Single-shot selective femtosecond laser ablation of multi-layered Ti/Al and Ni/Ti films: Cascaded heat conduction and interfacial thermal effects
Samo za registrovane korisnike
2018
Autori
Kudryashov, Sergey I.Gaković, Biljana M.
Danilov, Pavel A.
Petrović, Suzana
Milovanović, Dubravka S.
Rudenko, Andrey A.
Ionin, Andrey A.
Članak u časopisu (Objavljena verzija)
Metapodaci
Prikaz svih podataka o dokumentuApstrakt
Single-shot femtosecond laser ablation of Ti(Al/Ti)(5) and (Ni/Ti)(5) films on silicon substrates was studied as a function of laser fluence by means of scanning electron microscopy, energy-dispersive x-ray spectroscopy, and optical profilometry. Ablation occurs as gradual threshold-like selective removal of a few top layers at lower fluences and rather continuous removal at higher fluences, exponentially increasing versus ablated depth, with the final complete (through) ablation of the entire films. The observed selective rupture at the different internal interfaces was related to thermomechanically and chemically enhanced (interface-facilitated) explosive boiling, with the corresponding energy deposition provided by cascaded heat transfer in the poorly conducting Ti and Ni, and highly conducting Al layers and the interfacial thermal (Kapitza) resistance effect. Published by AIP Publishing.
Izvor:
Applied Physics Letters, 2018, 112, 2Finansiranje / projekti:
- Generisanje i karakterizacija nanofotonskih funkcionalnih struktura u biomedicini i informatici (RS-MESTD-Integrated and Interdisciplinary Research (IIR or III)-45016)
- STSM, EU COST Action [MP 1208], Government of the Russian Federation through ITMO Visiting Professorship Program [074-U01], Presidium of Russian Academy of sciences, Russian Foundation for Basic research [16-32-00880]
DOI: 10.1063/1.5010793
ISSN: 0003-6951; 1077-3118
WoS: 000422965000040
Scopus: 2-s2.0-85040535258
Kolekcije
Institucija/grupa
VinčaTY - JOUR AU - Kudryashov, Sergey I. AU - Gaković, Biljana M. AU - Danilov, Pavel A. AU - Petrović, Suzana AU - Milovanović, Dubravka S. AU - Rudenko, Andrey A. AU - Ionin, Andrey A. PY - 2018 UR - https://vinar.vin.bg.ac.rs/handle/123456789/1917 AB - Single-shot femtosecond laser ablation of Ti(Al/Ti)(5) and (Ni/Ti)(5) films on silicon substrates was studied as a function of laser fluence by means of scanning electron microscopy, energy-dispersive x-ray spectroscopy, and optical profilometry. Ablation occurs as gradual threshold-like selective removal of a few top layers at lower fluences and rather continuous removal at higher fluences, exponentially increasing versus ablated depth, with the final complete (through) ablation of the entire films. The observed selective rupture at the different internal interfaces was related to thermomechanically and chemically enhanced (interface-facilitated) explosive boiling, with the corresponding energy deposition provided by cascaded heat transfer in the poorly conducting Ti and Ni, and highly conducting Al layers and the interfacial thermal (Kapitza) resistance effect. Published by AIP Publishing. T2 - Applied Physics Letters T1 - Single-shot selective femtosecond laser ablation of multi-layered Ti/Al and Ni/Ti films: Cascaded heat conduction and interfacial thermal effects VL - 112 IS - 2 DO - 10.1063/1.5010793 ER -
@article{ author = "Kudryashov, Sergey I. and Gaković, Biljana M. and Danilov, Pavel A. and Petrović, Suzana and Milovanović, Dubravka S. and Rudenko, Andrey A. and Ionin, Andrey A.", year = "2018", abstract = "Single-shot femtosecond laser ablation of Ti(Al/Ti)(5) and (Ni/Ti)(5) films on silicon substrates was studied as a function of laser fluence by means of scanning electron microscopy, energy-dispersive x-ray spectroscopy, and optical profilometry. Ablation occurs as gradual threshold-like selective removal of a few top layers at lower fluences and rather continuous removal at higher fluences, exponentially increasing versus ablated depth, with the final complete (through) ablation of the entire films. The observed selective rupture at the different internal interfaces was related to thermomechanically and chemically enhanced (interface-facilitated) explosive boiling, with the corresponding energy deposition provided by cascaded heat transfer in the poorly conducting Ti and Ni, and highly conducting Al layers and the interfacial thermal (Kapitza) resistance effect. Published by AIP Publishing.", journal = "Applied Physics Letters", title = "Single-shot selective femtosecond laser ablation of multi-layered Ti/Al and Ni/Ti films: Cascaded heat conduction and interfacial thermal effects", volume = "112", number = "2", doi = "10.1063/1.5010793" }
Kudryashov, S. I., Gaković, B. M., Danilov, P. A., Petrović, S., Milovanović, D. S., Rudenko, A. A.,& Ionin, A. A.. (2018). Single-shot selective femtosecond laser ablation of multi-layered Ti/Al and Ni/Ti films: Cascaded heat conduction and interfacial thermal effects. in Applied Physics Letters, 112(2). https://doi.org/10.1063/1.5010793
Kudryashov SI, Gaković BM, Danilov PA, Petrović S, Milovanović DS, Rudenko AA, Ionin AA. Single-shot selective femtosecond laser ablation of multi-layered Ti/Al and Ni/Ti films: Cascaded heat conduction and interfacial thermal effects. in Applied Physics Letters. 2018;112(2). doi:10.1063/1.5010793 .
Kudryashov, Sergey I., Gaković, Biljana M., Danilov, Pavel A., Petrović, Suzana, Milovanović, Dubravka S., Rudenko, Andrey A., Ionin, Andrey A., "Single-shot selective femtosecond laser ablation of multi-layered Ti/Al and Ni/Ti films: Cascaded heat conduction and interfacial thermal effects" in Applied Physics Letters, 112, no. 2 (2018), https://doi.org/10.1063/1.5010793 . .