This work reports on the induced diamond crystal amorphization by 4 MeV carbon ions implanted in the < 1 0 0 > oriented crystal and its determination by application of RBS/C and EBS/C techniques. The spectra from the implanted samples were recorded for 1.2, 1.5, 1.75 and 1.9 MeV protons. For the two latter ones the strong resonance of the nuclear elastic scattering (12)c(p,p(0))C-12 at 1.737 MeV was explored. The backscattering channeling spectra were successfully fitted and the ion beam induced crystal amorphization depth profile was determined using a phenomenological approach, which is based on the properly defined Gompertz type dechanneling functions for protons in the < 1 0 0 > diamond crystal channels and the introduction of the concept of ion beam amorphization, which is implemented through our newly developed computer code CSIM.
TY - JOUR
PY - 2018
UR - https://vinar.vin.bg.ac.rs/handle/123456789/7586
AB - This work reports on the induced diamond crystal amorphization by 4 MeV carbon ions implanted in the < 1 0 0 > oriented crystal and its determination by application of RBS/C and EBS/C techniques. The spectra from the implanted samples were recorded for 1.2, 1.5, 1.75 and 1.9 MeV protons. For the two latter ones the strong resonance of the nuclear elastic scattering (12)c(p,p(0))C-12 at 1.737 MeV was explored. The backscattering channeling spectra were successfully fitted and the ion beam induced crystal amorphization depth profile was determined using a phenomenological approach, which is based on the properly defined Gompertz type dechanneling functions for protons in the < 1 0 0 > diamond crystal channels and the introduction of the concept of ion beam amorphization, which is implemented through our newly developed computer code CSIM.
T2 - Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms
T1 - Channeling implantation of high energy carbon ions in a diamond crystal: Determination of the induced crystal amorphization
VL - 416
SP - 89
EP - 93
DO - 10.1016/j.nimb.2017.12.001
ER -
@article{
year = "2018",
abstract = "This work reports on the induced diamond crystal amorphization by 4 MeV carbon ions implanted in the < 1 0 0 > oriented crystal and its determination by application of RBS/C and EBS/C techniques. The spectra from the implanted samples were recorded for 1.2, 1.5, 1.75 and 1.9 MeV protons. For the two latter ones the strong resonance of the nuclear elastic scattering (12)c(p,p(0))C-12 at 1.737 MeV was explored. The backscattering channeling spectra were successfully fitted and the ion beam induced crystal amorphization depth profile was determined using a phenomenological approach, which is based on the properly defined Gompertz type dechanneling functions for protons in the < 1 0 0 > diamond crystal channels and the introduction of the concept of ion beam amorphization, which is implemented through our newly developed computer code CSIM.",
journal = "Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms",
title = "Channeling implantation of high energy carbon ions in a diamond crystal: Determination of the induced crystal amorphization",
volume = "416",
pages = "89-93",
doi = "10.1016/j.nimb.2017.12.001"
}
(2018). Channeling implantation of high energy carbon ions in a diamond crystal: Determination of the induced crystal amorphization. in Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms, 416, 89-93.
https://doi.org/10.1016/j.nimb.2017.12.001
Channeling implantation of high energy carbon ions in a diamond crystal: Determination of the induced crystal amorphization. in Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms. 2018;416:89-93.
doi:10.1016/j.nimb.2017.12.001 .
"Channeling implantation of high energy carbon ions in a diamond crystal: Determination of the induced crystal amorphization" in Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms, 416 (2018):89-93,
https://doi.org/10.1016/j.nimb.2017.12.001 . .
