Laser-induced formation of intermetallics in multilayered Al/Ti nano-structures
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Аутори
Peruško, DavorPetrović, Suzana
Kovač, Janez
Stojanović, Zoran A.
Panjan, Matjaž
Obradović, Marko O.
Milosavljević, Momir
Чланак у часопису
Метаподаци
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In this study, multilayered structures consisting of eight (Al/Ti) bilayers deposited by d.c. ion sputtering onto Si (100) wafers, to a total thickness of similar to 300 nm were treated in air with a picosecond-pulsed Nd:YAG laser in a defocused regime. Irradiation was done with 200 successive pulses, at 1,064-nm wavelength, energy per pulse 15 mJ, the incidence angle of similar to 45 degrees, covering an area of 2-mm in diameter. The samples were analyzed by scanning electron microscopy, atomic force microscopy, X-ray photoelectron spectroscopy, and transmission electron microscopy. It was found that laser irradiation-induced melting and a progressed Al-Ti nanoalloying within the top four bilayers (up to a depth of similar to 150 nm), while the underlying part of the multilayered structure remained intact. Another interesting result is that of a regularly rippled surface topography (similar to 1.4-mu m period and 100-nm amplitude) developed throughout the zone of the melted and reacte...d material.
Извор:
Journal of Materials Science, 2012, 47, 10, 4488-4495Финансирање / пројекти:
- SILAMPS - Silicon integrated lasers and optical amplifiers (EU-FP7-226470)
- Физички процеси у синтези нових наноструктурних материјала (RS-MESTD-Basic Research (BR or ON)-171023)
DOI: 10.1007/s10853-012-6311-8
ISSN: 0022-2461
WoS: 000302242700031
Scopus: 2-s2.0-84859106554
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Институција/група
VinčaTY - JOUR AU - Peruško, Davor AU - Petrović, Suzana AU - Kovač, Janez AU - Stojanović, Zoran A. AU - Panjan, Matjaž AU - Obradović, Marko O. AU - Milosavljević, Momir PY - 2012 UR - https://vinar.vin.bg.ac.rs/handle/123456789/4769 AB - In this study, multilayered structures consisting of eight (Al/Ti) bilayers deposited by d.c. ion sputtering onto Si (100) wafers, to a total thickness of similar to 300 nm were treated in air with a picosecond-pulsed Nd:YAG laser in a defocused regime. Irradiation was done with 200 successive pulses, at 1,064-nm wavelength, energy per pulse 15 mJ, the incidence angle of similar to 45 degrees, covering an area of 2-mm in diameter. The samples were analyzed by scanning electron microscopy, atomic force microscopy, X-ray photoelectron spectroscopy, and transmission electron microscopy. It was found that laser irradiation-induced melting and a progressed Al-Ti nanoalloying within the top four bilayers (up to a depth of similar to 150 nm), while the underlying part of the multilayered structure remained intact. Another interesting result is that of a regularly rippled surface topography (similar to 1.4-mu m period and 100-nm amplitude) developed throughout the zone of the melted and reacted material. T2 - Journal of Materials Science T1 - Laser-induced formation of intermetallics in multilayered Al/Ti nano-structures VL - 47 IS - 10 SP - 4488 EP - 4495 DO - 10.1007/s10853-012-6311-8 ER -
@article{ author = "Peruško, Davor and Petrović, Suzana and Kovač, Janez and Stojanović, Zoran A. and Panjan, Matjaž and Obradović, Marko O. and Milosavljević, Momir", year = "2012", abstract = "In this study, multilayered structures consisting of eight (Al/Ti) bilayers deposited by d.c. ion sputtering onto Si (100) wafers, to a total thickness of similar to 300 nm were treated in air with a picosecond-pulsed Nd:YAG laser in a defocused regime. Irradiation was done with 200 successive pulses, at 1,064-nm wavelength, energy per pulse 15 mJ, the incidence angle of similar to 45 degrees, covering an area of 2-mm in diameter. The samples were analyzed by scanning electron microscopy, atomic force microscopy, X-ray photoelectron spectroscopy, and transmission electron microscopy. It was found that laser irradiation-induced melting and a progressed Al-Ti nanoalloying within the top four bilayers (up to a depth of similar to 150 nm), while the underlying part of the multilayered structure remained intact. Another interesting result is that of a regularly rippled surface topography (similar to 1.4-mu m period and 100-nm amplitude) developed throughout the zone of the melted and reacted material.", journal = "Journal of Materials Science", title = "Laser-induced formation of intermetallics in multilayered Al/Ti nano-structures", volume = "47", number = "10", pages = "4488-4495", doi = "10.1007/s10853-012-6311-8" }
Peruško, D., Petrović, S., Kovač, J., Stojanović, Z. A., Panjan, M., Obradović, M. O.,& Milosavljević, M.. (2012). Laser-induced formation of intermetallics in multilayered Al/Ti nano-structures. in Journal of Materials Science, 47(10), 4488-4495. https://doi.org/10.1007/s10853-012-6311-8
Peruško D, Petrović S, Kovač J, Stojanović ZA, Panjan M, Obradović MO, Milosavljević M. Laser-induced formation of intermetallics in multilayered Al/Ti nano-structures. in Journal of Materials Science. 2012;47(10):4488-4495. doi:10.1007/s10853-012-6311-8 .
Peruško, Davor, Petrović, Suzana, Kovač, Janez, Stojanović, Zoran A., Panjan, Matjaž, Obradović, Marko O., Milosavljević, Momir, "Laser-induced formation of intermetallics in multilayered Al/Ti nano-structures" in Journal of Materials Science, 47, no. 10 (2012):4488-4495, https://doi.org/10.1007/s10853-012-6311-8 . .