Dobijanje i karakterizacija površina nanostrukturnih materijala

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Dobijanje i karakterizacija površina nanostrukturnih materijala (en)
Добијање и карактеризација површина наноструктурних материјала (sr)
Dobijanje i karakterizacija površina nanostrukturnih materijala (sr_RS)
Authors

Publications

Chemical surface composition of the polyethylene implanted by Ag+ ions studied by phase imaging atomic force microscopy

Štrbac, Svetlana; Nenadović, Miloš; Rajaković, Ljubinka V.; Rakočević, Zlatko Lj.

(2010)

TY  - JOUR
AU  - Štrbac, Svetlana
AU  - Nenadović, Miloš
AU  - Rajaković, Ljubinka V.
AU  - Rakočević, Zlatko Lj.
PY  - 2010
UR  - https://vinar.vin.bg.ac.rs/handle/123456789/3926
AB  - High density polyethylene (HDPE) has been modified by Ag+ ion implantation with the energy of 60 keV. The total amount of implanted silver ions was 1, 5 and 12 x 10(15) ions/cm(2). The surface topography was observed by atomic forcemicroscopy (AFM), while the surface composition changes were detected using phase imaging AFM. Surface topography changes were studied in detail using 3D surface parameters analyses. The average roughness decreased for the implanted HDPE indicating the flattening of the surface. Phase AFM images indicated the homogenization of the polyethylene during ion implantation, while histogram analyses confirmed the change in surface composition. (C) 2010 Elsevier B. V. All rights reserved.
T2  - Applied Surface Science
T1  - Chemical surface composition of the polyethylene implanted by Ag+ ions studied by phase imaging atomic force microscopy
VL  - 256
IS  - 12
SP  - 3895
EP  - 3899
DO  - 10.1016/j.apsusc.2010.01.046
ER  - 
@article{
author = "Štrbac, Svetlana and Nenadović, Miloš and Rajaković, Ljubinka V. and Rakočević, Zlatko Lj.",
year = "2010",
abstract = "High density polyethylene (HDPE) has been modified by Ag+ ion implantation with the energy of 60 keV. The total amount of implanted silver ions was 1, 5 and 12 x 10(15) ions/cm(2). The surface topography was observed by atomic forcemicroscopy (AFM), while the surface composition changes were detected using phase imaging AFM. Surface topography changes were studied in detail using 3D surface parameters analyses. The average roughness decreased for the implanted HDPE indicating the flattening of the surface. Phase AFM images indicated the homogenization of the polyethylene during ion implantation, while histogram analyses confirmed the change in surface composition. (C) 2010 Elsevier B. V. All rights reserved.",
journal = "Applied Surface Science",
title = "Chemical surface composition of the polyethylene implanted by Ag+ ions studied by phase imaging atomic force microscopy",
volume = "256",
number = "12",
pages = "3895-3899",
doi = "10.1016/j.apsusc.2010.01.046"
}
Štrbac, S., Nenadović, M., Rajaković, L. V.,& Rakočević, Z. Lj.. (2010). Chemical surface composition of the polyethylene implanted by Ag+ ions studied by phase imaging atomic force microscopy. in Applied Surface Science, 256(12), 3895-3899.
https://doi.org/10.1016/j.apsusc.2010.01.046
Štrbac S, Nenadović M, Rajaković LV, Rakočević ZL. Chemical surface composition of the polyethylene implanted by Ag+ ions studied by phase imaging atomic force microscopy. in Applied Surface Science. 2010;256(12):3895-3899.
doi:10.1016/j.apsusc.2010.01.046 .
Štrbac, Svetlana, Nenadović, Miloš, Rajaković, Ljubinka V., Rakočević, Zlatko Lj., "Chemical surface composition of the polyethylene implanted by Ag+ ions studied by phase imaging atomic force microscopy" in Applied Surface Science, 256, no. 12 (2010):3895-3899,
https://doi.org/10.1016/j.apsusc.2010.01.046 . .
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Quantification of the lift height for magnetic force microscopy using 3D surface parameters

Nenadović, Miloš; Štrbac, Svetlana; Rakočević, Zlatko Lj.

