EBS/C proton spectra from a virgin diamond crystal
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In the present work, elastic backscattering channeling spectra, EBS/C, of protons in a (100) diamond crystal were experimentally and theoretically studied via a new computer simulation code. Proton incident energies for EBS/C spectra were in the energy range from 1.0 MeV to 1.9 MeV. The energy range was chosen in order to explore a distinct strong resonance of the C-12(p,p(0))C-12 elastic scattering at 1737 key. The computer simulation code applied for the fitting of the experimental spectra in the random mode was compared with the corresponding SIMNRA results. In the channeling mode, it assumes a Gompertz type sigmoidal dechanneling function, which has two fitting parameters, x(c), and k, the dechanneling range and rate, respectively. It also uses a, ratio of the channeling to random energy losses, as a fitting parameter. It was observed that x(c) increases, k decreases and a stays relatively constant with the proton incident energy. These observations confirm the physical interpretat...ion of the fitting parameters. Also, they constitute the basics for the further development of the code for the quantification of induced amorphization and depth profiling of implanted ions. (C) 2016 Elsevier B.V. All rights reserved.
Keywords:EBS/C / Dechanneling / Diamond / Carbon / Computer simulation
Source:Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 2016, 381, 96-102
- Physics and Chemistry with Ion Beams (RS-45006)
- Horizon 2020 project [654168, AIDA-2020], Croatian Science Foundation under the project MIOBICC