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Detailed phisyco-chemical characterization of the multilayered thin films based on titanium oxynitride and copper doped titanium nitride obtained by different PVD techniques

Authorized Users Only
2022
Authors
Jokanović, Vukoman R.
Bundaleski, Nenad
Petrović, Božana
Ferarra, Manuela
Jokanović, Bojan
Živković, Slavoljub
Nasov, Ilija
Article (Published version)
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Abstract
Thin films on the base of titanium oxynitrides and copper doped titanium nitride were obtained by a combination of different PVD techniques on the surface of glass substrate and their physicochemical properties were analyzed in details. Phase composition of the samples was analyzed by XRD and FTIR methods, while microstructure of the samples was analyzed by SEM. XPS was used for depth profiling of the samples, which enabled determination of the oxidative state of titanium and corresponding phases through various film layers from the surface to the substrate. The depth of the various layers and their extinction coefficients and refractory indexes were estimated by spectroscopic ellipsometry.
Keywords:
Ellipsometry / FTIR / SEM / Titanium thin films / XPS / XRD
Source:
Vacuum, 2022, 195, 110708-
Funding / projects:
  • Chemical and structural designing of nanomaterials for application in medicine and tissue engineering (RS-172026)
  • Functional, Functionalized and Advanced Nanomaterials (RS-45005)
  • Ministry of Education, Science and Technological Development of the Republic of Serbia [Theme 0402108]
  • Portuguese National Funding Agency for Science, Research and Technology [UID/FIS/00068/2019]

DOI: 10.1016/j.vacuum.2021.110708

ISSN: 0042-207X

WoS: 000733006900005

Scopus: 2-s2.0-85118536987
[ Google Scholar ]
URI
https://vinar.vin.bg.ac.rs/handle/123456789/10029
Collections
  • Radovi istraživača
Institution/Community
Vinča
TY  - JOUR
AU  - Jokanović, Vukoman R.
AU  - Bundaleski, Nenad
AU  - Petrović, Božana
AU  - Ferarra, Manuela
AU  - Jokanović, Bojan
AU  - Živković, Slavoljub
AU  - Nasov, Ilija
PY  - 2022
UR  - https://vinar.vin.bg.ac.rs/handle/123456789/10029
AB  - Thin films on the base of titanium oxynitrides and copper doped titanium nitride were obtained by a combination of different PVD techniques on the surface of glass substrate and their physicochemical properties were analyzed in details. Phase composition of the samples was analyzed by XRD and FTIR methods, while microstructure of the samples was analyzed by SEM. XPS was used for depth profiling of the samples, which enabled determination of the oxidative state of titanium and corresponding phases through various film layers from the surface to the substrate. The depth of the various layers and their extinction coefficients and refractory indexes were estimated by spectroscopic ellipsometry.
T2  - Vacuum
T1  - Detailed phisyco-chemical characterization of the multilayered thin films based on titanium oxynitride and copper doped titanium nitride obtained by different PVD techniques
VL  - 195
SP  - 110708
DO  - 10.1016/j.vacuum.2021.110708
ER  - 
@article{
author = "Jokanović, Vukoman R. and Bundaleski, Nenad and Petrović, Božana and Ferarra, Manuela and Jokanović, Bojan and Živković, Slavoljub and Nasov, Ilija",
year = "2022",
abstract = "Thin films on the base of titanium oxynitrides and copper doped titanium nitride were obtained by a combination of different PVD techniques on the surface of glass substrate and their physicochemical properties were analyzed in details. Phase composition of the samples was analyzed by XRD and FTIR methods, while microstructure of the samples was analyzed by SEM. XPS was used for depth profiling of the samples, which enabled determination of the oxidative state of titanium and corresponding phases through various film layers from the surface to the substrate. The depth of the various layers and their extinction coefficients and refractory indexes were estimated by spectroscopic ellipsometry.",
journal = "Vacuum",
title = "Detailed phisyco-chemical characterization of the multilayered thin films based on titanium oxynitride and copper doped titanium nitride obtained by different PVD techniques",
volume = "195",
pages = "110708",
doi = "10.1016/j.vacuum.2021.110708"
}
Jokanović, V. R., Bundaleski, N., Petrović, B., Ferarra, M., Jokanović, B., Živković, S.,& Nasov, I.. (2022). Detailed phisyco-chemical characterization of the multilayered thin films based on titanium oxynitride and copper doped titanium nitride obtained by different PVD techniques. in Vacuum, 195, 110708.
https://doi.org/10.1016/j.vacuum.2021.110708
Jokanović VR, Bundaleski N, Petrović B, Ferarra M, Jokanović B, Živković S, Nasov I. Detailed phisyco-chemical characterization of the multilayered thin films based on titanium oxynitride and copper doped titanium nitride obtained by different PVD techniques. in Vacuum. 2022;195:110708.
doi:10.1016/j.vacuum.2021.110708 .
Jokanović, Vukoman R., Bundaleski, Nenad, Petrović, Božana, Ferarra, Manuela, Jokanović, Bojan, Živković, Slavoljub, Nasov, Ilija, "Detailed phisyco-chemical characterization of the multilayered thin films based on titanium oxynitride and copper doped titanium nitride obtained by different PVD techniques" in Vacuum, 195 (2022):110708,
https://doi.org/10.1016/j.vacuum.2021.110708 . .

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