Atomic collision on surfaces and material implementation
The beam interaction with solids leads to changes in the surface atoms arrangements. Depending on the type and the energy of the incident species, the modified surface may consist of a deposited beam particle material for low-energy beams or implanted atoms and defects for higher energy surface modification. A choice of implementation technique depends on scientific interests and actual application. In this paper, the thin film coatings grown by PVD technique - evaporation and sputtering are considered. Both are the most commonly used techniques which offer a large flexibility of material implementation.
Keywords:atomic collision / material implementation / sputtering / thin films/coatings
Source:Materials Science Forum, 1996, 214, 163-170
- Advanced Materials for High Technology Applications, 1st Yugoslavian Advanced Materials Conference - Advanced Materials 95 on Challenges of Tomorrow, Sep 18-22, 1995, Herceg Novi, Yugoslavia