Silicon Nanostructuring by Ag Ions Implantation Through Polystyrene Nanomask
Novaković, Mirjana M.
Bibić, Nataša M.
Rakočević, Zlatko Lj.
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Source:Program and Book of Abstracts / First International Conference on Electron Microscopy of Nanostructures ELMINA 2018, August 27-29, 2018, Belgrade, Serbia, 2018, 81-83
- Belgrade : Serbian Academy of Sciences and Arts