Low and high repetition frequency femtosecond lasers processing of tungsten-based thin film
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Gaković, Biljana M.Petrović, Suzana
Krmpot, Aleksandar J.
Pantelić, Dejan
Jelenković, Branislav
Stratakis, Emmanuel
Fotakis, C.
Article (Published version)
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In this work we reported low and high repetition frequency femtosecond laser- induced modifications of tungsten-based thin film. The tungsten-titanium (WTi) thin film, thickness of 190 nm, was deposited by sputtering on single crystal Si (100) wafer. Irradiations were performed in air by linearly polarized and focused femtosecond laser beams with following parameters: (1) pulse duration 160 fs, wavelength 800 nm, laser repetition frequency (LRF) 75 MHz - high LRF, and (2) duration 40 fs, wavelength 800 nm, LRF of 1 kHz - low LRF. The results of femtosecond lasers processing of the WTi thin film revealed laser induced periodical surface structures (LIPSS) in the case of low LRF regime. LIPSSs were formed with different periodicity and different orientation to the laser polarization at the surface: micro-scale LIPSSs with orientation perpendicular to the laser polarization and nano-scale LIPSSs parallel and perpendicular to the laser polarization. After processing of the WTi/Si system in... high LRF regime ablation and nanoparticles formation were registered.
Keywords:
EDX / Femtosecond laser / laser ablation / laser repetition frequency / LIPSS / SEM / Surface modification / Thin filmsSource:
Laser and Particle Beams, 2014, 32, 4, 613-619Funding / projects:
- Fabrication and characterization of nano-photonic functional structrues in biomedicine and informatics (RS-MESTD-Integrated and Interdisciplinary Research (IIR or III)-45016)
- Effects of laser radiation and plasma on novel materials in their synthesis, modification, and analysis (RS-MESTD-Basic Research (BR or ON)-172019)
- COST ActionMP1208
DOI: 10.1017/S0263034614000627
ISSN: 0263-0346; 1469-803X
WoS: 000345447500015
Scopus: 2-s2.0-84911462068
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VinčaTY - JOUR AU - Gaković, Biljana M. AU - Petrović, Suzana AU - Krmpot, Aleksandar J. AU - Pantelić, Dejan AU - Jelenković, Branislav AU - Stratakis, Emmanuel AU - Fotakis, C. PY - 2014 UR - https://vinar.vin.bg.ac.rs/handle/123456789/228 AB - In this work we reported low and high repetition frequency femtosecond laser- induced modifications of tungsten-based thin film. The tungsten-titanium (WTi) thin film, thickness of 190 nm, was deposited by sputtering on single crystal Si (100) wafer. Irradiations were performed in air by linearly polarized and focused femtosecond laser beams with following parameters: (1) pulse duration 160 fs, wavelength 800 nm, laser repetition frequency (LRF) 75 MHz - high LRF, and (2) duration 40 fs, wavelength 800 nm, LRF of 1 kHz - low LRF. The results of femtosecond lasers processing of the WTi thin film revealed laser induced periodical surface structures (LIPSS) in the case of low LRF regime. LIPSSs were formed with different periodicity and different orientation to the laser polarization at the surface: micro-scale LIPSSs with orientation perpendicular to the laser polarization and nano-scale LIPSSs parallel and perpendicular to the laser polarization. After processing of the WTi/Si system in high LRF regime ablation and nanoparticles formation were registered. T2 - Laser and Particle Beams T1 - Low and high repetition frequency femtosecond lasers processing of tungsten-based thin film VL - 32 IS - 4 SP - 613 EP - 619 DO - 10.1017/S0263034614000627 ER -
@article{ author = "Gaković, Biljana M. and Petrović, Suzana and Krmpot, Aleksandar J. and Pantelić, Dejan and Jelenković, Branislav and Stratakis, Emmanuel and Fotakis, C.", year = "2014", abstract = "In this work we reported low and high repetition frequency femtosecond laser- induced modifications of tungsten-based thin film. The tungsten-titanium (WTi) thin film, thickness of 190 nm, was deposited by sputtering on single crystal Si (100) wafer. Irradiations were performed in air by linearly polarized and focused femtosecond laser beams with following parameters: (1) pulse duration 160 fs, wavelength 800 nm, laser repetition frequency (LRF) 75 MHz - high LRF, and (2) duration 40 fs, wavelength 800 nm, LRF of 1 kHz - low LRF. The results of femtosecond lasers processing of the WTi thin film revealed laser induced periodical surface structures (LIPSS) in the case of low LRF regime. LIPSSs were formed with different periodicity and different orientation to the laser polarization at the surface: micro-scale LIPSSs with orientation perpendicular to the laser polarization and nano-scale LIPSSs parallel and perpendicular to the laser polarization. After processing of the WTi/Si system in high LRF regime ablation and nanoparticles formation were registered.", journal = "Laser and Particle Beams", title = "Low and high repetition frequency femtosecond lasers processing of tungsten-based thin film", volume = "32", number = "4", pages = "613-619", doi = "10.1017/S0263034614000627" }
Gaković, B. M., Petrović, S., Krmpot, A. J., Pantelić, D., Jelenković, B., Stratakis, E.,& Fotakis, C.. (2014). Low and high repetition frequency femtosecond lasers processing of tungsten-based thin film. in Laser and Particle Beams, 32(4), 613-619. https://doi.org/10.1017/S0263034614000627
Gaković BM, Petrović S, Krmpot AJ, Pantelić D, Jelenković B, Stratakis E, Fotakis C. Low and high repetition frequency femtosecond lasers processing of tungsten-based thin film. in Laser and Particle Beams. 2014;32(4):613-619. doi:10.1017/S0263034614000627 .
Gaković, Biljana M., Petrović, Suzana, Krmpot, Aleksandar J., Pantelić, Dejan, Jelenković, Branislav, Stratakis, Emmanuel, Fotakis, C., "Low and high repetition frequency femtosecond lasers processing of tungsten-based thin film" in Laser and Particle Beams, 32, no. 4 (2014):613-619, https://doi.org/10.1017/S0263034614000627 . .