TixOy thin films with extremely low extinction coefficients obtained by pulsed magnetron sputtering
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2018
Authors
Jokanović, Vukoman R.Čolović, Božana M.
Bundaleski, Nenad
Jokanović, M.
Trajkovska Petkoska, Anka
Ferrara, Manuela
Nasov, Ilija
Rakočević, Zlatko Lj.
Article (Published version)
,
© 2018, National Institute of Optoelectronics
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Optical properties of TixOy thin film, of thickness 125 nm, obtained by pulsed magnetron sputtering were investigated in this paper. XRD analysis revealed the presence of anatase, rutile, TiO, Ti2O3and Ti3O5phases. XPS analysis showed similar results. SEM analysis showed quite smooth surface of the film. Spectroscopic ellipsometry revealed sharp decrease of refractive index in wavelength range 300-500 nm and extremely low values of extinction coefficients which are less than 0.01 at wavelengths equal to or higher than 500 nm.
Keywords:
pulsed magnetron sputtering / TixOy thin film / refractive index / extinction coefficientSource:
Journal of Optoelectronics and Advanced Materials, 2018, 20, 3-4, 169-174Funding / projects:
- Chemical and structural designing of nanomaterials for application in medicine and tissue engineering (RS-MESTD-Basic Research (BR or ON)-172026)
- Functional, Functionalized and Advanced Nanomaterials (RS-MESTD-Integrated and Interdisciplinary Research (IIR or III)-45005)
URI
https://joam.inoe.ro/index.php?option=magazine&op=view&idu=4206&catid=110https://vinar.vin.bg.ac.rs/handle/123456789/7716
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VinčaTY - JOUR AU - Jokanović, Vukoman R. AU - Čolović, Božana M. AU - Bundaleski, Nenad AU - Jokanović, M. AU - Trajkovska Petkoska, Anka AU - Ferrara, Manuela AU - Nasov, Ilija AU - Rakočević, Zlatko Lj. PY - 2018 UR - https://joam.inoe.ro/index.php?option=magazine&op=view&idu=4206&catid=110 UR - https://vinar.vin.bg.ac.rs/handle/123456789/7716 AB - Optical properties of TixOy thin film, of thickness 125 nm, obtained by pulsed magnetron sputtering were investigated in this paper. XRD analysis revealed the presence of anatase, rutile, TiO, Ti2O3and Ti3O5phases. XPS analysis showed similar results. SEM analysis showed quite smooth surface of the film. Spectroscopic ellipsometry revealed sharp decrease of refractive index in wavelength range 300-500 nm and extremely low values of extinction coefficients which are less than 0.01 at wavelengths equal to or higher than 500 nm. T2 - Journal of Optoelectronics and Advanced Materials T1 - TixOy thin films with extremely low extinction coefficients obtained by pulsed magnetron sputtering VL - 20 IS - 3-4 SP - 169 EP - 174 UR - https://hdl.handle.net/21.15107/rcub_vinar_7716 ER -
@article{ author = "Jokanović, Vukoman R. and Čolović, Božana M. and Bundaleski, Nenad and Jokanović, M. and Trajkovska Petkoska, Anka and Ferrara, Manuela and Nasov, Ilija and Rakočević, Zlatko Lj.", year = "2018", abstract = "Optical properties of TixOy thin film, of thickness 125 nm, obtained by pulsed magnetron sputtering were investigated in this paper. XRD analysis revealed the presence of anatase, rutile, TiO, Ti2O3and Ti3O5phases. XPS analysis showed similar results. SEM analysis showed quite smooth surface of the film. Spectroscopic ellipsometry revealed sharp decrease of refractive index in wavelength range 300-500 nm and extremely low values of extinction coefficients which are less than 0.01 at wavelengths equal to or higher than 500 nm.", journal = "Journal of Optoelectronics and Advanced Materials", title = "TixOy thin films with extremely low extinction coefficients obtained by pulsed magnetron sputtering", volume = "20", number = "3-4", pages = "169-174", url = "https://hdl.handle.net/21.15107/rcub_vinar_7716" }
Jokanović, V. R., Čolović, B. M., Bundaleski, N., Jokanović, M., Trajkovska Petkoska, A., Ferrara, M., Nasov, I.,& Rakočević, Z. Lj.. (2018). TixOy thin films with extremely low extinction coefficients obtained by pulsed magnetron sputtering. in Journal of Optoelectronics and Advanced Materials, 20(3-4), 169-174. https://hdl.handle.net/21.15107/rcub_vinar_7716
Jokanović VR, Čolović BM, Bundaleski N, Jokanović M, Trajkovska Petkoska A, Ferrara M, Nasov I, Rakočević ZL. TixOy thin films with extremely low extinction coefficients obtained by pulsed magnetron sputtering. in Journal of Optoelectronics and Advanced Materials. 2018;20(3-4):169-174. https://hdl.handle.net/21.15107/rcub_vinar_7716 .
Jokanović, Vukoman R., Čolović, Božana M., Bundaleski, Nenad, Jokanović, M., Trajkovska Petkoska, Anka, Ferrara, Manuela, Nasov, Ilija, Rakočević, Zlatko Lj., "TixOy thin films with extremely low extinction coefficients obtained by pulsed magnetron sputtering" in Journal of Optoelectronics and Advanced Materials, 20, no. 3-4 (2018):169-174, https://hdl.handle.net/21.15107/rcub_vinar_7716 .