Intermixing and phase transformations in Al/Ti multilayer system induced by picosecond laser beam
Нема приказа
Аутори
Peruško, DavorKovač, Janez
Petrović, Suzana
Dražić, Goran
Mitrić, Miodrag
Milosavljević, Momir
Ciganović, Jovan
Чланак у часопису (Објављена верзија)
Метаподаци
Приказ свих података о документуАпстракт
Multilayer structures, consisting of 15 alternate Ti and Al thin films, and covered with thicker Ti layer, were deposited on a Si substrate to a total thickness of 900 nm. Laser treatment was performed in air by defocused Nd:YAG laser pulses (150 ps) with energies of 7 and 10 mJ covering an area of 3 mm in diameter (fluences were 0.1 and 0.14 J cm(-2) respectively). Laser beam was scanned over the 5 x 5 mm surface area. Characterizations were done by Auger electron spectroscopy, X-ray diffraction, X-ray photoelectron spectroscopy, atomic force microscopy and transmission electron microscopy. Nano-hardness measurements were performed by Vickers method with applied load of 5 mN. Obtained results show that irradiation with picosecond laser pulses leads to the formation of Ti2O3 in the top Ti layer. This process is more pronounced for higher energy and/or higher number of applied laser pulses. On the surface of all samples very thin amorphous TiO2 layer was formed. Laser irradiation induce...s surface melting and transformation of relatively flat surface into mosaic shaped one for samples treated with higher energy and higher number of applied laser pulses. Irradiation at smaller energy did not induce any noticeably mixing between Al and Ti beneath the covered Ti layer. Some mixing of Al and Ti appeared in the sample irradiated with higher energy of laser pulses. (C) 2015 Elsevier B.V. All rights reserved.
Кључне речи:
Al/Ti multilayers / Laser irradiation / Micro-cracks / Amorphous TiO2 layer / AES / TEM / XPS / Ti2O3Извор:
Thin Solid Films, 2015, 591, 357-362Напомена:
- 16th International Conference on Thin Films (ICTF), Oct 13-16, 2014, Dubrovnik, Croatia
DOI: 10.1016/j.tsf.2015.03.030
ISSN: 0040-6090
WoS: 000362008000037
Scopus: 2-s2.0-84942822348
Колекције
Институција/група
VinčaTY - JOUR AU - Peruško, Davor AU - Kovač, Janez AU - Petrović, Suzana AU - Dražić, Goran AU - Mitrić, Miodrag AU - Milosavljević, Momir AU - Ciganović, Jovan PY - 2015 UR - https://vinar.vin.bg.ac.rs/handle/123456789/7080 AB - Multilayer structures, consisting of 15 alternate Ti and Al thin films, and covered with thicker Ti layer, were deposited on a Si substrate to a total thickness of 900 nm. Laser treatment was performed in air by defocused Nd:YAG laser pulses (150 ps) with energies of 7 and 10 mJ covering an area of 3 mm in diameter (fluences were 0.1 and 0.14 J cm(-2) respectively). Laser beam was scanned over the 5 x 5 mm surface area. Characterizations were done by Auger electron spectroscopy, X-ray diffraction, X-ray photoelectron spectroscopy, atomic force microscopy and transmission electron microscopy. Nano-hardness measurements were performed by Vickers method with applied load of 5 mN. Obtained results show that irradiation with picosecond laser pulses leads to the formation of Ti2O3 in the top Ti layer. This process is more pronounced for higher energy and/or higher number of applied laser pulses. On the surface of all samples very thin amorphous TiO2 layer was formed. Laser irradiation induces surface melting and transformation of relatively flat surface into mosaic shaped one for samples treated with higher energy and higher number of applied laser pulses. Irradiation at smaller energy did not induce any noticeably mixing between Al and Ti beneath the covered Ti layer. Some mixing of Al and Ti appeared in the sample irradiated with higher energy of laser pulses. (C) 2015 Elsevier B.V. All rights reserved. T2 - Thin Solid Films T1 - Intermixing and phase transformations in Al/Ti multilayer system induced by picosecond laser beam VL - 591 SP - 357 EP - 362 DO - 10.1016/j.tsf.2015.03.030 ER -
@article{ author = "Peruško, Davor and Kovač, Janez and Petrović, Suzana and Dražić, Goran and Mitrić, Miodrag and Milosavljević, Momir and Ciganović, Jovan", year = "2015", abstract = "Multilayer structures, consisting of 15 alternate Ti and Al thin films, and covered with thicker Ti layer, were deposited on a Si substrate to a total thickness of 900 nm. Laser treatment was performed in air by defocused Nd:YAG laser pulses (150 ps) with energies of 7 and 10 mJ covering an area of 3 mm in diameter (fluences were 0.1 and 0.14 J cm(-2) respectively). Laser beam was scanned over the 5 x 5 mm surface area. Characterizations were done by Auger electron spectroscopy, X-ray diffraction, X-ray photoelectron spectroscopy, atomic force microscopy and transmission electron microscopy. Nano-hardness measurements were performed by Vickers method with applied load of 5 mN. Obtained results show that irradiation with picosecond laser pulses leads to the formation of Ti2O3 in the top Ti layer. This process is more pronounced for higher energy and/or higher number of applied laser pulses. On the surface of all samples very thin amorphous TiO2 layer was formed. Laser irradiation induces surface melting and transformation of relatively flat surface into mosaic shaped one for samples treated with higher energy and higher number of applied laser pulses. Irradiation at smaller energy did not induce any noticeably mixing between Al and Ti beneath the covered Ti layer. Some mixing of Al and Ti appeared in the sample irradiated with higher energy of laser pulses. (C) 2015 Elsevier B.V. All rights reserved.", journal = "Thin Solid Films", title = "Intermixing and phase transformations in Al/Ti multilayer system induced by picosecond laser beam", volume = "591", pages = "357-362", doi = "10.1016/j.tsf.2015.03.030" }
Peruško, D., Kovač, J., Petrović, S., Dražić, G., Mitrić, M., Milosavljević, M.,& Ciganović, J.. (2015). Intermixing and phase transformations in Al/Ti multilayer system induced by picosecond laser beam. in Thin Solid Films, 591, 357-362. https://doi.org/10.1016/j.tsf.2015.03.030
Peruško D, Kovač J, Petrović S, Dražić G, Mitrić M, Milosavljević M, Ciganović J. Intermixing and phase transformations in Al/Ti multilayer system induced by picosecond laser beam. in Thin Solid Films. 2015;591:357-362. doi:10.1016/j.tsf.2015.03.030 .
Peruško, Davor, Kovač, Janez, Petrović, Suzana, Dražić, Goran, Mitrić, Miodrag, Milosavljević, Momir, Ciganović, Jovan, "Intermixing and phase transformations in Al/Ti multilayer system induced by picosecond laser beam" in Thin Solid Films, 591 (2015):357-362, https://doi.org/10.1016/j.tsf.2015.03.030 . .