Pulsed carbon-dioxide laser ablation: profilometric analysis

Abstract

Pulsed carbon-dioxide (TEA CO2) laser, among other, is suitable for ablation of hard ceramic coatings (HCC). HCC, deposited on steel substrate, can be used for tools and machine parts protection. The roughness and thickness of HCC are commonly measured by a profilometer. Data obtained with diamond tip usually give real 2D surface profile. A 3D topography of the surface can be obtained with this procedure, too. The results of profilometric analysis including 3D visualization, using a Taylor-Hobson Talysurf 2 profilometer, of laser ablated area (especially craters) are presented in this work. The following HCC were studied: TiN, CrN, CrON, as well as stainless steel wafer; all of them were surface ablated by pulsed TEA CO2 laser. The applied profilometer analysis describes effects of laser ablation well and it would be supplement to the results obtained by microscopic analysis.