(2010)

TY  - JOUR
AU  - Nenadović, Miloš
AU  - Štrbac, Svetlana
AU  - Rakočević, Zlatko Lj.
PY  - 2010
UR  - https://vinar.vin.bg.ac.rs/handle/123456789/3858
AB  - In this work, the quantitative conditions for the lift height for imaging of the magnetic field using magnetic force microscopy (MFM) were optimized. A thin cobalt film deposited on a monocrystalline silicon (1 0 0) substrate with a thickness of 55 nm and a thin nickel film deposited on a glass with a thickness of 600 nm were used as samples. The topography of the surface was acquired by tapping mode atomic force microscopy (AFM), while MFM imaging was performed in the lift mode for various lift heights. It was determined that the sensitivity of the measurements was about 10% higher for images obtained at a scan angle of 90 degrees compared to a scan angle of 0 degrees. Therefore, the three-dimensional surface texture parameters, i.e., average roughness, skewness, kurtosis and the bearing ratio, were determined in dependence on the lift height for a scan angle of 90 degrees. The results of the analyses of the surface parameters showed that the influence of the substrate and its texture on the magnetic force image could be neglected for lift heights above 40 nm and that the upper lift height limit is 100 nm. It was determined that the optimal values of the lift heights were in the range from 60 to 80 nm, depending on the nature of the sample and on the type of the tip used. (C) 2009 Elsevier B.V. All rights reserved.
T2  - Applied Surface Science
T1  - Quantification of the lift height for magnetic force microscopy using 3D surface parameters
VL  - 256
IS  - 6
SP  - 1652
EP  - 1656
DO  - 10.1016/j.apsusc.2009.09.088
ER  - 
@article{
author = "Nenadović, Miloš and Štrbac, Svetlana and Rakočević, Zlatko Lj.",
year = "2010",
abstract = "In this work, the quantitative conditions for the lift height for imaging of the magnetic field using magnetic force microscopy (MFM) were optimized. A thin cobalt film deposited on a monocrystalline silicon (1 0 0) substrate with a thickness of 55 nm and a thin nickel film deposited on a glass with a thickness of 600 nm were used as samples. The topography of the surface was acquired by tapping mode atomic force microscopy (AFM), while MFM imaging was performed in the lift mode for various lift heights. It was determined that the sensitivity of the measurements was about 10% higher for images obtained at a scan angle of 90 degrees compared to a scan angle of 0 degrees. Therefore, the three-dimensional surface texture parameters, i.e., average roughness, skewness, kurtosis and the bearing ratio, were determined in dependence on the lift height for a scan angle of 90 degrees. The results of the analyses of the surface parameters showed that the influence of the substrate and its texture on the magnetic force image could be neglected for lift heights above 40 nm and that the upper lift height limit is 100 nm. It was determined that the optimal values of the lift heights were in the range from 60 to 80 nm, depending on the nature of the sample and on the type of the tip used. (C) 2009 Elsevier B.V. All rights reserved.",
journal = "Applied Surface Science",
title = "Quantification of the lift height for magnetic force microscopy using 3D surface parameters",
volume = "256",
number = "6",
pages = "1652-1656",
doi = "10.1016/j.apsusc.2009.09.088"
}
Nenadović, M., Štrbac, S.,& Rakočević, Z. Lj.. (2010). Quantification of the lift height for magnetic force microscopy using 3D surface parameters. in Applied Surface Science, 256(6), 1652-1656.
https://doi.org/10.1016/j.apsusc.2009.09.088
Nenadović M, Štrbac S, Rakočević ZL. Quantification of the lift height for magnetic force microscopy using 3D surface parameters. in Applied Surface Science. 2010;256(6):1652-1656.
doi:10.1016/j.apsusc.2009.09.088 .
Nenadović, Miloš, Štrbac, Svetlana, Rakočević, Zlatko Lj., "Quantification of the lift height for magnetic force microscopy using 3D surface parameters" in Applied Surface Science, 256, no. 6 (2010):1652-1656,
https://doi.org/10.1016/j.apsusc.2009.09.088 . .
10
14
15

A Method for the Spectroscopic Diagnostic of the Peculiarities of Materials Using the Semi-Auger Effect

Tančić, Aleksandar R.; Kutin, M.; Davidović, Milorad P.

