag, Pelicon, P., Dražić, Goran, Kovač, Janez, Milinović, Velimir, Milosavljević, Momir, "Laser irradiation of nano-metric Al/Ti multilayers" in Laser Physics, 23, no. 3 (2013),
https://doi.org/10.1088/1054-660X/23/3/036005 . .

TY  - JOUR
AU  - Cizmovic, M.
AU  - Kovač, Janez
AU  - Milosavljević, Momir
AU  - Petrović, Suzana
AU  - Dražić, Goran
AU  - Mitrić, Miodrag
AU  - Obradović, Marko O.
AU  - Schaaf, P.
AU  - Peruško, Davor
PY  - 2013
UR  - https://vinar.vin.bg.ac.rs/handle/123456789/7016
AB  - Structural and compositional modifications of multilayered Al/Ti nano-structures induced by nanosecond laser pulses were investigated. Five and ten (Al/Ti) bilayers, with total thicknesses of 130 and 260 nm, respectively, were deposited by dc ion sputtering onto (100) Si wafers. The structures were irradiated in air with nanosecond Nd:YAG unfocused laser pulses. Characterizations of the samples were performed by x-ray diffraction analysis, Auger electron spectroscopy, atomic force microscopy and transmission electron microscopy. It was found that laser treatment of both structures induced complete intermixing of all deposited metallic films, their mixing with silicon substrate and formation of Al-Ti intermetallic and silicide compounds. This effect was achieved even for one applied laser pulse. Comparing these results with that for picosecond laser treatment of similar multilayered structures, it was concluded that materials involved within the heat diffusion length participated in the formation of new phases.
T2  - Physica Scripta
T1  - Intermixing in Al/Ti multilayer structures induced by nanosecond laser pulses
VL  - T157
DO  - 10.1088/0031-8949/2013/T157/014008
ER  - 

@article{
author = "Cizmovic, M. and Kovač, Janez and Milosavljević, Momir and Petrović, Suzana and Dražić, Goran and Mitrić, Miodrag and Obradović, Marko O. and Schaaf, P. and Peruško, Davor",
year = "2013",
abstract = "Structural and compositional modifications of multilayered Al/Ti nano-structures induced by nanosecond laser pulses were investigated. Five and ten (Al/Ti) bilayers, with total thicknesses of 130 and 260 nm, respectively, were deposited by dc ion sputtering onto (100) Si wafers. The structures were irradiated in air with nanosecond Nd:YAG unfocused laser pulses. Characterizations of the samples were performed by x-ray diffraction analysis, Auger electron spectroscopy, atomic force microscopy and transmission electron microscopy. It was found that laser treatment of both structures induced complete intermixing of all deposited metallic films, their mixing with silicon substrate and formation of Al-Ti intermetallic and silicide compounds. This effect was achieved even for one applied laser pulse. Comparing these results with that for picosecond laser treatment of similar multilayered structures, it was concluded that materials involved within the heat diffusion length participated in the formation of new phases.",
journal = "Physica Scripta",
title = "Intermixing in Al/Ti multilayer structures induced by nanosecond laser pulses",
volume = "T157",
doi = "10.1088/0031-8949/2013/T157/014008"
}

Cizmovic, M., Kovač, J., Milosavljević, M., Petrović, S., Dražić, G., Mitrić, M., Obradović, M. O., Schaaf, P.,& Peruško, D.. (2013). Intermixing in Al/Ti multilayer structures induced by nanosecond laser pulses. in Physica Scripta, T157.
https://doi.org/10.1088/0031-8949/2013/T157/014008

Cizmovic M, Kovač J, Milosavljević M, Petrović S, Dražić G, Mitrić M, Obradović MO, Schaaf P, Peruško D. Intermixing in Al/Ti multilayer structures induced by nanosecond laser pulses. in Physica Scripta. 2013;T157.
doi:10.1088/0031-8949/2013/T157/014008 .

Cizmovic, M., Kovač, Janez, Milosavljević, Momir, Petrović, Suzana, Dražić, Goran, Mitrić, Miodrag, Obradović, Marko O., Schaaf, P., Peruško, Davor, "Intermixing in Al/Ti multilayer structures induced by nanosecond laser pulses" in Physica Scripta, T157 (2013),
https://doi.org/10.1088/0031-8949/2013/T157/014008 . .

