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Particle-in-cell modelling of a neutral beam source for material processing in nanoscale structures fabrication

dc.creatorRadmilović-Rađenović, Marija
dc.creatorPetrovic, Z. Lj.
dc.creatorNikitovic, Z.
dc.creatorStrinic, A.
dc.creatorStojanovic, V.
dc.creatorNina, A.
dc.creatorRađenović, Branislav M.
dc.date.accessioned2018-03-03T14:16:44Z
dc.date.available2018-03-03T14:16:44Z
dc.date.issued2007
dc.identifier.issn0255-5476
dc.identifier.urihttps://vinar.vin.bg.ac.rs/handle/123456789/6583
dc.description.abstractNeutral beam processing has evolved into one of the most promising methods for overcoming plasma process induced damage. Surface treatment by neutrals avoids problems with surface charging effects, frequently encountered when using common ion treatment, especially for low k-materials. In this paper, the influence of various parameters on the neutralization of ion beams in Ar-CF4 mixture based on a Particle in Cell with Monte Carlo collisions (PIC/MCC) simulation is studied. The efficiency of neutralization has been treated by considering both surface neutralization of ions and collisions of ions in the gas.en
dc.relationMinistry of Science and Environmental Protection of the Republic of Serbia [OI 141013], International Atomic Energy Agency, Vienna, MNZZS [141031]
dc.rightsrestrictedAccessen
dc.sourceMaterials Science Forumen
dc.subjectcharging damageen
dc.subjectetchingen
dc.subjectmaterial processingen
dc.subjectnanoscale structuresen
dc.subjectneutralization efficiencyen
dc.titleParticle-in-cell modelling of a neutral beam source for material processing in nanoscale structures fabricationen
dc.typeconferenceObjecten
dcterms.abstractРадмиловиц-Радјеновиц, М.; Петровиц, З. Љ.; Стриниц, A.; Стојановиц, В.; Нина, A.; Радјеновиц, Б.; Никитовиц, З.;
dc.citation.volume555
dc.citation.spage47
dc.citation.epage+
dc.identifier.wos000249653700007
dc.identifier.doi10.4028/www.scientific.net/MSF.555.47
dc.description.otherResearch Trends in Contemporary Materials Science, 8th Conference of the Yugoslav-Materials-Research-Society (Yu-MRS), Sep 04-08, 2006, Herceg Novi, Montenegroen


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