(2009)

TY  - JOUR
AU  - Tančić, Aleksandar R.
AU  - Kutin, M.
AU  - Davidović, Milorad P.
PY  - 2009
UR  - https://vinar.vin.bg.ac.rs/handle/123456789/6800
AB  - We investigated the low energy satellites in the Rontgen spectra using the many-particle theory. These satellites are results of the radiative semi-Auger decay of the inner vacancy states. We did not treat only ordinary radiative decay. There exist the excitations of one of the atomic electrons together with the photon emission. We presented results of radiative semi-Auger decays of vacancy states in Ar atom. The knowledge of these processes is important for understanding the same processes in the case of the nanoparticles (molecules, fullerenes, clusters). Research in the field of the new materials requires more sophisticating methods which will open the new possibilities for obtaining materials of particular design, too. The theory which is presented in the paper may be easily generalized in case of particles like fullerenes and clusters.
T2  - Acta Physica Polonica A
T1  - A Method for the Spectroscopic Diagnostic of the Peculiarities of Materials Using the Semi-Auger Effect
VL  - 115
IS  - 4
SP  - 838
EP  - 841
DO  - 10.12693/APhysPolA.115.838
ER  - 
@article{
author = "Tančić, Aleksandar R. and Kutin, M. and Davidović, Milorad P.",
year = "2009",
abstract = "We investigated the low energy satellites in the Rontgen spectra using the many-particle theory. These satellites are results of the radiative semi-Auger decay of the inner vacancy states. We did not treat only ordinary radiative decay. There exist the excitations of one of the atomic electrons together with the photon emission. We presented results of radiative semi-Auger decays of vacancy states in Ar atom. The knowledge of these processes is important for understanding the same processes in the case of the nanoparticles (molecules, fullerenes, clusters). Research in the field of the new materials requires more sophisticating methods which will open the new possibilities for obtaining materials of particular design, too. The theory which is presented in the paper may be easily generalized in case of particles like fullerenes and clusters.",
journal = "Acta Physica Polonica A",
title = "A Method for the Spectroscopic Diagnostic of the Peculiarities of Materials Using the Semi-Auger Effect",
volume = "115",
number = "4",
pages = "838-841",
doi = "10.12693/APhysPolA.115.838"
}
Tančić, A. R., Kutin, M.,& Davidović, M. P.. (2009). A Method for the Spectroscopic Diagnostic of the Peculiarities of Materials Using the Semi-Auger Effect. in Acta Physica Polonica A, 115(4), 838-841.
https://doi.org/10.12693/APhysPolA.115.838
Tančić AR, Kutin M, Davidović MP. A Method for the Spectroscopic Diagnostic of the Peculiarities of Materials Using the Semi-Auger Effect. in Acta Physica Polonica A. 2009;115(4):838-841.
doi:10.12693/APhysPolA.115.838 .
Tančić, Aleksandar R., Kutin, M., Davidović, Milorad P., "A Method for the Spectroscopic Diagnostic of the Peculiarities of Materials Using the Semi-Auger Effect" in Acta Physica Polonica A, 115, no. 4 (2009):838-841,
https://doi.org/10.12693/APhysPolA.115.838 . .

Reactively sputtered Ni, Ni(N) and Ni3N films: Structural, electrical and magnetic properties

Popovic, N.; Bogdanov, Žarko; Goncić, Bratislav; Štrbac, Svetlana; Rakočević, Zlatko Lj.

(2009)

