Cylindrical hollow anode ion source
The hollow anode ion-electron source is based on the hollow anode discharge, a kind of plasma utilizing a cold cathode and a tiny bore or slot in the anode that simultaneously serves as exit aperture of the ion (or electron) source. These sources are particularly suitable, for example, for deposition of films on large flat surfaces. The length of the slot-shaped hollow anode aperture can be sufficient so that, together with sweeping of either source or substrate, large area substrates can be processed, thereby simulating the function of large area plasma sources. (C) 2002 American Institute of Physics.
Source:Review of Scientific Instruments, 2002, 73, 2, 751-753
- 9th International Conference on Ion Sources (ICIS), Sep 03-07, 2001, Oakland, California