Characterization of TiN protective coatings
Нема приказа
Аутори
Gaković, Biljana M.Rakočević, Zlatko Lj.
Nenadović, T.
Peruško, Davor
Trtica, Milan
Zec, Slavica
Чланак у часопису (Објављена верзија)
Метаподаци
Приказ свих података о документуАпстракт
This work reports on an analysis of titanium nitride layers deposited by the PVD method and changes induced in the deposit during interaction with a laser beam. Layers up to 850 nm thick were deposited by Ti target sputtering into an atmosphere of reactive gas. Layer phase composition, lattice parameter, interplanar spacing and preferential orientation of crystallites in the layer were investigated by X-ray diffraction analysis. The mean grain size and micro strain in the deposit were defined from peak line broadening in the CuK alpha spectrum. Crystallite size was defined additionally by scanning tunnelling microscopy (STM), before and after laser beam treatment.
Кључне речи:
titanium nitride protective coatings / characterization / STM / X-ray / laser interactionИзвор:
Solid State Phenomena, 1998, 61-2, 357-361
DOI: 10.4028/www.scientific.net/SSP.61-62.357
ISSN: 1012-0394
WoS: 000075589100071
Scopus: 2-s2.0-17344371742
Колекције
Институција/група
VinčaTY - JOUR AU - Gaković, Biljana M. AU - Rakočević, Zlatko Lj. AU - Nenadović, T. AU - Peruško, Davor AU - Trtica, Milan AU - Zec, Slavica PY - 1998 UR - https://vinar.vin.bg.ac.rs/handle/123456789/2183 AB - This work reports on an analysis of titanium nitride layers deposited by the PVD method and changes induced in the deposit during interaction with a laser beam. Layers up to 850 nm thick were deposited by Ti target sputtering into an atmosphere of reactive gas. Layer phase composition, lattice parameter, interplanar spacing and preferential orientation of crystallites in the layer were investigated by X-ray diffraction analysis. The mean grain size and micro strain in the deposit were defined from peak line broadening in the CuK alpha spectrum. Crystallite size was defined additionally by scanning tunnelling microscopy (STM), before and after laser beam treatment. T2 - Solid State Phenomena T1 - Characterization of TiN protective coatings VL - 61-2 SP - 357 EP - 361 DO - 10.4028/www.scientific.net/SSP.61-62.357 ER -
@article{ author = "Gaković, Biljana M. and Rakočević, Zlatko Lj. and Nenadović, T. and Peruško, Davor and Trtica, Milan and Zec, Slavica", year = "1998", abstract = "This work reports on an analysis of titanium nitride layers deposited by the PVD method and changes induced in the deposit during interaction with a laser beam. Layers up to 850 nm thick were deposited by Ti target sputtering into an atmosphere of reactive gas. Layer phase composition, lattice parameter, interplanar spacing and preferential orientation of crystallites in the layer were investigated by X-ray diffraction analysis. The mean grain size and micro strain in the deposit were defined from peak line broadening in the CuK alpha spectrum. Crystallite size was defined additionally by scanning tunnelling microscopy (STM), before and after laser beam treatment.", journal = "Solid State Phenomena", title = "Characterization of TiN protective coatings", volume = "61-2", pages = "357-361", doi = "10.4028/www.scientific.net/SSP.61-62.357" }
Gaković, B. M., Rakočević, Z. Lj., Nenadović, T., Peruško, D., Trtica, M.,& Zec, S.. (1998). Characterization of TiN protective coatings. in Solid State Phenomena, 61-2, 357-361. https://doi.org/10.4028/www.scientific.net/SSP.61-62.357
Gaković BM, Rakočević ZL, Nenadović T, Peruško D, Trtica M, Zec S. Characterization of TiN protective coatings. in Solid State Phenomena. 1998;61-2:357-361. doi:10.4028/www.scientific.net/SSP.61-62.357 .
Gaković, Biljana M., Rakočević, Zlatko Lj., Nenadović, T., Peruško, Davor, Trtica, Milan, Zec, Slavica, "Characterization of TiN protective coatings" in Solid State Phenomena, 61-2 (1998):357-361, https://doi.org/10.4028/www.scientific.net/SSP.61-62.357 . .