TY  - JOUR
AU  - Popovic, N.
AU  - Bogdanov, Žarko
AU  - Goncić, Bratislav
AU  - Štrbac, Svetlana
AU  - Rakočević, Zlatko Lj.
PY  - 2009
UR  - https://vinar.vin.bg.ac.rs/handle/123456789/3610
AB  - Nickel thin films were deposited on glass substrates at different N-2 gas contents using a dc triode sputtering deposition system. Triode configuration was used to deposit nanostructured thin films with preferred orientation at lower gas pressure and at lower substrate temperature compared to the dc diode sputtering system. A gradual evolution in the composition of the films from Ni, Ni(N), to Ni3N was found by X-ray diffraction analysis. The preferred growth orientation of the nanostructured Ni films changed from (1 1 1) to (1 0 0) for 9% N-2 at 100 degrees C. Ni3N films were formed at 23% N-2 with a particle size of about 65 nm, while for 0% and 9% of nitrogen, the particles sizes were 60 nm, and 37 nm, respectively, as obtained by atomic force microscopy. Magnetic force microscopy imaging showed that the local magnetic structure changed from disordered stripe domains of about 200 nm for Ni and Ni(N) to a structure without a magnetic contrast, indicating the paramagnetic state of this material, which confirmed the structural transformation from Ni to Ni3N. (C) 2008 Elsevier B. V. All rights reserved.
T2  - Applied Surface Science
T1  - Reactively sputtered Ni, Ni(N) and Ni3N films: Structural, electrical and magnetic properties
VL  - 255
IS  - 7
SP  - 4027
EP  - 4032
DO  - 10.1016/j.apsusc.2008.10.076
ER  - 
@article{
author = "Popovic, N. and Bogdanov, Žarko and Goncić, Bratislav and Štrbac, Svetlana and Rakočević, Zlatko Lj.",
year = "2009",
abstract = "Nickel thin films were deposited on glass substrates at different N-2 gas contents using a dc triode sputtering deposition system. Triode configuration was used to deposit nanostructured thin films with preferred orientation at lower gas pressure and at lower substrate temperature compared to the dc diode sputtering system. A gradual evolution in the composition of the films from Ni, Ni(N), to Ni3N was found by X-ray diffraction analysis. The preferred growth orientation of the nanostructured Ni films changed from (1 1 1) to (1 0 0) for 9% N-2 at 100 degrees C. Ni3N films were formed at 23% N-2 with a particle size of about 65 nm, while for 0% and 9% of nitrogen, the particles sizes were 60 nm, and 37 nm, respectively, as obtained by atomic force microscopy. Magnetic force microscopy imaging showed that the local magnetic structure changed from disordered stripe domains of about 200 nm for Ni and Ni(N) to a structure without a magnetic contrast, indicating the paramagnetic state of this material, which confirmed the structural transformation from Ni to Ni3N. (C) 2008 Elsevier B. V. All rights reserved.",
journal = "Applied Surface Science",
title = "Reactively sputtered Ni, Ni(N) and Ni3N films: Structural, electrical and magnetic properties",
volume = "255",
number = "7",
pages = "4027-4032",
doi = "10.1016/j.apsusc.2008.10.076"
}
Popovic, N., Bogdanov, Ž., Goncić, B., Štrbac, S.,& Rakočević, Z. Lj.. (2009). Reactively sputtered Ni, Ni(N) and Ni3N films: Structural, electrical and magnetic properties. in Applied Surface Science, 255(7), 4027-4032.
https://doi.org/10.1016/j.apsusc.2008.10.076
Popovic N, Bogdanov Ž, Goncić B, Štrbac S, Rakočević ZL. Reactively sputtered Ni, Ni(N) and Ni3N films: Structural, electrical and magnetic properties. in Applied Surface Science. 2009;255(7):4027-4032.
doi:10.1016/j.apsusc.2008.10.076 .
Popovic, N., Bogdanov, Žarko, Goncić, Bratislav, Štrbac, Svetlana, Rakočević, Zlatko Lj., "Reactively sputtered Ni, Ni(N) and Ni3N films: Structural, electrical and magnetic properties" in Applied Surface Science, 255, no. 7 (2009):4027-4032,
https://doi.org/10.1016/j.apsusc.2008.10.076 . .
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17
19

Biocompatible nanostructure materials

Nenadović, Miloš; Novaković, Mirjana M.; Popović, Maja; Rakočević, Zlatko Lj.; Nenadović, T.

