Structural and optical properties of nanometric titanium oxide (TixOy) films obtained by cathodic arc plasma deposition were investigated. Phase analysis by x-ray diffraction and Fourier-transform infrared spectroscopy showed the presence of anatase, rutile, Ti2O3, Ti4O7 and amorphous phases. Scanning electron microscopy images showed well-developed surface morphology with nano-patterns. Spectroscopic ellipsometry revealed film thicknesses of 53 and 50 nm, variable refractive indices dependent on the light wavelength and close to zero extinction coefficients for wavelengths higher than 500 nm. On the basis of ultraviolet-visible spectroscopy data and using the Tauc equation, band gap values for direct and indirect electron transitions were determined.
Keywords:
optical materials / plasma deposition / thin films / ellipsometry
TY - JOUR
AU - Jokanović, Vukoman R.
AU - Čolović, Božana M.
AU - Trajkovska Petkoska, Anka
AU - Mraković, Ana Đ.
AU - Jokanović, Bojan
AU - Nenadović, Miloš
AU - Ferrara, Manuela
AU - Nasov, Ilija
PY - 2017
UR - https://vinar.vin.bg.ac.rs/handle/123456789/1871
AB - Structural and optical properties of nanometric titanium oxide (TixOy) films obtained by cathodic arc plasma deposition were investigated. Phase analysis by x-ray diffraction and Fourier-transform infrared spectroscopy showed the presence of anatase, rutile, Ti2O3, Ti4O7 and amorphous phases. Scanning electron microscopy images showed well-developed surface morphology with nano-patterns. Spectroscopic ellipsometry revealed film thicknesses of 53 and 50 nm, variable refractive indices dependent on the light wavelength and close to zero extinction coefficients for wavelengths higher than 500 nm. On the basis of ultraviolet-visible spectroscopy data and using the Tauc equation, band gap values for direct and indirect electron transitions were determined.
T2 - Plasma Science and Technology
T1 - Optical properties of titanium oxide films obtained by cathodic arc plasma deposition
VL - 19
IS - 12
DO - 10.1088/2058-6272/aa8806
ER -
@article{
author = "Jokanović, Vukoman R. and Čolović, Božana M. and Trajkovska Petkoska, Anka and Mraković, Ana Đ. and Jokanović, Bojan and Nenadović, Miloš and Ferrara, Manuela and Nasov, Ilija",
year = "2017",
abstract = "Structural and optical properties of nanometric titanium oxide (TixOy) films obtained by cathodic arc plasma deposition were investigated. Phase analysis by x-ray diffraction and Fourier-transform infrared spectroscopy showed the presence of anatase, rutile, Ti2O3, Ti4O7 and amorphous phases. Scanning electron microscopy images showed well-developed surface morphology with nano-patterns. Spectroscopic ellipsometry revealed film thicknesses of 53 and 50 nm, variable refractive indices dependent on the light wavelength and close to zero extinction coefficients for wavelengths higher than 500 nm. On the basis of ultraviolet-visible spectroscopy data and using the Tauc equation, band gap values for direct and indirect electron transitions were determined.",
journal = "Plasma Science and Technology",
title = "Optical properties of titanium oxide films obtained by cathodic arc plasma deposition",
volume = "19",
number = "12",
doi = "10.1088/2058-6272/aa8806"
}
Jokanović, V. R., Čolović, B. M., Trajkovska Petkoska, A., Mraković, A. Đ., Jokanović, B., Nenadović, M., Ferrara, M.,& Nasov, I.. (2017). Optical properties of titanium oxide films obtained by cathodic arc plasma deposition. in Plasma Science and Technology, 19(12).
https://doi.org/10.1088/2058-6272/aa8806
Jokanović VR, Čolović BM, Trajkovska Petkoska A, Mraković AĐ, Jokanović B, Nenadović M, Ferrara M, Nasov I. Optical properties of titanium oxide films obtained by cathodic arc plasma deposition. in Plasma Science and Technology. 2017;19(12).
doi:10.1088/2058-6272/aa8806 .
Jokanović, Vukoman R., Čolović, Božana M., Trajkovska Petkoska, Anka, Mraković, Ana Đ., Jokanović, Bojan, Nenadović, Miloš, Ferrara, Manuela, Nasov, Ilija, "Optical properties of titanium oxide films obtained by cathodic arc plasma deposition" in Plasma Science and Technology, 19, no. 12 (2017),
https://doi.org/10.1088/2058-6272/aa8806 . .
