Design Rules for Single-Mode and Polarization-Independent Silicon-on-Insulator Rib Waveguides Using Stress Engineering
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Autori
Milosevic, Milan M.Matavuli, Petar S.
Timotijevic, Branislav D.
Reed, Graham T.
Mashanovich, Goran Z.
Članak u časopisu
Metapodaci
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There is a trend towards miniaturization of silicon photonic circuits due to superior performance and small cost. Design rules that must be imposed on the geometry of optical waveguides to make them behave as polarization-independent and single-mode devices are well known for waveguides with relatively large cross sections and for some small cross-sectional rib waveguides with vertical sidewalls and an air top cladding. The influence of the top oxide cover on waveguide birefringence was analyzed recently, but only for relatively large cross-sectional waveguides. This paper reports simulations for both single-mode and polarization-independent behavior for small cross-sectional waveguides with variable rib width, etch depth, top oxide cover thickness, and side-wall angle. The results show that the stress-induced effects must be taken into account to satisfy both requirements. Design rules to maintain birefringence-free operation and to satisfy single-mode behavior for small rib silicon-o...n-insulator (SOI) waveguides are presented.
Ključne reči:
Birefringence / polarization independence / rib waveguides / silicon photonics / single mode / stressIzvor:
Journal of Lightwave Technology, 2008, 26, 13-16, 1840-1846Finansiranje / projekti:
- U.K. Royal Society International [2006/R2-IJP], Serbian Ministry of Science [141006]
DOI: 10.1109/JLT.2008.922193
ISSN: 0733-8724
WoS: 000260874000012
Scopus: 2-s2.0-52149087228
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Institucija/grupa
VinčaTY - JOUR AU - Milosevic, Milan M. AU - Matavuli, Petar S. AU - Timotijevic, Branislav D. AU - Reed, Graham T. AU - Mashanovich, Goran Z. PY - 2008 UR - https://vinar.vin.bg.ac.rs/handle/123456789/3568 AB - There is a trend towards miniaturization of silicon photonic circuits due to superior performance and small cost. Design rules that must be imposed on the geometry of optical waveguides to make them behave as polarization-independent and single-mode devices are well known for waveguides with relatively large cross sections and for some small cross-sectional rib waveguides with vertical sidewalls and an air top cladding. The influence of the top oxide cover on waveguide birefringence was analyzed recently, but only for relatively large cross-sectional waveguides. This paper reports simulations for both single-mode and polarization-independent behavior for small cross-sectional waveguides with variable rib width, etch depth, top oxide cover thickness, and side-wall angle. The results show that the stress-induced effects must be taken into account to satisfy both requirements. Design rules to maintain birefringence-free operation and to satisfy single-mode behavior for small rib silicon-on-insulator (SOI) waveguides are presented. T2 - Journal of Lightwave Technology T1 - Design Rules for Single-Mode and Polarization-Independent Silicon-on-Insulator Rib Waveguides Using Stress Engineering VL - 26 IS - 13-16 SP - 1840 EP - 1846 DO - 10.1109/JLT.2008.922193 ER -
@article{ author = "Milosevic, Milan M. and Matavuli, Petar S. and Timotijevic, Branislav D. and Reed, Graham T. and Mashanovich, Goran Z.", year = "2008", abstract = "There is a trend towards miniaturization of silicon photonic circuits due to superior performance and small cost. Design rules that must be imposed on the geometry of optical waveguides to make them behave as polarization-independent and single-mode devices are well known for waveguides with relatively large cross sections and for some small cross-sectional rib waveguides with vertical sidewalls and an air top cladding. The influence of the top oxide cover on waveguide birefringence was analyzed recently, but only for relatively large cross-sectional waveguides. This paper reports simulations for both single-mode and polarization-independent behavior for small cross-sectional waveguides with variable rib width, etch depth, top oxide cover thickness, and side-wall angle. The results show that the stress-induced effects must be taken into account to satisfy both requirements. Design rules to maintain birefringence-free operation and to satisfy single-mode behavior for small rib silicon-on-insulator (SOI) waveguides are presented.", journal = "Journal of Lightwave Technology", title = "Design Rules for Single-Mode and Polarization-Independent Silicon-on-Insulator Rib Waveguides Using Stress Engineering", volume = "26", number = "13-16", pages = "1840-1846", doi = "10.1109/JLT.2008.922193" }
Milosevic, M. M., Matavuli, P. S., Timotijevic, B. D., Reed, G. T.,& Mashanovich, G. Z.. (2008). Design Rules for Single-Mode and Polarization-Independent Silicon-on-Insulator Rib Waveguides Using Stress Engineering. in Journal of Lightwave Technology, 26(13-16), 1840-1846. https://doi.org/10.1109/JLT.2008.922193
Milosevic MM, Matavuli PS, Timotijevic BD, Reed GT, Mashanovich GZ. Design Rules for Single-Mode and Polarization-Independent Silicon-on-Insulator Rib Waveguides Using Stress Engineering. in Journal of Lightwave Technology. 2008;26(13-16):1840-1846. doi:10.1109/JLT.2008.922193 .
Milosevic, Milan M., Matavuli, Petar S., Timotijevic, Branislav D., Reed, Graham T., Mashanovich, Goran Z., "Design Rules for Single-Mode and Polarization-Independent Silicon-on-Insulator Rib Waveguides Using Stress Engineering" in Journal of Lightwave Technology, 26, no. 13-16 (2008):1840-1846, https://doi.org/10.1109/JLT.2008.922193 . .