The effect of various parameters on the structure of W-Ti thin films
Апстракт
The properties of W-Ti thin films/coatings deposited by sputtering on various substrates have been studied. Structural analyses were made by X-ray diffraction and scanning tunneling microscopy. The results have shown that the crystal structure of W-Ti coatings has the same structure as tungsten; the presence of titanium gave rise to the expansion of the alpha-tungsten lattice. Microstructural features-grain size and morphology-mean surface roughness depend on substrate properties and thickness of the coatings. For the same thickness of deposited coatings, different inicrostructure features have been obtained as a function of substrate structure. The mean surface roughness and the grain size increase with increasing thickness of deposits on the same substrate.
Кључне речи:
STM / thin films / tungsten - titanium alloy / XRDИзвор:
Materials Science Forum, 2004, 453-454, 55-60Напомена:
- Progress in Advanced Materials and Processes, 5th Conference of the Yugoslav-Materials-Research-Society (Yu-MRS 2003), Sep 15-19, 2003, Herceg Novi, Yugoslavia
DOI: 10.4028/www.scientific.net/MSF.453-454.55
ISSN: 0255-5476
WoS: 000221535700010
Scopus: 2-s2.0-3142713843
Колекције
Институција/група
VinčaTY - JOUR AU - Petrović, Suzana AU - Gaković, Biljana M. AU - Rakočević, Zlatko Lj. AU - Nenadović, T PY - 2004 UR - https://vinar.vin.bg.ac.rs/handle/123456789/6418 AB - The properties of W-Ti thin films/coatings deposited by sputtering on various substrates have been studied. Structural analyses were made by X-ray diffraction and scanning tunneling microscopy. The results have shown that the crystal structure of W-Ti coatings has the same structure as tungsten; the presence of titanium gave rise to the expansion of the alpha-tungsten lattice. Microstructural features-grain size and morphology-mean surface roughness depend on substrate properties and thickness of the coatings. For the same thickness of deposited coatings, different inicrostructure features have been obtained as a function of substrate structure. The mean surface roughness and the grain size increase with increasing thickness of deposits on the same substrate. T2 - Materials Science Forum T1 - The effect of various parameters on the structure of W-Ti thin films VL - 453-454 SP - 55 EP - 60 DO - 10.4028/www.scientific.net/MSF.453-454.55 ER -
@article{ author = "Petrović, Suzana and Gaković, Biljana M. and Rakočević, Zlatko Lj. and Nenadović, T", year = "2004", abstract = "The properties of W-Ti thin films/coatings deposited by sputtering on various substrates have been studied. Structural analyses were made by X-ray diffraction and scanning tunneling microscopy. The results have shown that the crystal structure of W-Ti coatings has the same structure as tungsten; the presence of titanium gave rise to the expansion of the alpha-tungsten lattice. Microstructural features-grain size and morphology-mean surface roughness depend on substrate properties and thickness of the coatings. For the same thickness of deposited coatings, different inicrostructure features have been obtained as a function of substrate structure. The mean surface roughness and the grain size increase with increasing thickness of deposits on the same substrate.", journal = "Materials Science Forum", title = "The effect of various parameters on the structure of W-Ti thin films", volume = "453-454", pages = "55-60", doi = "10.4028/www.scientific.net/MSF.453-454.55" }
Petrović, S., Gaković, B. M., Rakočević, Z. Lj.,& Nenadović, T.. (2004). The effect of various parameters on the structure of W-Ti thin films. in Materials Science Forum, 453-454, 55-60. https://doi.org/10.4028/www.scientific.net/MSF.453-454.55
Petrović S, Gaković BM, Rakočević ZL, Nenadović T. The effect of various parameters on the structure of W-Ti thin films. in Materials Science Forum. 2004;453-454:55-60. doi:10.4028/www.scientific.net/MSF.453-454.55 .
Petrović, Suzana, Gaković, Biljana M., Rakočević, Zlatko Lj., Nenadović, T, "The effect of various parameters on the structure of W-Ti thin films" in Materials Science Forum, 453-454 (2004):55-60, https://doi.org/10.4028/www.scientific.net/MSF.453-454.55 . .