Formation of iron-nitrides by irradiation of Fe-57/Si bilayers with N2+ ions
AuthorsBibić, Nataša M.
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This article reports on the formation of iron nitrides during nitrogen ion irradiation of Fe/Si bilayers at room temperature. The 30 nm Fe-57/Si bilayers were prepared by pulsed laser ablation and irradiated with 22 keV N2+ ions at fluences of (0.6-2)x 10(17) ions/cm(2). The structural changes and phases formed by irradiation were analyzed by Rutherford backscattering spectroscopy (RBS), X-ray diffraction analysis (XRD) and conversion electron Mossbauer spectroscopy (CEMS). The results clearly show the formation of several iron nitrides. At the lower fluences, the samples contain a mixture of epsilon-Fe2+x N and alpha-Fe with nitrogen interstitials. For the highest fluence, the paramagnetic epsilon-Fe-2 N (61%) phase predominated. It can be concluded that the elemental iron almost fully transforms to an iron-nitride layer, but that no iron silicides are formed. (C) 2003 Elsevier B.V. All rights reserved.
Keywords:ion irradiation / thin film / nitride / RBS / XRD / CEMS
Source:Thin Solid Films, 2004, 459, 1-2, 23-27
- 8th European Vacuum Congress (EVC-8)/2nd Annual Conference of the German-Vacuum-Society (DVG), Jun 23-26, 2003, Berlin, Germany