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Surface modification of Ti-based nanocomposite multilayer structures by using laser beam irradiation

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Authors
Petrović, Suzana
Salatić, Branislav
Peruško, Davor
Panjan, Matjaž
Čekada, Miha
Gaković, Biljana M.
Jelenković, Branislav
Trtica, Milan
Article
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Abstract
A study of the effects of laser irradiation on the morphology and structure of Al/Ti and Ni/Ti multilayers is reported in this paper. Multilayers of Al/Ti and Ni/Ti were deposited by dc ion sputtering on Si(100) substrates in a single vacuum run. Laser processing was done by a focused Er, Yb, Cr glass laser beam at a wavelength of 1540 nm, a pulse duration of 40 ns and fluence in the range 8.5-23.8 J cm(-2). Surface changes can be summarized as follows: (i) the intensive removal of surface material with crater-like characteristics, (ii) the appearance of hydrodynamic features (such as resolidified droplets) and (iii) the sporadic appearance of cracking. Changes in the (Ni/Ti)/Si system included modification of the Si substrate with the formation of polygonal-mosaic structures and the appearance of hydrodynamic features in the form of nano-globules. The rate of ablation increased with energy density, whereas the rate of ablation for the (Ni/Ti)/Si system (similar to 11 x 10(3) mu m(3) p...er pulse) was higher than that for the (Al/Ti)/Si system (similar to 7 x 10(3) mu m(3) per pulse).

Source:
Physica Scripta, 2012, T149
Funding / projects:
  • Fabrication and characterization of nano-photonic functional structrues in biomedicine and informatics (RS-45016)
  • Ministry of Science and Technology of the Republic of Slovenia
Note:
  • 3rd International School and Conference on Photonics, Aug 29-Sep 02, 2011, Belgrade, Serbia

DOI: 10.1088/0031-8949/2012/T149/014082

ISSN: 0031-8949; 1402-4896

WoS: 000303523500083

Scopus: 2-s2.0-84860452473
[ Google Scholar ]
2
1
URI
https://vinar.vin.bg.ac.rs/handle/123456789/6956
Collections
  • WoS Import
Institution/Community
Vinča
TY  - JOUR
AU  - Petrović, Suzana
AU  - Salatić, Branislav
AU  - Peruško, Davor
AU  - Panjan, Matjaž
AU  - Čekada, Miha
AU  - Gaković, Biljana M.
AU  - Jelenković, Branislav
AU  - Trtica, Milan
PY  - 2012
UR  - https://vinar.vin.bg.ac.rs/handle/123456789/6956
AB  - A study of the effects of laser irradiation on the morphology and structure of Al/Ti and Ni/Ti multilayers is reported in this paper. Multilayers of Al/Ti and Ni/Ti were deposited by dc ion sputtering on Si(100) substrates in a single vacuum run. Laser processing was done by a focused Er, Yb, Cr glass laser beam at a wavelength of 1540 nm, a pulse duration of 40 ns and fluence in the range 8.5-23.8 J cm(-2). Surface changes can be summarized as follows: (i) the intensive removal of surface material with crater-like characteristics, (ii) the appearance of hydrodynamic features (such as resolidified droplets) and (iii) the sporadic appearance of cracking. Changes in the (Ni/Ti)/Si system included modification of the Si substrate with the formation of polygonal-mosaic structures and the appearance of hydrodynamic features in the form of nano-globules. The rate of ablation increased with energy density, whereas the rate of ablation for the (Ni/Ti)/Si system (similar to 11 x 10(3) mu m(3) per pulse) was higher than that for the (Al/Ti)/Si system (similar to 7 x 10(3) mu m(3) per pulse).
T2  - Physica Scripta
T1  - Surface modification of Ti-based nanocomposite multilayer structures by using laser beam irradiation
VL  - T149
DO  - 10.1088/0031-8949/2012/T149/014082
ER  - 
@article{
author = "Petrović, Suzana and Salatić, Branislav and Peruško, Davor and Panjan, Matjaž and Čekada, Miha and Gaković, Biljana M. and Jelenković, Branislav and Trtica, Milan",
year = "2012",
abstract = "A study of the effects of laser irradiation on the morphology and structure of Al/Ti and Ni/Ti multilayers is reported in this paper. Multilayers of Al/Ti and Ni/Ti were deposited by dc ion sputtering on Si(100) substrates in a single vacuum run. Laser processing was done by a focused Er, Yb, Cr glass laser beam at a wavelength of 1540 nm, a pulse duration of 40 ns and fluence in the range 8.5-23.8 J cm(-2). Surface changes can be summarized as follows: (i) the intensive removal of surface material with crater-like characteristics, (ii) the appearance of hydrodynamic features (such as resolidified droplets) and (iii) the sporadic appearance of cracking. Changes in the (Ni/Ti)/Si system included modification of the Si substrate with the formation of polygonal-mosaic structures and the appearance of hydrodynamic features in the form of nano-globules. The rate of ablation increased with energy density, whereas the rate of ablation for the (Ni/Ti)/Si system (similar to 11 x 10(3) mu m(3) per pulse) was higher than that for the (Al/Ti)/Si system (similar to 7 x 10(3) mu m(3) per pulse).",
journal = "Physica Scripta",
title = "Surface modification of Ti-based nanocomposite multilayer structures by using laser beam irradiation",
volume = "T149",
doi = "10.1088/0031-8949/2012/T149/014082"
}
Petrović, S., Salatić, B., Peruško, D., Panjan, M., Čekada, M., Gaković, B. M., Jelenković, B.,& Trtica, M.. (2012). Surface modification of Ti-based nanocomposite multilayer structures by using laser beam irradiation. in Physica Scripta, T149.
https://doi.org/10.1088/0031-8949/2012/T149/014082
Petrović S, Salatić B, Peruško D, Panjan M, Čekada M, Gaković BM, Jelenković B, Trtica M. Surface modification of Ti-based nanocomposite multilayer structures by using laser beam irradiation. in Physica Scripta. 2012;T149.
doi:10.1088/0031-8949/2012/T149/014082 .
Petrović, Suzana, Salatić, Branislav, Peruško, Davor, Panjan, Matjaž, Čekada, Miha, Gaković, Biljana M., Jelenković, Branislav, Trtica, Milan, "Surface modification of Ti-based nanocomposite multilayer structures by using laser beam irradiation" in Physica Scripta, T149 (2012),
https://doi.org/10.1088/0031-8949/2012/T149/014082 . .

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