Physicochemical properties of thin films on the base of titanium oxides, obtained by a cathodic arc evaporation on the surface of glass substrate are analysed in details. The analysis of these films was made by using XRD, FTIR, SEM, XPS analysis and ellipsometry. On the basis of these analyses, particularly analysis obtained by XPS, the oxidative state Ti and corresponding phases are determined through various film layers from the surface to the substrate. The depth of the various levels and their extinction coefficients and refractory indexes are estimated by ellipsometry.
TY - JOUR
AU - Jokanović, Vukoman R.
AU - Bundaleski, Nenad
AU - Čolović, Božana M.
AU - Ferarra, Manuela
AU - Jokanović, Bojan
AU - Nasov, Ilija
PY - 2021
UR - https://vinar.vin.bg.ac.rs/handle/123456789/9891
AB - Physicochemical properties of thin films on the base of titanium oxides, obtained by a cathodic arc evaporation on the surface of glass substrate are analysed in details. The analysis of these films was made by using XRD, FTIR, SEM, XPS analysis and ellipsometry. On the basis of these analyses, particularly analysis obtained by XPS, the oxidative state Ti and corresponding phases are determined through various film layers from the surface to the substrate. The depth of the various levels and their extinction coefficients and refractory indexes are estimated by ellipsometry.
T2 - Zaštita materijala
T1 - Detailed characterization of the Ti-O based thin films obtained by cathodic arc evaporation
VL - 62
IS - 1
SP - 41
EP - 50
DO - 10.5937/zasmat2101041J
ER -
@article{
author = "Jokanović, Vukoman R. and Bundaleski, Nenad and Čolović, Božana M. and Ferarra, Manuela and Jokanović, Bojan and Nasov, Ilija",
year = "2021",
abstract = "Physicochemical properties of thin films on the base of titanium oxides, obtained by a cathodic arc evaporation on the surface of glass substrate are analysed in details. The analysis of these films was made by using XRD, FTIR, SEM, XPS analysis and ellipsometry. On the basis of these analyses, particularly analysis obtained by XPS, the oxidative state Ti and corresponding phases are determined through various film layers from the surface to the substrate. The depth of the various levels and their extinction coefficients and refractory indexes are estimated by ellipsometry.",
journal = "Zaštita materijala",
title = "Detailed characterization of the Ti-O based thin films obtained by cathodic arc evaporation",
volume = "62",
number = "1",
pages = "41-50",
doi = "10.5937/zasmat2101041J"
}
Jokanović, V. R., Bundaleski, N., Čolović, B. M., Ferarra, M., Jokanović, B.,& Nasov, I.. (2021). Detailed characterization of the Ti-O based thin films obtained by cathodic arc evaporation. in Zaštita materijala, 62(1), 41-50.
https://doi.org/10.5937/zasmat2101041J
Jokanović VR, Bundaleski N, Čolović BM, Ferarra M, Jokanović B, Nasov I. Detailed characterization of the Ti-O based thin films obtained by cathodic arc evaporation. in Zaštita materijala. 2021;62(1):41-50.
doi:10.5937/zasmat2101041J .
Jokanović, Vukoman R., Bundaleski, Nenad, Čolović, Božana M., Ferarra, Manuela, Jokanović, Bojan, Nasov, Ilija, "Detailed characterization of the Ti-O based thin films obtained by cathodic arc evaporation" in Zaštita materijala, 62, no. 1 (2021):41-50,
https://doi.org/10.5937/zasmat2101041J . .
