Structure-dependent optical properties of Au/Ag irradiated TiN thin films
Samo za registrovane korisnike
2023
Autori
Popović, MajaNovaković, Mirjana M.
Vaňa, Dušan
Ronning, Carsten
Jugović, Dragana
Rajić, Vladimir
Noga, Pavol
Članak u časopisu (Objavljena verzija)
Metapodaci
Prikaz svih podataka o dokumentuApstrakt
Titanium nitride (TiN) is an attractive alternative for modern and future photonic applications, as its optical properties can be engineered over a wide spectral range. In this study, we have used sequential implantation of gold and silver ions with varying ion fluence, as well as subsequent annealing, in order to modify the optical and plasmonic properties of TiN thin films and correlated this to their structural properties. Our investigations show that the columnar structure of the TiN films is partially destroyed upon implantation, but metallic Au and Ag nanoparticles are formed. The irradiation further induces a reduction of the lattice constant as well as changes the TiN stoichiometry and grain size. From the optical point of view, the implanted films possess less metallicity with increasing Ag fluence and losses several times lower than the as-deposited film, which can be correlated with the deficiency of nitrogen and additional defects. Subsequent annealing partially recovered t...he destroyed columnar structure, and the films become more metallic where the optical losses are much smaller in comparison to the as-implanted situation, being comparable to those of pure Au and Ag. In this way, by varying the implantation fluence of silver ions properly while keeping the gold fluence constant, we were able to optimize experimental parameters in such a way to ensure the formation of TiN with desirable optical performances.
Ključne reči:
titanium-nitride / silver / gold / sequential implantation / structural properties / optical lossesIzvor:
Optical Materials, 2023, 138, 113684-Finansiranje / projekti:
- Ministarstvo nauke, tehnološkog razvoja i inovacija Republike Srbije, institucionalno finansiranje - 200017 (Univerzitet u Beogradu, Institut za nuklearne nauke Vinča, Beograd-Vinča) (RS-200017)
- German-Serbian DAAD bilateral collaboration [451-03-01971/2018-09/3]
- Slovak Research and Development Agency [APVV-18-0168]
- European Structural Development Funds [ITMS2014 + 313011W085]
- COST Action [FIT4NANO CA19140]
DOI: 10.1016/j.optmat.2023.113684
ISSN: 0925-3467
WoS: 000957109100001
Scopus: 2-s2.0-85150214714
Institucija/grupa
VinčaTY - JOUR AU - Popović, Maja AU - Novaković, Mirjana M. AU - Vaňa, Dušan AU - Ronning, Carsten AU - Jugović, Dragana AU - Rajić, Vladimir AU - Noga, Pavol PY - 2023 UR - https://vinar.vin.bg.ac.rs/handle/123456789/10746 AB - Titanium nitride (TiN) is an attractive alternative for modern and future photonic applications, as its optical properties can be engineered over a wide spectral range. In this study, we have used sequential implantation of gold and silver ions with varying ion fluence, as well as subsequent annealing, in order to modify the optical and plasmonic properties of TiN thin films and correlated this to their structural properties. Our investigations show that the columnar structure of the TiN films is partially destroyed upon implantation, but metallic Au and Ag nanoparticles are formed. The irradiation further induces a reduction of the lattice constant as well as changes the TiN stoichiometry and grain size. From the optical point of view, the implanted films possess less metallicity with increasing Ag fluence and losses several times lower than the as-deposited film, which can be correlated with the deficiency of nitrogen and additional defects. Subsequent annealing partially recovered the destroyed columnar structure, and the films become more metallic where the optical losses are much smaller in comparison to the as-implanted situation, being comparable to those of pure Au and Ag. In this way, by varying the implantation fluence of silver ions properly while keeping the gold fluence constant, we were able to optimize experimental parameters in such a way to ensure the formation of TiN with desirable optical performances. T2 - Optical Materials T1 - Structure-dependent optical properties of Au/Ag irradiated TiN thin films VL - 138 SP - 113684 DO - 10.1016/j.optmat.2023.113684 UR - https://hdl.handle.net/21.15107/rcub_dais_14289 ER -
@article{ author = "Popović, Maja and Novaković, Mirjana M. and Vaňa, Dušan and Ronning, Carsten and Jugović, Dragana and Rajić, Vladimir and Noga, Pavol", year = "2023", abstract = "Titanium nitride (TiN) is an attractive alternative for modern and future photonic applications, as its optical properties can be engineered over a wide spectral range. In this study, we have used sequential implantation of gold and silver ions with varying ion fluence, as well as subsequent annealing, in order to modify the optical and plasmonic properties of TiN thin films and correlated this to their structural properties. Our investigations show that the columnar structure of the TiN films is partially destroyed upon implantation, but metallic Au and Ag nanoparticles are formed. The irradiation further induces a reduction of the lattice constant as well as changes the TiN stoichiometry and grain size. From the optical point of view, the implanted films possess less metallicity with increasing Ag fluence and losses several times lower than the as-deposited film, which can be correlated with the deficiency of nitrogen and additional defects. Subsequent annealing partially recovered the destroyed columnar structure, and the films become more metallic where the optical losses are much smaller in comparison to the as-implanted situation, being comparable to those of pure Au and Ag. In this way, by varying the implantation fluence of silver ions properly while keeping the gold fluence constant, we were able to optimize experimental parameters in such a way to ensure the formation of TiN with desirable optical performances.", journal = "Optical Materials", title = "Structure-dependent optical properties of Au/Ag irradiated TiN thin films", volume = "138", pages = "113684", doi = "10.1016/j.optmat.2023.113684", url = "https://hdl.handle.net/21.15107/rcub_dais_14289" }
Popović, M., Novaković, M. M., Vaňa, D., Ronning, C., Jugović, D., Rajić, V.,& Noga, P.. (2023). Structure-dependent optical properties of Au/Ag irradiated TiN thin films. in Optical Materials, 138, 113684. https://doi.org/10.1016/j.optmat.2023.113684 https://hdl.handle.net/21.15107/rcub_dais_14289
Popović M, Novaković MM, Vaňa D, Ronning C, Jugović D, Rajić V, Noga P. Structure-dependent optical properties of Au/Ag irradiated TiN thin films. in Optical Materials. 2023;138:113684. doi:10.1016/j.optmat.2023.113684 https://hdl.handle.net/21.15107/rcub_dais_14289 .
Popović, Maja, Novaković, Mirjana M., Vaňa, Dušan, Ronning, Carsten, Jugović, Dragana, Rajić, Vladimir, Noga, Pavol, "Structure-dependent optical properties of Au/Ag irradiated TiN thin films" in Optical Materials, 138 (2023):113684, https://doi.org/10.1016/j.optmat.2023.113684 ., https://hdl.handle.net/21.15107/rcub_dais_14289 .