Detailed characterization of the Ti-O based thin films obtained by cathodic arc evaporation
Autori
Jokanović, Vukoman R.Bundaleski, Nenad
Čolović, Božana M.
Ferarra, Manuela
Jokanović, Bojan
Nasov, Ilija
Članak u časopisu (Objavljena verzija)
Metapodaci
Prikaz svih podataka o dokumentuApstrakt
Physicochemical properties of thin films on the base of titanium oxides, obtained by a cathodic arc evaporation on the surface of glass substrate are analysed in details. The analysis of these films was made by using XRD, FTIR, SEM, XPS analysis and ellipsometry. On the basis of these analyses, particularly analysis obtained by XPS, the oxidative state Ti and corresponding phases are determined through various film layers from the surface to the substrate. The depth of the various levels and their extinction coefficients and refractory indexes are estimated by ellipsometry.
Izvor:
Zaštita materijala, 2021, 62, 1, 41-50Finansiranje / projekti:
- Hemijsko i strukturno dizajniranje nanomaterijala za primenu u medicini i inženjerstvu tkiva (RS-MESTD-Basic Research (BR or ON)-172026)
- Funkcionalni, funkcionalizovani i usavršeni nano materijali (RS-MESTD-Integrated and Interdisciplinary Research (IIR or III)-45005)
- Portuguese National Funding Agency for Science, Research and Technology [UID/FIS/00068/2019]
Kolekcije
Institucija/grupa
VinčaTY - JOUR AU - Jokanović, Vukoman R. AU - Bundaleski, Nenad AU - Čolović, Božana M. AU - Ferarra, Manuela AU - Jokanović, Bojan AU - Nasov, Ilija PY - 2021 UR - https://vinar.vin.bg.ac.rs/handle/123456789/9891 AB - Physicochemical properties of thin films on the base of titanium oxides, obtained by a cathodic arc evaporation on the surface of glass substrate are analysed in details. The analysis of these films was made by using XRD, FTIR, SEM, XPS analysis and ellipsometry. On the basis of these analyses, particularly analysis obtained by XPS, the oxidative state Ti and corresponding phases are determined through various film layers from the surface to the substrate. The depth of the various levels and their extinction coefficients and refractory indexes are estimated by ellipsometry. T2 - Zaštita materijala T1 - Detailed characterization of the Ti-O based thin films obtained by cathodic arc evaporation VL - 62 IS - 1 SP - 41 EP - 50 DO - 10.5937/zasmat2101041J ER -
@article{ author = "Jokanović, Vukoman R. and Bundaleski, Nenad and Čolović, Božana M. and Ferarra, Manuela and Jokanović, Bojan and Nasov, Ilija", year = "2021", abstract = "Physicochemical properties of thin films on the base of titanium oxides, obtained by a cathodic arc evaporation on the surface of glass substrate are analysed in details. The analysis of these films was made by using XRD, FTIR, SEM, XPS analysis and ellipsometry. On the basis of these analyses, particularly analysis obtained by XPS, the oxidative state Ti and corresponding phases are determined through various film layers from the surface to the substrate. The depth of the various levels and their extinction coefficients and refractory indexes are estimated by ellipsometry.", journal = "Zaštita materijala", title = "Detailed characterization of the Ti-O based thin films obtained by cathodic arc evaporation", volume = "62", number = "1", pages = "41-50", doi = "10.5937/zasmat2101041J" }
Jokanović, V. R., Bundaleski, N., Čolović, B. M., Ferarra, M., Jokanović, B.,& Nasov, I.. (2021). Detailed characterization of the Ti-O based thin films obtained by cathodic arc evaporation. in Zaštita materijala, 62(1), 41-50. https://doi.org/10.5937/zasmat2101041J
Jokanović VR, Bundaleski N, Čolović BM, Ferarra M, Jokanović B, Nasov I. Detailed characterization of the Ti-O based thin films obtained by cathodic arc evaporation. in Zaštita materijala. 2021;62(1):41-50. doi:10.5937/zasmat2101041J .
Jokanović, Vukoman R., Bundaleski, Nenad, Čolović, Božana M., Ferarra, Manuela, Jokanović, Bojan, Nasov, Ilija, "Detailed characterization of the Ti-O based thin films obtained by cathodic arc evaporation" in Zaštita materijala, 62, no. 1 (2021):41-50, https://doi.org/10.5937/zasmat2101041J . .