Tailoring of morphology and orientation of LaNiO3 films from polymeric precursors
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The aim of this work was to prepare lanthanum nickel oxide (LaNiO3, LNO) thin films of different morphology and orientation. The precursor solutions were prepared by a chemical method from citric salts of lanthanum and nickel. Films were deposited using spin-on technique on Si (10 0) substrates. Tailoring of the films orientation and morphology has been attained through two thermal treatment processes with different heating 9 devices: tubular furnace (process 1) and hot plate (process 2). Films were annealed at 600 and 700 degrees C, with heating rates: 20 degrees C/min (process 1) and I degrees C/min (process 2). Annealing times were from 30 min to 20 h. LNO films were characterized by AFM and X-ray diffraction analysis. Depending on the heating process applied, the obtained films showed very different structures, from completely amorphous to well crystallized and highly oriented. Films treated by process I were polycrystalline, had smaller oval grains and lower roughness parameters t...han films heated on a hot plate. Due to the low heating rate and heating from the substrate side, films obtained through process 2 were highly (I 10) oriented with elongated grains aligned along one direction.
Keywords:precursors-organic / films / LaNiO3
Source:Journal of the European Ceramic Society, 2007, 27, 13-15, 3819-3822
- International Conference on Electroceramics, Jun 18-22, 2006, Toledo, Spain