Investigations of TiN films optical and mechanical characteristics

dc.creator	Zlatanovic, M
dc.creator	Sesum, D
dc.creator	Đukić, D
dc.creator	Popovic, N
dc.date.accessioned	2018-03-03T13:46:58Z
dc.date.available	2018-03-03T13:46:58Z
dc.date.issued	1998
dc.identifier.issn	0255-5476
dc.identifier.uri	https://vinar.vin.bg.ac.rs/handle/123456789/6245
dc.description.abstract	The TiN films produced in different magnetron deposition systems (double magnetron and magnetron only) have shown variations in color, reflectivity and some mechanical characteristics as well as some changes induced by aging. STM, SEM, XRD analyses and reflectivity and ellipsometry measurements were performed in order to examine the correlation between the structural and optical coating properties.	en
dc.rights	restrictedAccess	en
dc.source	Materials Science Forum	en
dc.subject	TiN	en
dc.subject	magnetron sputtering	en
dc.subject	optical characteristics	en
dc.subject	mechanical characteristics	en
dc.title	Investigations of TiN films optical and mechanical characteristics	en
dc.type	article	en
dcterms.abstract	Поповиц, Н; Златановиц, М; Сесум, Д; Дјукиц, Д;
dc.citation.volume	282-2
dc.citation.spage	139
dc.citation.epage	146
dc.identifier.wos	000075079900019
dc.identifier.doi	10.4028/www.scientific.net/MSF.282-283.139
dc.description.other	Advanced Materials and Processes, 2nd Yugoslav Conference on Advanced Materials (YUGOMAT II), Sep 15-19, 1997, Herceg Novi, Yugoslavia	en
dc.identifier.scopus	2-s2.0-0031638828

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