Laser irradiation of nano-metric Al/Ti multilayers
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Аутори
Peruško, DavorCizmovic, M.
Petrović, Suzana
Siketic, Z.
Mitrić, Miodrag
Pelicon, P.
Dražić, Goran
Kovač, Janez
Milinović, Velimir
Milosavljević, Momir
Чланак у часопису
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Multilayered 5x(Al/Ti) structures, deposited on a Si substrate to a total thickness of 130 nm, were treated by unfocused Nd:YAG laser pulses (150 ps) with energies of 85 and 65 mJ. Irradiations were performed in air with 10, 50 and 100 successive laser pulses. Characterizations were done by using Rutherford backscattering spectrometry (RBS), elastic recoil detection analysis (ERDA), x-ray diffraction (XRD) and transmission electron microscopy (TEM). The results obtained show that laser irradiation, at either energy, induced almost full intermixing of deposited layers and formation of intermetallic compounds, but this was more pronounced for the applied laser pulses with a higher energy. The intermixed layer-silicon interface remains intact for all numbers of applied laser pulses and for both energies. The formation of an oxide layer on the sample surfaces was also observed, the thickness of which is greater for the higher laser beam energy.
Извор:
Laser Physics, 2013, 23, 3Финансирање / пројекти:
- SPIRIT - Support of Public and Industrial Research using Ion Beam Technology (EU-227012)
- Физички процеси у синтези нових наноструктурних материјала (RS-171023)
DOI: 10.1088/1054-660X/23/3/036005
ISSN: 1054-660X
WoS: 000318005700037
Scopus: 2-s2.0-84879123145
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Институција/група
VinčaTY - JOUR AU - Peruško, Davor AU - Cizmovic, M. AU - Petrović, Suzana AU - Siketic, Z. AU - Mitrić, Miodrag AU - Pelicon, P. AU - Dražić, Goran AU - Kovač, Janez AU - Milinović, Velimir AU - Milosavljević, Momir PY - 2013 UR - https://vinar.vin.bg.ac.rs/handle/123456789/5457 AB - Multilayered 5x(Al/Ti) structures, deposited on a Si substrate to a total thickness of 130 nm, were treated by unfocused Nd:YAG laser pulses (150 ps) with energies of 85 and 65 mJ. Irradiations were performed in air with 10, 50 and 100 successive laser pulses. Characterizations were done by using Rutherford backscattering spectrometry (RBS), elastic recoil detection analysis (ERDA), x-ray diffraction (XRD) and transmission electron microscopy (TEM). The results obtained show that laser irradiation, at either energy, induced almost full intermixing of deposited layers and formation of intermetallic compounds, but this was more pronounced for the applied laser pulses with a higher energy. The intermixed layer-silicon interface remains intact for all numbers of applied laser pulses and for both energies. The formation of an oxide layer on the sample surfaces was also observed, the thickness of which is greater for the higher laser beam energy. T2 - Laser Physics T1 - Laser irradiation of nano-metric Al/Ti multilayers VL - 23 IS - 3 DO - 10.1088/1054-660X/23/3/036005 ER -
@article{ author = "Peruško, Davor and Cizmovic, M. and Petrović, Suzana and Siketic, Z. and Mitrić, Miodrag and Pelicon, P. and Dražić, Goran and Kovač, Janez and Milinović, Velimir and Milosavljević, Momir", year = "2013", abstract = "Multilayered 5x(Al/Ti) structures, deposited on a Si substrate to a total thickness of 130 nm, were treated by unfocused Nd:YAG laser pulses (150 ps) with energies of 85 and 65 mJ. Irradiations were performed in air with 10, 50 and 100 successive laser pulses. Characterizations were done by using Rutherford backscattering spectrometry (RBS), elastic recoil detection analysis (ERDA), x-ray diffraction (XRD) and transmission electron microscopy (TEM). The results obtained show that laser irradiation, at either energy, induced almost full intermixing of deposited layers and formation of intermetallic compounds, but this was more pronounced for the applied laser pulses with a higher energy. The intermixed layer-silicon interface remains intact for all numbers of applied laser pulses and for both energies. The formation of an oxide layer on the sample surfaces was also observed, the thickness of which is greater for the higher laser beam energy.", journal = "Laser Physics", title = "Laser irradiation of nano-metric Al/Ti multilayers", volume = "23", number = "3", doi = "10.1088/1054-660X/23/3/036005" }
Peruško, D., Cizmovic, M., Petrović, S., Siketic, Z., Mitrić, M., Pelicon, P., Dražić, G., Kovač, J., Milinović, V.,& Milosavljević, M.. (2013). Laser irradiation of nano-metric Al/Ti multilayers. in Laser Physics, 23(3). https://doi.org/10.1088/1054-660X/23/3/036005
Peruško D, Cizmovic M, Petrović S, Siketic Z, Mitrić M, Pelicon P, Dražić G, Kovač J, Milinović V, Milosavljević M. Laser irradiation of nano-metric Al/Ti multilayers. in Laser Physics. 2013;23(3). doi:10.1088/1054-660X/23/3/036005 .
Peruško, Davor, Cizmovic, M., Petrović, Suzana, Siketic, Z., Mitrić, Miodrag, Pelicon, P., Dražić, Goran, Kovač, Janez, Milinović, Velimir, Milosavljević, Momir, "Laser irradiation of nano-metric Al/Ti multilayers" in Laser Physics, 23, no. 3 (2013), https://doi.org/10.1088/1054-660X/23/3/036005 . .