TY  - JOUR
AU  - Peruško, Davor
AU  - Petrović, Suzana
AU  - Stojanović, Mirjana
AU  - Mitrić, Miodrag
AU  - Cizmovic, M.
AU  - Panjan, Matjaž
AU  - Milosavljević, Momir
PY  - 2012
UR  - https://vinar.vin.bg.ac.rs/handle/123456789/4913
AB  - The effects of Ar+ ion irradiation on Al/Ti multilayers at room temperature were investigated. Eight (Al/Ti) bilayers were deposited by d.c. ion sputtering on (100) Si wafers to a total thickness of similar to 300 nm. Ion irradiations were performed by 180 keV Ar+ ions with doses 1-6 x 10(16) ions cm(-2). After implantation the samples were vacuum annealed at 400 degrees C for 30 min. Ion irradiations induced intermixing of layer constituents. and for the highest fluence formation of AlTi and AlTi3 intermetallic phases in the vicinity of the mid projected range of the impact ions. Subsequent vacuum annealing of sample implanted to 6 x 10(16) ions cm(-2) lead to transformation of all deposited layers into AlTi3 and gamma-AlTi intermetallic phases, except for 3-4 layers close to the substrate which were out of range of the effects induced by ion implantation. It is assumed that Al-Ti reaction was initiated by thermal spikes and further enhanced by chemical driving forces, but only in the intermixed region. This procedure may be interesting for fabrication of Al-Ti intermetallic compounds tightly adhered on different substrates. (C) 2011 Elsevier B.V. All rights reserved.
T2  - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
T1  - Formation of intermetallics by ion implantation of multilatered Al/Ti nano-structures
VL  - 282
SP  - 4
EP  - 7
DO  - 10.1016/j.nimb.2011.08.038
ER  - 

@article{
author = "Peruško, Davor and Petrović, Suzana and Stojanović, Mirjana and Mitrić, Miodrag and Cizmovic, M. and Panjan, Matjaž and Milosavljević, Momir",
year = "2012",
abstract = "The effects of Ar+ ion irradiation on Al/Ti multilayers at room temperature were investigated. Eight (Al/Ti) bilayers were deposited by d.c. ion sputtering on (100) Si wafers to a total thickness of similar to 300 nm. Ion irradiations were performed by 180 keV Ar+ ions with doses 1-6 x 10(16) ions cm(-2). After implantation the samples were vacuum annealed at 400 degrees C for 30 min. Ion irradiations induced intermixing of layer constituents. and for the highest fluence formation of AlTi and AlTi3 intermetallic phases in the vicinity of the mid projected range of the impact ions. Subsequent vacuum annealing of sample implanted to 6 x 10(16) ions cm(-2) lead to transformation of all deposited layers into AlTi3 and gamma-AlTi intermetallic phases, except for 3-4 layers close to the substrate which were out of range of the effects induced by ion implantation. It is assumed that Al-Ti reaction was initiated by thermal spikes and further enhanced by chemical driving forces, but only in the intermixed region. This procedure may be interesting for fabrication of Al-Ti intermetallic compounds tightly adhered on different substrates. (C) 2011 Elsevier B.V. All rights reserved.",
journal = "Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms",
title = "Formation of intermetallics by ion implantation of multilatered Al/Ti nano-structures",
volume = "282",
pages = "4-7",
doi = "10.1016/j.nimb.2011.08.038"
}

Peruško, D., Petrović, S., Stojanović, M., Mitrić, M., Cizmovic, M., Panjan, M.,& Milosavljević, M.. (2012). Formation of intermetallics by ion implantation of multilatered Al/Ti nano-structures. in Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 282, 4-7.
https://doi.org/10.1016/j.nimb.2011.08.038

Peruško D, Petrović S, Stojanović M, Mitrić M, Cizmovic M, Panjan M, Milosavljević M. Formation of intermetallics by ion implantation of multilatered Al/Ti nano-structures. in Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms. 2012;282:4-7.
doi:10.1016/j.nimb.2011.08.038 .

Peruško, Davor, Petrović, Suzana, Stojanović, Mirjana, Mitrić, Miodrag, Cizmovic, M., Panjan, Matjaž, Milosavljević, Momir, "Formation of intermetallics by ion implantation of multilatered Al/Ti nano-structures" in Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 282 (2012):4-7,
https://doi.org/10.1016/j.nimb.2011.08.038 . .