Structure, hardness and adhesion of thin coatings deposited by PVD, TBAD on nitrided steels
Апстракт
The paper discusses microstructure, mechanical and physical testing with several examples of advanced coating systems. Another development for use with the plasma nitriding system is surface deposition after the nitriding treatment. This allows nitriding to be carried out in the plasma nitriding chamber followed by a surface deposition treatment, such as depositing titanium nitride. Samples were plasma nitrided at different thickness of plasma surface layers. TiN was deposited with classics BALZER PVD equipment. The other samples were produced with MAD technology in DANFYSIK chamber. The properties and quality of ion beam-assisted deposition (IBAD) coatings depend on many process parameters, such as the ion energy, ion to atom arrival ratio, angle of ion incidence, pressure, temperature, etc. This is the reason why MAD coatings must be planned very accurately. X-ray diffraction studies were undertaken in an attempt to determine the phases present, and perhaps an estimate of grain size ...from line broadening. The surface roughness was measured using stylus type (Talysurf Taylor Hobson) instruments. The coating morphology was evaluated (with SEM), using the well-known structure zone model of Thornton. The present coating method can produce dance structures, high hardness and the high-critical load values can be achieved. (C) 2004 Elsevier Ltd. All rights reserved.
Кључне речи:
plasma nitriding / PVD / IBADИзвор:
Vacuum, 2004, 76, 2-3, 169-172Напомена:
- 13th International Summer School on Vacuum, Electron and Ion Technologies, Sep 15-19, 2003, Varna, Bulgaria
DOI: 10.1016/j.vacuum.2004.07.005
ISSN: 0042-207X
WoS: 000224890100013
Scopus: 2-s2.0-7044222050
Колекције
Институција/група
VinčaTY - JOUR AU - Skoric, B AU - Kakas, D AU - Rakita, M AU - Bibić, Nataša M. AU - Peruskob, D PY - 2004 UR - https://vinar.vin.bg.ac.rs/handle/123456789/6481 AB - The paper discusses microstructure, mechanical and physical testing with several examples of advanced coating systems. Another development for use with the plasma nitriding system is surface deposition after the nitriding treatment. This allows nitriding to be carried out in the plasma nitriding chamber followed by a surface deposition treatment, such as depositing titanium nitride. Samples were plasma nitrided at different thickness of plasma surface layers. TiN was deposited with classics BALZER PVD equipment. The other samples were produced with MAD technology in DANFYSIK chamber. The properties and quality of ion beam-assisted deposition (IBAD) coatings depend on many process parameters, such as the ion energy, ion to atom arrival ratio, angle of ion incidence, pressure, temperature, etc. This is the reason why MAD coatings must be planned very accurately. X-ray diffraction studies were undertaken in an attempt to determine the phases present, and perhaps an estimate of grain size from line broadening. The surface roughness was measured using stylus type (Talysurf Taylor Hobson) instruments. The coating morphology was evaluated (with SEM), using the well-known structure zone model of Thornton. The present coating method can produce dance structures, high hardness and the high-critical load values can be achieved. (C) 2004 Elsevier Ltd. All rights reserved. T2 - Vacuum T1 - Structure, hardness and adhesion of thin coatings deposited by PVD, TBAD on nitrided steels VL - 76 IS - 2-3 SP - 169 EP - 172 DO - 10.1016/j.vacuum.2004.07.005 ER -
@article{ author = "Skoric, B and Kakas, D and Rakita, M and Bibić, Nataša M. and Peruskob, D", year = "2004", abstract = "The paper discusses microstructure, mechanical and physical testing with several examples of advanced coating systems. Another development for use with the plasma nitriding system is surface deposition after the nitriding treatment. This allows nitriding to be carried out in the plasma nitriding chamber followed by a surface deposition treatment, such as depositing titanium nitride. Samples were plasma nitrided at different thickness of plasma surface layers. TiN was deposited with classics BALZER PVD equipment. The other samples were produced with MAD technology in DANFYSIK chamber. The properties and quality of ion beam-assisted deposition (IBAD) coatings depend on many process parameters, such as the ion energy, ion to atom arrival ratio, angle of ion incidence, pressure, temperature, etc. This is the reason why MAD coatings must be planned very accurately. X-ray diffraction studies were undertaken in an attempt to determine the phases present, and perhaps an estimate of grain size from line broadening. The surface roughness was measured using stylus type (Talysurf Taylor Hobson) instruments. The coating morphology was evaluated (with SEM), using the well-known structure zone model of Thornton. The present coating method can produce dance structures, high hardness and the high-critical load values can be achieved. (C) 2004 Elsevier Ltd. All rights reserved.", journal = "Vacuum", title = "Structure, hardness and adhesion of thin coatings deposited by PVD, TBAD on nitrided steels", volume = "76", number = "2-3", pages = "169-172", doi = "10.1016/j.vacuum.2004.07.005" }
Skoric, B., Kakas, D., Rakita, M., Bibić, N. M.,& Peruskob, D.. (2004). Structure, hardness and adhesion of thin coatings deposited by PVD, TBAD on nitrided steels. in Vacuum, 76(2-3), 169-172. https://doi.org/10.1016/j.vacuum.2004.07.005
Skoric B, Kakas D, Rakita M, Bibić NM, Peruskob D. Structure, hardness and adhesion of thin coatings deposited by PVD, TBAD on nitrided steels. in Vacuum. 2004;76(2-3):169-172. doi:10.1016/j.vacuum.2004.07.005 .
Skoric, B, Kakas, D, Rakita, M, Bibić, Nataša M., Peruskob, D, "Structure, hardness and adhesion of thin coatings deposited by PVD, TBAD on nitrided steels" in Vacuum, 76, no. 2-3 (2004):169-172, https://doi.org/10.1016/j.vacuum.2004.07.005 . .