Hollow cathode magnetron ion source with axial extraction. II
Characteristics of plasmas in a magnetron ion source with a hollow mesh cathode have been studied. It was found that depending on conditions of discharge and ion current in the cylindrical mesh cathode, the plasma column is always formed in such a way as to ensure necessary ion concentration for extracted ion current. (C) 1998 American Institute of Physics.
Source:Review of Scientific Instruments, 1998, 69, 2, 1054-1055
- 7th International Conference on Ion Sources (ICIS 97), Sep 07-13, 1997, Taormina, Italy