Surface modification of a WTi thin film on Si substrate by nanosecond laser pulses
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Petrović, SuzanaGaković, Biljana M.
Peruško, Davor
Trtica, Milan
Radak, Bojan
Panjan, Peter
Miljanić, Šćepan S.
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Interaction of a nanosecond transversely excited atmospheric (TEA) CO2 laser, operating at 10.6 mm, with tungsten-titanium thin film (190 nm) deposited on silicon of n-type (1 0 0) orientation, was studied. Multi-pulse irradiation was performed in air atmosphere with laser energy densities in the range 24-49 J/cm(2). The energy absorbed from the laser beam was mainly converted to thermal energy, which generated a series of effects. The following morphological changes were observed: (i) partial ablation/exfoliation of the WTi thin film, (ii) partial modification of the silicon substrate with formation of polygonal grains, (iii) appearance of hydrodynamic features including nano-globules. Torch-like plumes started appearing in front of the target after several laser pulses. (C) 2007 Elsevier B.V. All rights reserved.
Keywords:
WTi thin films / laser ablation / nanosecond laser pulseSource:
Applied Surface Science, 2008, 254, 13, 4013-4017
DOI: 10.1016/j.apsusc.2007.12.041
ISSN: 0169-4332
WoS: 000255344500044
Scopus: 2-s2.0-41949126130
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VinčaTY - JOUR AU - Petrović, Suzana AU - Gaković, Biljana M. AU - Peruško, Davor AU - Trtica, Milan AU - Radak, Bojan AU - Panjan, Peter AU - Miljanić, Šćepan S. PY - 2008 UR - https://vinar.vin.bg.ac.rs/handle/123456789/3431 AB - Interaction of a nanosecond transversely excited atmospheric (TEA) CO2 laser, operating at 10.6 mm, with tungsten-titanium thin film (190 nm) deposited on silicon of n-type (1 0 0) orientation, was studied. Multi-pulse irradiation was performed in air atmosphere with laser energy densities in the range 24-49 J/cm(2). The energy absorbed from the laser beam was mainly converted to thermal energy, which generated a series of effects. The following morphological changes were observed: (i) partial ablation/exfoliation of the WTi thin film, (ii) partial modification of the silicon substrate with formation of polygonal grains, (iii) appearance of hydrodynamic features including nano-globules. Torch-like plumes started appearing in front of the target after several laser pulses. (C) 2007 Elsevier B.V. All rights reserved. T2 - Applied Surface Science T1 - Surface modification of a WTi thin film on Si substrate by nanosecond laser pulses VL - 254 IS - 13 SP - 4013 EP - 4017 DO - 10.1016/j.apsusc.2007.12.041 ER -
@article{ author = "Petrović, Suzana and Gaković, Biljana M. and Peruško, Davor and Trtica, Milan and Radak, Bojan and Panjan, Peter and Miljanić, Šćepan S.", year = "2008", abstract = "Interaction of a nanosecond transversely excited atmospheric (TEA) CO2 laser, operating at 10.6 mm, with tungsten-titanium thin film (190 nm) deposited on silicon of n-type (1 0 0) orientation, was studied. Multi-pulse irradiation was performed in air atmosphere with laser energy densities in the range 24-49 J/cm(2). The energy absorbed from the laser beam was mainly converted to thermal energy, which generated a series of effects. The following morphological changes were observed: (i) partial ablation/exfoliation of the WTi thin film, (ii) partial modification of the silicon substrate with formation of polygonal grains, (iii) appearance of hydrodynamic features including nano-globules. Torch-like plumes started appearing in front of the target after several laser pulses. (C) 2007 Elsevier B.V. All rights reserved.", journal = "Applied Surface Science", title = "Surface modification of a WTi thin film on Si substrate by nanosecond laser pulses", volume = "254", number = "13", pages = "4013-4017", doi = "10.1016/j.apsusc.2007.12.041" }
Petrović, S., Gaković, B. M., Peruško, D., Trtica, M., Radak, B., Panjan, P.,& Miljanić, Š. S.. (2008). Surface modification of a WTi thin film on Si substrate by nanosecond laser pulses. in Applied Surface Science, 254(13), 4013-4017. https://doi.org/10.1016/j.apsusc.2007.12.041
Petrović S, Gaković BM, Peruško D, Trtica M, Radak B, Panjan P, Miljanić ŠS. Surface modification of a WTi thin film on Si substrate by nanosecond laser pulses. in Applied Surface Science. 2008;254(13):4013-4017. doi:10.1016/j.apsusc.2007.12.041 .
Petrović, Suzana, Gaković, Biljana M., Peruško, Davor, Trtica, Milan, Radak, Bojan, Panjan, Peter, Miljanić, Šćepan S., "Surface modification of a WTi thin film on Si substrate by nanosecond laser pulses" in Applied Surface Science, 254, no. 13 (2008):4013-4017, https://doi.org/10.1016/j.apsusc.2007.12.041 . .