Show simple item record

dc.creatorNovaković, Mirjana M.
dc.creatorPopović, Maja
dc.creatorBibić, Nataša M.
dc.date.accessioned2018-03-03T14:42:41Z
dc.date.available2018-03-03T14:42:41Z
dc.date.issued2010
dc.identifier.issn0168-583X (print)
dc.identifier.urihttp://vinar.vin.bg.ac.rs/handle/123456789/6886
dc.description.abstractThe present study deals with CrN/Si bilayers irradiated at room temperature (RI) with 120 keV Ar ions. The CrN layers were deposited by d.c. reactive sputtering on Si(1 0 0) wafers, at different nitrogen partial pressures (2 x 10(-4), 3.5 x 10(-4) and 5 x 10(-4) mbar), to a total thickness of 240-280 nm. The substrates were held at room temperature (RI) or 150 degrees C during deposition. After deposition the CrN/Si bilayers were irradiated up to fluences of 1 x 10(15) and 1 x 10(16) ions/cm(2). Structural characterization was performed with Rutherford backscattering spectroscopy (RBS), cross-sectional transmission electron microscopy (XTEM) and grazing angle X-ray diffraction (XRD). For the highest nitrogen pressure (5 x 10(-4) mbar) a pure stoichiometric CrN phase was achieved. The results showed that Ar ion irradiation resulted in the variation of the lattice constants, micro-strain and mean grain size of the CrN layers. The observed microstructural changes are due to the formation of the high density damage region in the CrN thin film structure. (C) 2010 Elsevier B.V. All rights reserved.en
dc.relationinfo:eu-repo/grantAgreement/MESTD/MPN2006-2010/141013/RS//
dc.rightsrestrictedAccessen
dc.sourceNuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atomsen
dc.subjectCrN hard coatingsen
dc.subjectIon irradiationen
dc.subjectTEMen
dc.subjectRBSen
dc.subjectXRDen
dc.titleIon-beam irradiation effects on reactively sputtered CrN thin filmsen
dc.typearticleen
dc.rights.licenseARR
dcterms.abstractБибиц, Н.; Поповић Маја; Новаковић Мирјана;
dc.citation.volume268
dc.citation.issue19
dc.citation.spage2883
dc.citation.epage2887
dc.identifier.wos000282301100008
dc.identifier.doi10.1016/j.nimb.2010.03.027
dc.citation.rankM22
dc.description.other15th International Conference of the Radiation Effects in Insulators, Aug 30-Sep 04, 2009, Italyen
dc.identifier.scopus2-s2.0-77956174165


Files in this item

Thumbnail

This item appears in the following Collection(s)

Show simple item record