Chemical and structural modifications of laser treated WTi surfaces at different ambient conditions
Nema prikaza
Autori
Petrović, SuzanaPeruško, Davor
Milovanović, Dubravka S.
Siketic, Z.
Jaksic, M.
Kovač, Janez
Gaković, Biljana M.
Milosavljević, Momir
Trtica, Milan
Članak u časopisu
Metapodaci
Prikaz svih podataka o dokumentuApstrakt
In this work we have studied the influence of laser modification on the composition and structure of tungsten titanium (WTi) thin films, deposited on n-type (100) silicon wafers. After deposition, the samples were multi-pulse laser irradiated in a nitrogen, oxygen, and helium ambient. The composition of the WTi/Si sample was determined by Elastic Recoil Detection Analysis (ERDA). Surface morphology was monitored by Atomic Force Microscopy (AFM). In the experiment, typical laser output parameters were: wavelength 1064 nm, pulse duration 150 ps, and laser pulse energy 30 mJ. Surface concentrations of W and Ti, as well as the concentration of gas components nitrogen and oxygen were determinated before and after the action of laser radiation in different ambient conditions. The contents of W and Ti decreased after irradiation due to adsorbed gases from the surrounding atmosphere. After surface irradiation in the inert ambient (He), the concentrations of the components were not significantl...y changed. In other cases, oxygen was the dominant component at the surface, probably due to the high affinity of thin film components. Also, the morphological changes occurred at the surface of WTi, as an increase in the surface roughness and formation of the granular structures are a result of laser-induced surface oxidation and recrystallization.
Izvor:
Applied Physics. B: Lasers and Optics, 2011, 105, 3, 593-597Finansiranje / projekti:
- Efekti dejstva laserskog zračenja i plazme na savremene materijale pri njihovoj sintezi, modifikaciji i analizi (RS-MESTD-Basic Research (BR or ON)-172019)
- Slovenian Research Agency
- Generisanje i karakterizacija nanofotonskih funkcionalnih struktura u biomedicini i informatici (RS-MESTD-Integrated and Interdisciplinary Research (IIR or III)-45016)
- Ministry of Science, Education, and Sports of the Republic of Croatia
Napomena:
- International Conference on Advanced Laser Technologies (ALT10), Sep 11-16, 2010, Egmond aan Zee, Netherlands
DOI: 10.1007/s00340-011-4505-4
ISSN: 0946-2171; 1432-0649
WoS: 000296780300016
Scopus: 2-s2.0-84859723023
Kolekcije
Institucija/grupa
VinčaTY - JOUR AU - Petrović, Suzana AU - Peruško, Davor AU - Milovanović, Dubravka S. AU - Siketic, Z. AU - Jaksic, M. AU - Kovač, Janez AU - Gaković, Biljana M. AU - Milosavljević, Momir AU - Trtica, Milan PY - 2011 UR - https://vinar.vin.bg.ac.rs/handle/123456789/6932 AB - In this work we have studied the influence of laser modification on the composition and structure of tungsten titanium (WTi) thin films, deposited on n-type (100) silicon wafers. After deposition, the samples were multi-pulse laser irradiated in a nitrogen, oxygen, and helium ambient. The composition of the WTi/Si sample was determined by Elastic Recoil Detection Analysis (ERDA). Surface morphology was monitored by Atomic Force Microscopy (AFM). In the experiment, typical laser output parameters were: wavelength 1064 nm, pulse duration 150 ps, and laser pulse energy 30 mJ. Surface concentrations of W and Ti, as well as the concentration of gas components nitrogen and oxygen were determinated before and after the action of laser radiation in different ambient conditions. The contents of W and Ti decreased after irradiation due to adsorbed gases from the surrounding atmosphere. After surface irradiation in the inert ambient (He), the concentrations of the components were not significantly changed. In other cases, oxygen was the dominant component at the surface, probably due to the high affinity of thin film components. Also, the morphological changes occurred at the surface of WTi, as an increase in the surface roughness and formation of the granular structures are a result of laser-induced surface oxidation and recrystallization. T2 - Applied Physics. B: Lasers and Optics T1 - Chemical and structural modifications of laser treated WTi surfaces at different ambient conditions VL - 105 IS - 3 SP - 593 EP - 597 DO - 10.1007/s00340-011-4505-4 ER -
@article{ author = "Petrović, Suzana and Peruško, Davor and Milovanović, Dubravka S. and Siketic, Z. and Jaksic, M. and Kovač, Janez and Gaković, Biljana M. and Milosavljević, Momir and Trtica, Milan", year = "2011", abstract = "In this work we have studied the influence of laser modification on the composition and structure of tungsten titanium (WTi) thin films, deposited on n-type (100) silicon wafers. After deposition, the samples were multi-pulse laser irradiated in a nitrogen, oxygen, and helium ambient. The composition of the WTi/Si sample was determined by Elastic Recoil Detection Analysis (ERDA). Surface morphology was monitored by Atomic Force Microscopy (AFM). In the experiment, typical laser output parameters were: wavelength 1064 nm, pulse duration 150 ps, and laser pulse energy 30 mJ. Surface concentrations of W and Ti, as well as the concentration of gas components nitrogen and oxygen were determinated before and after the action of laser radiation in different ambient conditions. The contents of W and Ti decreased after irradiation due to adsorbed gases from the surrounding atmosphere. After surface irradiation in the inert ambient (He), the concentrations of the components were not significantly changed. In other cases, oxygen was the dominant component at the surface, probably due to the high affinity of thin film components. Also, the morphological changes occurred at the surface of WTi, as an increase in the surface roughness and formation of the granular structures are a result of laser-induced surface oxidation and recrystallization.", journal = "Applied Physics. B: Lasers and Optics", title = "Chemical and structural modifications of laser treated WTi surfaces at different ambient conditions", volume = "105", number = "3", pages = "593-597", doi = "10.1007/s00340-011-4505-4" }
Petrović, S., Peruško, D., Milovanović, D. S., Siketic, Z., Jaksic, M., Kovač, J., Gaković, B. M., Milosavljević, M.,& Trtica, M.. (2011). Chemical and structural modifications of laser treated WTi surfaces at different ambient conditions. in Applied Physics. B: Lasers and Optics, 105(3), 593-597. https://doi.org/10.1007/s00340-011-4505-4
Petrović S, Peruško D, Milovanović DS, Siketic Z, Jaksic M, Kovač J, Gaković BM, Milosavljević M, Trtica M. Chemical and structural modifications of laser treated WTi surfaces at different ambient conditions. in Applied Physics. B: Lasers and Optics. 2011;105(3):593-597. doi:10.1007/s00340-011-4505-4 .
Petrović, Suzana, Peruško, Davor, Milovanović, Dubravka S., Siketic, Z., Jaksic, M., Kovač, Janez, Gaković, Biljana M., Milosavljević, Momir, Trtica, Milan, "Chemical and structural modifications of laser treated WTi surfaces at different ambient conditions" in Applied Physics. B: Lasers and Optics, 105, no. 3 (2011):593-597, https://doi.org/10.1007/s00340-011-4505-4 . .