TY  - CONF
AU  - Radmilović-Rađenović, Marija
AU  - Petrovic, Z. Lj.
AU  - Nikitovic, Z.
AU  - Strinic, A.
AU  - Stojanovic, V.
AU  - Nina, A.
AU  - Rađenović, Branislav M.
PY  - 2007
UR  - https://vinar.vin.bg.ac.rs/handle/123456789/6583
AB  - Neutral beam processing has evolved into one of the most promising methods for overcoming plasma process induced damage. Surface treatment by neutrals avoids problems with surface charging effects, frequently encountered when using common ion treatment, especially for low k-materials. In this paper, the influence of various parameters on the neutralization of ion beams in Ar-CF4 mixture based on a Particle in Cell with Monte Carlo collisions (PIC/MCC) simulation is studied. The efficiency of neutralization has been treated by considering both surface neutralization of ions and collisions of ions in the gas.
C3  - Materials Science Forum
T1  - Particle-in-cell modelling of a neutral beam source for material processing in nanoscale structures fabrication
VL  - 555
SP  - 47
EP  - +
DO  - 10.4028/www.scientific.net/MSF.555.47
ER  - 

@conference{
author = "Radmilović-Rađenović, Marija and Petrovic, Z. Lj. and Nikitovic, Z. and Strinic, A. and Stojanovic, V. and Nina, A. and Rađenović, Branislav M.",
year = "2007",
abstract = "Neutral beam processing has evolved into one of the most promising methods for overcoming plasma process induced damage. Surface treatment by neutrals avoids problems with surface charging effects, frequently encountered when using common ion treatment, especially for low k-materials. In this paper, the influence of various parameters on the neutralization of ion beams in Ar-CF4 mixture based on a Particle in Cell with Monte Carlo collisions (PIC/MCC) simulation is studied. The efficiency of neutralization has been treated by considering both surface neutralization of ions and collisions of ions in the gas.",
journal = "Materials Science Forum",
title = "Particle-in-cell modelling of a neutral beam source for material processing in nanoscale structures fabrication",
volume = "555",
pages = "47-+",
doi = "10.4028/www.scientific.net/MSF.555.47"
}

Radmilović-Rađenović, M., Petrovic, Z. Lj., Nikitovic, Z., Strinic, A., Stojanovic, V., Nina, A.,& Rađenović, B. M.. (2007). Particle-in-cell modelling of a neutral beam source for material processing in nanoscale structures fabrication. in Materials Science Forum, 555, 47-+.
https://doi.org/10.4028/www.scientific.net/MSF.555.47

Radmilović-Rađenović M, Petrovic ZL, Nikitovic Z, Strinic A, Stojanovic V, Nina A, Rađenović BM. Particle-in-cell modelling of a neutral beam source for material processing in nanoscale structures fabrication. in Materials Science Forum. 2007;555:47-+.
doi:10.4028/www.scientific.net/MSF.555.47 .

Radmilović-Rađenović, Marija, Petrovic, Z. Lj., Nikitovic, Z., Strinic, A., Stojanovic, V., Nina, A., Rađenović, Branislav M., "Particle-in-cell modelling of a neutral beam source for material processing in nanoscale structures fabrication" in Materials Science Forum, 555 (2007):47-+,
https://doi.org/10.4028/www.scientific.net/MSF.555.47 . .