The non-monotonous dependence of the total sputtering yield on the projectile atomic number, which is unexpected in the frame of the Sigmund linear cascade theory, is investigated using Monte Carlo simulations (program SRIM 2003). This effect is studied on the example of aluminum sputtering by six different projectiles (N, Ne, Al, Ar, Kr and Xe) at normal incidence. The incident projectile energy is 2 keV. Investigation consists of the analyses of ASI distributions of sputtered atoms as well as of nuclear energy loss depth distributions of projectiles with fixed number of ejected atoms. The results show that the non-monotonous behavior of Y(Z) is due to the ability of projectiles somewhat lighter than aluminum to efficiently eject large number of atoms by formation of collision cascades in the subsurface region which are directed towards the surface. On the other hand, ions that are heavier or significantly lighter than aluminum cannot form this type of cascades - the heavier ions cann...ot transfer a lot of energy to recoils in a primary knock-on collision that will move towards the surface, while significantly lighter ions transfer the energy too deep into the target. (C) 2007 Elsevier B.V. All rights reserved.
Кључне речи:
ion sputtering / Monte Carlo simulations
Извор:
Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 2008, 266, 1, 49-53
TY - JOUR
AU - Bundaleski, Nenad
PY - 2008
UR - https://vinar.vin.bg.ac.rs/handle/123456789/3360
AB - The non-monotonous dependence of the total sputtering yield on the projectile atomic number, which is unexpected in the frame of the Sigmund linear cascade theory, is investigated using Monte Carlo simulations (program SRIM 2003). This effect is studied on the example of aluminum sputtering by six different projectiles (N, Ne, Al, Ar, Kr and Xe) at normal incidence. The incident projectile energy is 2 keV. Investigation consists of the analyses of ASI distributions of sputtered atoms as well as of nuclear energy loss depth distributions of projectiles with fixed number of ejected atoms. The results show that the non-monotonous behavior of Y(Z) is due to the ability of projectiles somewhat lighter than aluminum to efficiently eject large number of atoms by formation of collision cascades in the subsurface region which are directed towards the surface. On the other hand, ions that are heavier or significantly lighter than aluminum cannot form this type of cascades - the heavier ions cannot transfer a lot of energy to recoils in a primary knock-on collision that will move towards the surface, while significantly lighter ions transfer the energy too deep into the target. (C) 2007 Elsevier B.V. All rights reserved.
T2 - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
T1 - Investigation of the projectile atomic number influence to the total sputtering yield in the keV energy region
VL - 266
IS - 1
SP - 49
EP - 53
DO - 10.1016/j.nimb.2007.10.021
ER -
@article{
author = "Bundaleski, Nenad",
year = "2008",
abstract = "The non-monotonous dependence of the total sputtering yield on the projectile atomic number, which is unexpected in the frame of the Sigmund linear cascade theory, is investigated using Monte Carlo simulations (program SRIM 2003). This effect is studied on the example of aluminum sputtering by six different projectiles (N, Ne, Al, Ar, Kr and Xe) at normal incidence. The incident projectile energy is 2 keV. Investigation consists of the analyses of ASI distributions of sputtered atoms as well as of nuclear energy loss depth distributions of projectiles with fixed number of ejected atoms. The results show that the non-monotonous behavior of Y(Z) is due to the ability of projectiles somewhat lighter than aluminum to efficiently eject large number of atoms by formation of collision cascades in the subsurface region which are directed towards the surface. On the other hand, ions that are heavier or significantly lighter than aluminum cannot form this type of cascades - the heavier ions cannot transfer a lot of energy to recoils in a primary knock-on collision that will move towards the surface, while significantly lighter ions transfer the energy too deep into the target. (C) 2007 Elsevier B.V. All rights reserved.",
journal = "Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms",
title = "Investigation of the projectile atomic number influence to the total sputtering yield in the keV energy region",
volume = "266",
number = "1",
pages = "49-53",
doi = "10.1016/j.nimb.2007.10.021"
}
Bundaleski, N.. (2008). Investigation of the projectile atomic number influence to the total sputtering yield in the keV energy region. in Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 266(1), 49-53.
https://doi.org/10.1016/j.nimb.2007.10.021
Bundaleski N. Investigation of the projectile atomic number influence to the total sputtering yield in the keV energy region. in Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms. 2008;266(1):49-53.
doi:10.1016/j.nimb.2007.10.021 .
Bundaleski, Nenad, "Investigation of the projectile atomic number influence to the total sputtering yield in the keV energy region" in Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 266, no. 1 (2008):49-53,
https://doi.org/10.1016/j.nimb.2007.10.021 . .
