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Detailed phisyco-chemical characterization of the multilayered thin films based on titanium oxynitride and copper doped titanium nitride obtained by different PVD techniques
Thin films on the base of titanium oxynitrides and copper doped titanium nitride were obtained by a combination of different PVD techniques on the surface of glass substrate and their physicochemical properties were analyzed in details. Phase composition of the samples was analyzed by XRD and FTIR methods, while microstructure of the samples was analyzed by SEM. XPS was used for depth profiling of the samples, which enabled determination of the oxidative state of titanium and corresponding phases through various film layers from the surface to the substrate. The depth of the various layers and their extinction coefficients and refractory indexes were estimated by spectroscopic ellipsometry.
Keywords:
Ellipsometry / FTIR / SEM / Titanium thin films / XPS / XRD
TY - JOUR
AU - Jokanović, Vukoman R.
AU - Bundaleski, Nenad
AU - Petrović, Božana
AU - Ferarra, Manuela
AU - Jokanović, Bojan
AU - Živković, Slavoljub
AU - Nasov, Ilija
PY - 2022
UR - https://vinar.vin.bg.ac.rs/handle/123456789/10029
AB - Thin films on the base of titanium oxynitrides and copper doped titanium nitride were obtained by a combination of different PVD techniques on the surface of glass substrate and their physicochemical properties were analyzed in details. Phase composition of the samples was analyzed by XRD and FTIR methods, while microstructure of the samples was analyzed by SEM. XPS was used for depth profiling of the samples, which enabled determination of the oxidative state of titanium and corresponding phases through various film layers from the surface to the substrate. The depth of the various layers and their extinction coefficients and refractory indexes were estimated by spectroscopic ellipsometry.
T2 - Vacuum
T1 - Detailed phisyco-chemical characterization of the multilayered thin films based on titanium oxynitride and copper doped titanium nitride obtained by different PVD techniques
VL - 195
SP - 110708
DO - 10.1016/j.vacuum.2021.110708
ER -
@article{
author = "Jokanović, Vukoman R. and Bundaleski, Nenad and Petrović, Božana and Ferarra, Manuela and Jokanović, Bojan and Živković, Slavoljub and Nasov, Ilija",
year = "2022",
abstract = "Thin films on the base of titanium oxynitrides and copper doped titanium nitride were obtained by a combination of different PVD techniques on the surface of glass substrate and their physicochemical properties were analyzed in details. Phase composition of the samples was analyzed by XRD and FTIR methods, while microstructure of the samples was analyzed by SEM. XPS was used for depth profiling of the samples, which enabled determination of the oxidative state of titanium and corresponding phases through various film layers from the surface to the substrate. The depth of the various layers and their extinction coefficients and refractory indexes were estimated by spectroscopic ellipsometry.",
journal = "Vacuum",
title = "Detailed phisyco-chemical characterization of the multilayered thin films based on titanium oxynitride and copper doped titanium nitride obtained by different PVD techniques",
volume = "195",
pages = "110708",
doi = "10.1016/j.vacuum.2021.110708"
}
Jokanović, V. R., Bundaleski, N., Petrović, B., Ferarra, M., Jokanović, B., Živković, S.,& Nasov, I.. (2022). Detailed phisyco-chemical characterization of the multilayered thin films based on titanium oxynitride and copper doped titanium nitride obtained by different PVD techniques. in Vacuum, 195, 110708.
https://doi.org/10.1016/j.vacuum.2021.110708
Jokanović VR, Bundaleski N, Petrović B, Ferarra M, Jokanović B, Živković S, Nasov I. Detailed phisyco-chemical characterization of the multilayered thin films based on titanium oxynitride and copper doped titanium nitride obtained by different PVD techniques. in Vacuum. 2022;195:110708.
doi:10.1016/j.vacuum.2021.110708 .
Jokanović, Vukoman R., Bundaleski, Nenad, Petrović, Božana, Ferarra, Manuela, Jokanović, Bojan, Živković, Slavoljub, Nasov, Ilija, "Detailed phisyco-chemical characterization of the multilayered thin films based on titanium oxynitride and copper doped titanium nitride obtained by different PVD techniques" in Vacuum, 195 (2022):110708,
https://doi.org/10.1016/j.vacuum.2021.110708 . .
