Investigations of TiN films optical and mechanical characteristics
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The TiN films produced in different magnetron deposition systems (double magnetron and magnetron only) have shown variations in color, reflectivity and some mechanical characteristics as well as some changes induced by aging. STM, SEM, XRD analyses and reflectivity and ellipsometry measurements were performed in order to examine the correlation between the structural and optical coating properties.
Keywords:TiN / magnetron sputtering / optical characteristics / mechanical characteristics
Source:Materials Science Forum, 1998, 282-2, 139-146
- Advanced Materials and Processes, 2nd Yugoslav Conference on Advanced Materials (YUGOMAT II), Sep 15-19, 1997, Herceg Novi, Yugoslavia