Ion Beam Modification of Reactively Sputtered TiN Thin Films
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2008
Authors
Popović, MajaNovaković, Mirjana
Milosavljević, Momir
Peruško, Davor
Milinović, Velimir
Radović, Ivan
Bibić, Nataša M.
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A study of ion beam modification of structural and electrical properties of TiN thin films is presented. The layers, were deposited by reactive ion sputtering on (100) Si substrates to a thickness of similar to 240 nm. After deposition the structures were implanted with argon ions at 120 keV, to the fluences from 1 x 10(15) - 1 x 10(16) ions/cm(2). Structural analysis of the samples was performed by cross-sectional transmission electron microscopy, x-ray diffraction and Rutherford backscattering spectrometry. It was found that the as-deposited layers have a columnar structure, individual columns stretching from the substrate to the surface and being a few tells of nanometers wide. Ion irradiation rearranges their crystalline structure, which remains polycrystalline, but the columns are broken, and nanocrystals of the same phase are formed.
Source:
Publications of the Astronomical Observatory of Belgrade, 2008, 84, 205-208Funding / projects:
- Modifikacija, sinteza i analiza nanostrukturnih materijala jonskim snopovima, gama zračenjem i vakuumskim deponovanjem (RS-MESTD-MPN2006-2010-141013)
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- 24th Summer School and International Symposium on Physics of Ionized Gases, Aug 25-29, 2008, Novi Sad, Serbia
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VinčaTY - CONF AU - Popović, Maja AU - Novaković, Mirjana AU - Milosavljević, Momir AU - Peruško, Davor AU - Milinović, Velimir AU - Radović, Ivan AU - Bibić, Nataša M. PY - 2008 UR - https://vinar.vin.bg.ac.rs/handle/123456789/6828 AB - A study of ion beam modification of structural and electrical properties of TiN thin films is presented. The layers, were deposited by reactive ion sputtering on (100) Si substrates to a thickness of similar to 240 nm. After deposition the structures were implanted with argon ions at 120 keV, to the fluences from 1 x 10(15) - 1 x 10(16) ions/cm(2). Structural analysis of the samples was performed by cross-sectional transmission electron microscopy, x-ray diffraction and Rutherford backscattering spectrometry. It was found that the as-deposited layers have a columnar structure, individual columns stretching from the substrate to the surface and being a few tells of nanometers wide. Ion irradiation rearranges their crystalline structure, which remains polycrystalline, but the columns are broken, and nanocrystals of the same phase are formed. C3 - Publications of the Astronomical Observatory of Belgrade T1 - Ion Beam Modification of Reactively Sputtered TiN Thin Films IS - 84 SP - 205 EP - 208 UR - https://hdl.handle.net/21.15107/rcub_vinar_6828 ER -
@conference{ author = "Popović, Maja and Novaković, Mirjana and Milosavljević, Momir and Peruško, Davor and Milinović, Velimir and Radović, Ivan and Bibić, Nataša M.", year = "2008", abstract = "A study of ion beam modification of structural and electrical properties of TiN thin films is presented. The layers, were deposited by reactive ion sputtering on (100) Si substrates to a thickness of similar to 240 nm. After deposition the structures were implanted with argon ions at 120 keV, to the fluences from 1 x 10(15) - 1 x 10(16) ions/cm(2). Structural analysis of the samples was performed by cross-sectional transmission electron microscopy, x-ray diffraction and Rutherford backscattering spectrometry. It was found that the as-deposited layers have a columnar structure, individual columns stretching from the substrate to the surface and being a few tells of nanometers wide. Ion irradiation rearranges their crystalline structure, which remains polycrystalline, but the columns are broken, and nanocrystals of the same phase are formed.", journal = "Publications of the Astronomical Observatory of Belgrade", title = "Ion Beam Modification of Reactively Sputtered TiN Thin Films", number = "84", pages = "205-208", url = "https://hdl.handle.net/21.15107/rcub_vinar_6828" }
Popović, M., Novaković, M., Milosavljević, M., Peruško, D., Milinović, V., Radović, I.,& Bibić, N. M.. (2008). Ion Beam Modification of Reactively Sputtered TiN Thin Films. in Publications of the Astronomical Observatory of Belgrade(84), 205-208. https://hdl.handle.net/21.15107/rcub_vinar_6828
Popović M, Novaković M, Milosavljević M, Peruško D, Milinović V, Radović I, Bibić NM. Ion Beam Modification of Reactively Sputtered TiN Thin Films. in Publications of the Astronomical Observatory of Belgrade. 2008;(84):205-208. https://hdl.handle.net/21.15107/rcub_vinar_6828 .
Popović, Maja, Novaković, Mirjana, Milosavljević, Momir, Peruško, Davor, Milinović, Velimir, Radović, Ivan, Bibić, Nataša M., "Ion Beam Modification of Reactively Sputtered TiN Thin Films" in Publications of the Astronomical Observatory of Belgrade, no. 84 (2008):205-208, https://hdl.handle.net/21.15107/rcub_vinar_6828 .