In this work we investigated the interaction of ns laser pulses (TEA CO2 and Nd:YAG) with a titanium nitride (TiN) thin film. The TiN thin film of 1 mu m thickness was deposited by PVD method on silicon substrate. Modification of TiN film was induced by laser pulses with power densities of about 10(8) and 10(9) W/cm(2). Part of the laser energy absorbed on the target surface was converted into thermal energy and effects such as melting, vaporization and exfoliation were observed. Nd:YAG laser produced craters with sharp periphery, while TEA CO2 laser created damages with broad boundary zone. Hydrodynamic effects were especially pronounced during irradiation with TEA CO2 laser.
Кључне речи:
Nd : YAG laser / OM / SEM / TEA CO2 laser / TiN thin film
Извор:
Materials Science Forum, 2006, 518, 161-166
Напомена:
Recent Developments in Advanced Materials and Processes, 7th Conference of the Yugoslav-Materials-Research-Society (Yu-MRS), Sep 12-16, 2005, Herceg Novi, Montenegro
TY - JOUR
AU - Gaković, Biljana M.
AU - Pongrac, I.
AU - Petrović, Suzana
AU - Minic, D.
AU - Trtica, Milan
PY - 2006
UR - https://vinar.vin.bg.ac.rs/handle/123456789/6601
AB - In this work we investigated the interaction of ns laser pulses (TEA CO2 and Nd:YAG) with a titanium nitride (TiN) thin film. The TiN thin film of 1 mu m thickness was deposited by PVD method on silicon substrate. Modification of TiN film was induced by laser pulses with power densities of about 10(8) and 10(9) W/cm(2). Part of the laser energy absorbed on the target surface was converted into thermal energy and effects such as melting, vaporization and exfoliation were observed. Nd:YAG laser produced craters with sharp periphery, while TEA CO2 laser created damages with broad boundary zone. Hydrodynamic effects were especially pronounced during irradiation with TEA CO2 laser.
T2 - Materials Science Forum
T1 - Nano-second surface modification of titanium nitride thin film by Nd : YAG and TEA CO2 lasers
VL - 518
SP - 161
EP - 166
DO - 10.4028/www.scientific.net/MSF.518.161
ER -
@article{
author = "Gaković, Biljana M. and Pongrac, I. and Petrović, Suzana and Minic, D. and Trtica, Milan",
year = "2006",
abstract = "In this work we investigated the interaction of ns laser pulses (TEA CO2 and Nd:YAG) with a titanium nitride (TiN) thin film. The TiN thin film of 1 mu m thickness was deposited by PVD method on silicon substrate. Modification of TiN film was induced by laser pulses with power densities of about 10(8) and 10(9) W/cm(2). Part of the laser energy absorbed on the target surface was converted into thermal energy and effects such as melting, vaporization and exfoliation were observed. Nd:YAG laser produced craters with sharp periphery, while TEA CO2 laser created damages with broad boundary zone. Hydrodynamic effects were especially pronounced during irradiation with TEA CO2 laser.",
journal = "Materials Science Forum",
title = "Nano-second surface modification of titanium nitride thin film by Nd : YAG and TEA CO2 lasers",
volume = "518",
pages = "161-166",
doi = "10.4028/www.scientific.net/MSF.518.161"
}
Gaković, B. M., Pongrac, I., Petrović, S., Minic, D.,& Trtica, M.. (2006). Nano-second surface modification of titanium nitride thin film by Nd : YAG and TEA CO2 lasers. in Materials Science Forum, 518, 161-166.
https://doi.org/10.4028/www.scientific.net/MSF.518.161
Gaković BM, Pongrac I, Petrović S, Minic D, Trtica M. Nano-second surface modification of titanium nitride thin film by Nd : YAG and TEA CO2 lasers. in Materials Science Forum. 2006;518:161-166.
doi:10.4028/www.scientific.net/MSF.518.161 .
Gaković, Biljana M., Pongrac, I., Petrović, Suzana, Minic, D., Trtica, Milan, "Nano-second surface modification of titanium nitride thin film by Nd : YAG and TEA CO2 lasers" in Materials Science Forum, 518 (2006):161-166,
https://doi.org/10.4028/www.scientific.net/MSF.518.161 . .
