Laboratory-built measuring device, based on pulse photoacoustic (PA) effect, which allows the measurement of optical and acoustic signals in time domain, is presented. The experimental setup is described and the device specifications are given in detail. Optical and PA signals are measured in a time range from 10 μs to 10 s, for different samples and conditions. As an example, the experimental results for Si square membrane (Si chip with 5 x 5 mm frame and 3 × 3 mm square membrane, 32 μm thick, used in micromechanic devices) are presented. The square membrane Si chips were prepared by wet anisotropic bulk micromachining process. The applicability of the measured PA signal in the characterization of semiconductors and micromechanical structures is discussed.
TY - CONF
AU - Đorđević, Katarina Lj.
AU - Galović, Slobodanka
AU - Nešić, Mioljub
AU - Todorović, D.
AU - Popović, Marica
AU - Markushev, Dragan D.
AU - Markushev, Dragana K.
PY - 2022
UR - https://vinar.vin.bg.ac.rs/handle/123456789/10962
AB - Laboratory-built measuring device, based on pulse photoacoustic (PA) effect, which allows the measurement of optical and acoustic signals in time domain, is presented. The experimental setup is described and the device specifications are given in detail. Optical and PA signals are measured in a time range from 10 μs to 10 s, for different samples and conditions. As an example, the experimental results for Si square membrane (Si chip with 5 x 5 mm frame and 3 × 3 mm square membrane, 32 μm thick, used in micromechanic devices) are presented. The square membrane Si chips were prepared by wet anisotropic bulk micromachining process. The applicability of the measured PA signal in the characterization of semiconductors and micromechanical structures is discussed.
PB - Istočno Sarajevo : Elektrotehnički fakultet
C3 - InfoTeh-Jahorina : 21. međunarodni simpozijum INFOTEH-JAHORINA 2022 : zbornik radova; Mart 16-18; Jahorina
T1 - Transmission pulse photoacoustic set-up for characterization of solids
SP - 161
EP - 164
UR - https://hdl.handle.net/21.15107/rcub_vinar_10962
ER -
@conference{
author = "Đorđević, Katarina Lj. and Galović, Slobodanka and Nešić, Mioljub and Todorović, D. and Popović, Marica and Markushev, Dragan D. and Markushev, Dragana K.",
year = "2022",
abstract = "Laboratory-built measuring device, based on pulse photoacoustic (PA) effect, which allows the measurement of optical and acoustic signals in time domain, is presented. The experimental setup is described and the device specifications are given in detail. Optical and PA signals are measured in a time range from 10 μs to 10 s, for different samples and conditions. As an example, the experimental results for Si square membrane (Si chip with 5 x 5 mm frame and 3 × 3 mm square membrane, 32 μm thick, used in micromechanic devices) are presented. The square membrane Si chips were prepared by wet anisotropic bulk micromachining process. The applicability of the measured PA signal in the characterization of semiconductors and micromechanical structures is discussed.",
publisher = "Istočno Sarajevo : Elektrotehnički fakultet",
journal = "InfoTeh-Jahorina : 21. međunarodni simpozijum INFOTEH-JAHORINA 2022 : zbornik radova; Mart 16-18; Jahorina",
title = "Transmission pulse photoacoustic set-up for characterization of solids",
pages = "161-164",
url = "https://hdl.handle.net/21.15107/rcub_vinar_10962"
}
Đorđević, K. Lj., Galović, S., Nešić, M., Todorović, D., Popović, M., Markushev, D. D.,& Markushev, D. K.. (2022). Transmission pulse photoacoustic set-up for characterization of solids. in InfoTeh-Jahorina : 21. međunarodni simpozijum INFOTEH-JAHORINA 2022 : zbornik radova; Mart 16-18; Jahorina
Istočno Sarajevo : Elektrotehnički fakultet., 161-164.
https://hdl.handle.net/21.15107/rcub_vinar_10962
Đorđević KL, Galović S, Nešić M, Todorović D, Popović M, Markushev DD, Markushev DK. Transmission pulse photoacoustic set-up for characterization of solids. in InfoTeh-Jahorina : 21. međunarodni simpozijum INFOTEH-JAHORINA 2022 : zbornik radova; Mart 16-18; Jahorina. 2022;:161-164.
https://hdl.handle.net/21.15107/rcub_vinar_10962 .
Đorđević, Katarina Lj., Galović, Slobodanka, Nešić, Mioljub, Todorović, D., Popović, Marica, Markushev, Dragan D., Markushev, Dragana K., "Transmission pulse photoacoustic set-up for characterization of solids" in InfoTeh-Jahorina : 21. međunarodni simpozijum INFOTEH-JAHORINA 2022 : zbornik radova; Mart 16-18; Jahorina (2022):161-164,
https://hdl.handle.net/21.15107/rcub_vinar_10962 .