(Society of Physical Chemists of Serbia, 2008)

TY  - CONF
AU  - Nenadović, Miloš
AU  - Novaković, Mirjana M.
AU  - Popović, Maja
AU  - Rakočević, Zlatko Lj.
AU  - Nenadović, T.
PY  - 2008
UR  - https://vinar.vin.bg.ac.rs/handle/123456789/9386
AB  - Materials suitable for medical systems have always been the product of interdisciplinary collaboration between material and biological science. As well as different area of physics and chemistry. For medical application materials must not damage blood cells or bones and must be resistant. Some implant materials for chemical bonds can be stabilized by implantation of different elements or deposition of very thin films. In this work we presented some results for replacement of damaged human tissues.
PB  - Society of Physical Chemists of Serbia
C3  - Physical chemistry 2008 : 9th international conference on fundamental and applied aspects of physical chemistry
T1  - Biocompatible nanostructure materials
VL  - 2
SP  - 497
EP  - 499
UR  - https://hdl.handle.net/21.15107/rcub_vinar_9386
ER  - 
@conference{
author = "Nenadović, Miloš and Novaković, Mirjana M. and Popović, Maja and Rakočević, Zlatko Lj. and Nenadović, T.",
year = "2008",
abstract = "Materials suitable for medical systems have always been the product of interdisciplinary collaboration between material and biological science. As well as different area of physics and chemistry. For medical application materials must not damage blood cells or bones and must be resistant. Some implant materials for chemical bonds can be stabilized by implantation of different elements or deposition of very thin films. In this work we presented some results for replacement of damaged human tissues.",
publisher = "Society of Physical Chemists of Serbia",
journal = "Physical chemistry 2008 : 9th international conference on fundamental and applied aspects of physical chemistry",
title = "Biocompatible nanostructure materials",
volume = "2",
pages = "497-499",
url = "https://hdl.handle.net/21.15107/rcub_vinar_9386"
}
Nenadović, M., Novaković, M. M., Popović, M., Rakočević, Z. Lj.,& Nenadović, T.. (2008). Biocompatible nanostructure materials. in Physical chemistry 2008 : 9th international conference on fundamental and applied aspects of physical chemistry
Society of Physical Chemists of Serbia., 2, 497-499.
https://hdl.handle.net/21.15107/rcub_vinar_9386
Nenadović M, Novaković MM, Popović M, Rakočević ZL, Nenadović T. Biocompatible nanostructure materials. in Physical chemistry 2008 : 9th international conference on fundamental and applied aspects of physical chemistry. 2008;2:497-499.
https://hdl.handle.net/21.15107/rcub_vinar_9386 .
Nenadović, Miloš, Novaković, Mirjana M., Popović, Maja, Rakočević, Zlatko Lj., Nenadović, T., "Biocompatible nanostructure materials" in Physical chemistry 2008 : 9th international conference on fundamental and applied aspects of physical chemistry, 2 (2008):497-499,
https://hdl.handle.net/21.15107/rcub_vinar_9386 .

Two new analytic approximations of the Chandrasekhars H function for isotropic scattering

Davidović, Dragomir A.; Vukanić, Jovan V.; Arsenović, Dušan

(2008)

