Atomic collision on surfaces and material implementation
Апстракт
The beam interaction with solids leads to changes in the surface atoms arrangements. Depending on the type and the energy of the incident species, the modified surface may consist of a deposited beam particle material for low-energy beams or implanted atoms and defects for higher energy surface modification. A choice of implementation technique depends on scientific interests and actual application. In this paper, the thin film coatings grown by PVD technique - evaporation and sputtering are considered. Both are the most commonly used techniques which offer a large flexibility of material implementation.
Кључне речи:
atomic collision / material implementation / sputtering / thin films/coatingsИзвор:
Materials Science Forum, 1996, 214, 163-170Напомена:
- Advanced Materials for High Technology Applications, 1st Yugoslavian Advanced Materials Conference - Advanced Materials 95 on Challenges of Tomorrow, Sep 18-22, 1995, Herceg Novi, Yugoslavia
DOI: 10.4028/www.scientific.net/MSF.214.163
ISSN: 0255-5476
WoS: A1996BG35S00020
Scopus: 2-s2.0-0029747641
Колекције
Институција/група
VinčaTY - JOUR AU - Nenadović, T PY - 1996 UR - https://vinar.vin.bg.ac.rs/handle/123456789/7203 AB - The beam interaction with solids leads to changes in the surface atoms arrangements. Depending on the type and the energy of the incident species, the modified surface may consist of a deposited beam particle material for low-energy beams or implanted atoms and defects for higher energy surface modification. A choice of implementation technique depends on scientific interests and actual application. In this paper, the thin film coatings grown by PVD technique - evaporation and sputtering are considered. Both are the most commonly used techniques which offer a large flexibility of material implementation. T2 - Materials Science Forum T1 - Atomic collision on surfaces and material implementation VL - 214 SP - 163 EP - 170 DO - 10.4028/www.scientific.net/MSF.214.163 ER -
@article{ author = "Nenadović, T", year = "1996", abstract = "The beam interaction with solids leads to changes in the surface atoms arrangements. Depending on the type and the energy of the incident species, the modified surface may consist of a deposited beam particle material for low-energy beams or implanted atoms and defects for higher energy surface modification. A choice of implementation technique depends on scientific interests and actual application. In this paper, the thin film coatings grown by PVD technique - evaporation and sputtering are considered. Both are the most commonly used techniques which offer a large flexibility of material implementation.", journal = "Materials Science Forum", title = "Atomic collision on surfaces and material implementation", volume = "214", pages = "163-170", doi = "10.4028/www.scientific.net/MSF.214.163" }
Nenadović, T.. (1996). Atomic collision on surfaces and material implementation. in Materials Science Forum, 214, 163-170. https://doi.org/10.4028/www.scientific.net/MSF.214.163
Nenadović T. Atomic collision on surfaces and material implementation. in Materials Science Forum. 1996;214:163-170. doi:10.4028/www.scientific.net/MSF.214.163 .
Nenadović, T, "Atomic collision on surfaces and material implementation" in Materials Science Forum, 214 (1996):163-170, https://doi.org/10.4028/www.scientific.net/MSF.214.163 . .