Detailed phisyco-chemical characterization of the multilayered thin films based on titanium oxynitride and copper doped titanium nitride obtained by different PVD techniques
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2022
Authors
Jokanović, Vukoman R.
Bundaleski, Nenad

Petrović, Božana

Ferarra, Manuela
Jokanović, Bojan
Živković, Slavoljub

Nasov, Ilija
Article (Published version)

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Thin films on the base of titanium oxynitrides and copper doped titanium nitride were obtained by a combination of different PVD techniques on the surface of glass substrate and their physicochemical properties were analyzed in details. Phase composition of the samples was analyzed by XRD and FTIR methods, while microstructure of the samples was analyzed by SEM. XPS was used for depth profiling of the samples, which enabled determination of the oxidative state of titanium and corresponding phases through various film layers from the surface to the substrate. The depth of the various layers and their extinction coefficients and refractory indexes were estimated by spectroscopic ellipsometry.
Keywords:
Ellipsometry / FTIR / SEM / Titanium thin films / XPS / XRDSource:
Vacuum, 2022, 195, 110708-Funding / projects:
- Chemical and structural designing of nanomaterials for application in medicine and tissue engineering (RS-172026)
- Functional, Functionalized and Advanced Nanomaterials (RS-45005)
- Ministry of Education, Science and Technological Development of the Republic of Serbia [Theme 0402108]
- Portuguese National Funding Agency for Science, Research and Technology [UID/FIS/00068/2019]
DOI: 10.1016/j.vacuum.2021.110708
ISSN: 0042-207X
WoS: 000733006900005
Scopus: 2-s2.0-85118536987
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VinčaTY - JOUR AU - Jokanović, Vukoman R. AU - Bundaleski, Nenad AU - Petrović, Božana AU - Ferarra, Manuela AU - Jokanović, Bojan AU - Živković, Slavoljub AU - Nasov, Ilija PY - 2022 UR - https://vinar.vin.bg.ac.rs/handle/123456789/10029 AB - Thin films on the base of titanium oxynitrides and copper doped titanium nitride were obtained by a combination of different PVD techniques on the surface of glass substrate and their physicochemical properties were analyzed in details. Phase composition of the samples was analyzed by XRD and FTIR methods, while microstructure of the samples was analyzed by SEM. XPS was used for depth profiling of the samples, which enabled determination of the oxidative state of titanium and corresponding phases through various film layers from the surface to the substrate. The depth of the various layers and their extinction coefficients and refractory indexes were estimated by spectroscopic ellipsometry. T2 - Vacuum T1 - Detailed phisyco-chemical characterization of the multilayered thin films based on titanium oxynitride and copper doped titanium nitride obtained by different PVD techniques VL - 195 SP - 110708 DO - 10.1016/j.vacuum.2021.110708 ER -
@article{ author = "Jokanović, Vukoman R. and Bundaleski, Nenad and Petrović, Božana and Ferarra, Manuela and Jokanović, Bojan and Živković, Slavoljub and Nasov, Ilija", year = "2022", abstract = "Thin films on the base of titanium oxynitrides and copper doped titanium nitride were obtained by a combination of different PVD techniques on the surface of glass substrate and their physicochemical properties were analyzed in details. Phase composition of the samples was analyzed by XRD and FTIR methods, while microstructure of the samples was analyzed by SEM. XPS was used for depth profiling of the samples, which enabled determination of the oxidative state of titanium and corresponding phases through various film layers from the surface to the substrate. The depth of the various layers and their extinction coefficients and refractory indexes were estimated by spectroscopic ellipsometry.", journal = "Vacuum", title = "Detailed phisyco-chemical characterization of the multilayered thin films based on titanium oxynitride and copper doped titanium nitride obtained by different PVD techniques", volume = "195", pages = "110708", doi = "10.1016/j.vacuum.2021.110708" }
Jokanović, V. R., Bundaleski, N., Petrović, B., Ferarra, M., Jokanović, B., Živković, S.,& Nasov, I.. (2022). Detailed phisyco-chemical characterization of the multilayered thin films based on titanium oxynitride and copper doped titanium nitride obtained by different PVD techniques. in Vacuum, 195, 110708. https://doi.org/10.1016/j.vacuum.2021.110708
Jokanović VR, Bundaleski N, Petrović B, Ferarra M, Jokanović B, Živković S, Nasov I. Detailed phisyco-chemical characterization of the multilayered thin films based on titanium oxynitride and copper doped titanium nitride obtained by different PVD techniques. in Vacuum. 2022;195:110708. doi:10.1016/j.vacuum.2021.110708 .
Jokanović, Vukoman R., Bundaleski, Nenad, Petrović, Božana, Ferarra, Manuela, Jokanović, Bojan, Živković, Slavoljub, Nasov, Ilija, "Detailed phisyco-chemical characterization of the multilayered thin films based on titanium oxynitride and copper doped titanium nitride obtained by different PVD techniques" in Vacuum, 195 (2022):110708, https://doi.org/10.1016/j.vacuum.2021.110708 . .