Intermixing in Al/Ti multilayer structures induced by nanosecond laser pulses
Nema prikaza
Autori
Cizmovic, M.Kovač, Janez
Milosavljević, Momir
Petrović, Suzana
Dražić, Goran
Mitrić, Miodrag
Obradović, Marko O.
Schaaf, P.
Peruško, Davor
Članak u časopisu (Objavljena verzija)
Metapodaci
Prikaz svih podataka o dokumentuApstrakt
Structural and compositional modifications of multilayered Al/Ti nano-structures induced by nanosecond laser pulses were investigated. Five and ten (Al/Ti) bilayers, with total thicknesses of 130 and 260 nm, respectively, were deposited by dc ion sputtering onto (100) Si wafers. The structures were irradiated in air with nanosecond Nd:YAG unfocused laser pulses. Characterizations of the samples were performed by x-ray diffraction analysis, Auger electron spectroscopy, atomic force microscopy and transmission electron microscopy. It was found that laser treatment of both structures induced complete intermixing of all deposited metallic films, their mixing with silicon substrate and formation of Al-Ti intermetallic and silicide compounds. This effect was achieved even for one applied laser pulse. Comparing these results with that for picosecond laser treatment of similar multilayered structures, it was concluded that materials involved within the heat diffusion length participated in the... formation of new phases.
Izvor:
Physica Scripta, 2013, T157Finansiranje / projekti:
Napomena:
- 3rd International Conference on the Physics of Optical Materials and Devices, Sep 02-06, 2012, Belgrade, Serbia
DOI: 10.1088/0031-8949/2013/T157/014008
ISSN: 0031-8949; 1402-4896
WoS: 000332504600009
Scopus: 2-s2.0-84891857023
Kolekcije
Institucija/grupa
VinčaTY - JOUR AU - Cizmovic, M. AU - Kovač, Janez AU - Milosavljević, Momir AU - Petrović, Suzana AU - Dražić, Goran AU - Mitrić, Miodrag AU - Obradović, Marko O. AU - Schaaf, P. AU - Peruško, Davor PY - 2013 UR - https://vinar.vin.bg.ac.rs/handle/123456789/7016 AB - Structural and compositional modifications of multilayered Al/Ti nano-structures induced by nanosecond laser pulses were investigated. Five and ten (Al/Ti) bilayers, with total thicknesses of 130 and 260 nm, respectively, were deposited by dc ion sputtering onto (100) Si wafers. The structures were irradiated in air with nanosecond Nd:YAG unfocused laser pulses. Characterizations of the samples were performed by x-ray diffraction analysis, Auger electron spectroscopy, atomic force microscopy and transmission electron microscopy. It was found that laser treatment of both structures induced complete intermixing of all deposited metallic films, their mixing with silicon substrate and formation of Al-Ti intermetallic and silicide compounds. This effect was achieved even for one applied laser pulse. Comparing these results with that for picosecond laser treatment of similar multilayered structures, it was concluded that materials involved within the heat diffusion length participated in the formation of new phases. T2 - Physica Scripta T1 - Intermixing in Al/Ti multilayer structures induced by nanosecond laser pulses VL - T157 DO - 10.1088/0031-8949/2013/T157/014008 ER -
@article{ author = "Cizmovic, M. and Kovač, Janez and Milosavljević, Momir and Petrović, Suzana and Dražić, Goran and Mitrić, Miodrag and Obradović, Marko O. and Schaaf, P. and Peruško, Davor", year = "2013", abstract = "Structural and compositional modifications of multilayered Al/Ti nano-structures induced by nanosecond laser pulses were investigated. Five and ten (Al/Ti) bilayers, with total thicknesses of 130 and 260 nm, respectively, were deposited by dc ion sputtering onto (100) Si wafers. The structures were irradiated in air with nanosecond Nd:YAG unfocused laser pulses. Characterizations of the samples were performed by x-ray diffraction analysis, Auger electron spectroscopy, atomic force microscopy and transmission electron microscopy. It was found that laser treatment of both structures induced complete intermixing of all deposited metallic films, their mixing with silicon substrate and formation of Al-Ti intermetallic and silicide compounds. This effect was achieved even for one applied laser pulse. Comparing these results with that for picosecond laser treatment of similar multilayered structures, it was concluded that materials involved within the heat diffusion length participated in the formation of new phases.", journal = "Physica Scripta", title = "Intermixing in Al/Ti multilayer structures induced by nanosecond laser pulses", volume = "T157", doi = "10.1088/0031-8949/2013/T157/014008" }
Cizmovic, M., Kovač, J., Milosavljević, M., Petrović, S., Dražić, G., Mitrić, M., Obradović, M. O., Schaaf, P.,& Peruško, D.. (2013). Intermixing in Al/Ti multilayer structures induced by nanosecond laser pulses. in Physica Scripta, T157. https://doi.org/10.1088/0031-8949/2013/T157/014008
Cizmovic M, Kovač J, Milosavljević M, Petrović S, Dražić G, Mitrić M, Obradović MO, Schaaf P, Peruško D. Intermixing in Al/Ti multilayer structures induced by nanosecond laser pulses. in Physica Scripta. 2013;T157. doi:10.1088/0031-8949/2013/T157/014008 .
Cizmovic, M., Kovač, Janez, Milosavljević, Momir, Petrović, Suzana, Dražić, Goran, Mitrić, Miodrag, Obradović, Marko O., Schaaf, P., Peruško, Davor, "Intermixing in Al/Ti multilayer structures induced by nanosecond laser pulses" in Physica Scripta, T157 (2013), https://doi.org/10.1088/0031-8949/2013/T157/014008 . .