TY  - JOUR
AU  - Davidović, Dragomir A.
AU  - Vukanić, Jovan V.
AU  - Arsenović, Dušan
PY  - 2008
UR  - https://vinar.vin.bg.ac.rs/handle/123456789/3370
AB  - The Chandrasekhars H functions play a central role in theoretical descriptions of radiative transfer in planetary and stellar atmospheres. In the present work our aim is to obtain in a simple way new analytic approximations of the Chandrasekhars function for isotropic scattering, which would be sufficiently simple but more accurate than the existing approximations. We apply the mean value theorem for definite integrals in the nonlinear integral equation for the Chandrasekhars H function. In this way the integral equation is formally solved but the solution depends on a new unknown parameter. We determine this parameter approximately, from the condition that the obtained H function matches the zero-order moment of the H function, which is known exactly, as accurately as possible in the whole range of the single particle albedo. The result gives our first analytic approximation for the H function. Using it as a starting approximation in the corresponding integral equation, after only one iteration which may be performed analytically, we obtain our second analytic approximation. The maximum relative error of our first analytic. approximation, which is very simple in structure, is below 2.5%. The accuracy of our second approximation is within 0.07%, so that it highly surpasses the accuracy of the other analytic approximations available in the literature. (c) 2007 Elsevier Inc. All rights reserved.
T2  - Icarus
T1  - Two new analytic approximations of the Chandrasekhars H function for isotropic scattering
VL  - 194
IS  - 1
SP  - 389
EP  - 397
DO  - 10.1016/j.icarus.2007.09.024
ER  - 
@article{
author = "Davidović, Dragomir A. and Vukanić, Jovan V. and Arsenović, Dušan",
year = "2008",
abstract = "The Chandrasekhars H functions play a central role in theoretical descriptions of radiative transfer in planetary and stellar atmospheres. In the present work our aim is to obtain in a simple way new analytic approximations of the Chandrasekhars function for isotropic scattering, which would be sufficiently simple but more accurate than the existing approximations. We apply the mean value theorem for definite integrals in the nonlinear integral equation for the Chandrasekhars H function. In this way the integral equation is formally solved but the solution depends on a new unknown parameter. We determine this parameter approximately, from the condition that the obtained H function matches the zero-order moment of the H function, which is known exactly, as accurately as possible in the whole range of the single particle albedo. The result gives our first analytic approximation for the H function. Using it as a starting approximation in the corresponding integral equation, after only one iteration which may be performed analytically, we obtain our second analytic approximation. The maximum relative error of our first analytic. approximation, which is very simple in structure, is below 2.5%. The accuracy of our second approximation is within 0.07%, so that it highly surpasses the accuracy of the other analytic approximations available in the literature. (c) 2007 Elsevier Inc. All rights reserved.",
journal = "Icarus",
title = "Two new analytic approximations of the Chandrasekhars H function for isotropic scattering",
volume = "194",
number = "1",
pages = "389-397",
doi = "10.1016/j.icarus.2007.09.024"
}
Davidović, D. A., Vukanić, J. V.,& Arsenović, D.. (2008). Two new analytic approximations of the Chandrasekhars H function for isotropic scattering. in Icarus, 194(1), 389-397.
https://doi.org/10.1016/j.icarus.2007.09.024
Davidović DA, Vukanić JV, Arsenović D. Two new analytic approximations of the Chandrasekhars H function for isotropic scattering. in Icarus. 2008;194(1):389-397.
doi:10.1016/j.icarus.2007.09.024 .
Davidović, Dragomir A., Vukanić, Jovan V., Arsenović, Dušan, "Two new analytic approximations of the Chandrasekhars H function for isotropic scattering" in Icarus, 194, no. 1 (2008):389-397,
https://doi.org/10.1016/j.icarus.2007.09.024 . .
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15
15

Surface roughness of ultra-thin silver films sputter depositedon a glass

Rakočević, Zlatko Lj.; Petrović, R.; Štrbac, Svetlana

(2008)

TY  - JOUR
AU  - Rakočević, Zlatko Lj.
AU  - Petrović, R.
AU  - Štrbac, Svetlana
PY  - 2008
UR  - https://vinar.vin.bg.ac.rs/handle/123456789/3577
AB  - Silver was sputter deposited on a glass with a thin film thickness ranging from 10 to 80 nm. Scanning tunnelling microscopy was used to study the morphology of the obtained Ag-glass surfaces and to estimate the surface roughness. An equation for the surface roughness of the thin film was evaluated using parameters related to the thin film features: the surface roughness of the substrate, the compressibility of the thin film and the film thickness. The experimental results were fitted using the evaluated equation, and the conditions favouring lower or higher surface roughness were analyzed.
T2  - Journal of Microscopy, Oxford
T1  - Surface roughness of ultra-thin silver films sputter depositedon a glass
VL  - 232
IS  - 3
SP  - 595
EP  - 600
DO  - 10.1111/j.1365-2818.2008.02123.x
ER  - 
@article{
author = "Rakočević, Zlatko Lj. and Petrović, R. and Štrbac, Svetlana",
year = "2008",
abstract = "Silver was sputter deposited on a glass with a thin film thickness ranging from 10 to 80 nm. Scanning tunnelling microscopy was used to study the morphology of the obtained Ag-glass surfaces and to estimate the surface roughness. An equation for the surface roughness of the thin film was evaluated using parameters related to the thin film features: the surface roughness of the substrate, the compressibility of the thin film and the film thickness. The experimental results were fitted using the evaluated equation, and the conditions favouring lower or higher surface roughness were analyzed.",
journal = "Journal of Microscopy, Oxford",
title = "Surface roughness of ultra-thin silver films sputter depositedon a glass",
volume = "232",
number = "3",
pages = "595-600",
doi = "10.1111/j.1365-2818.2008.02123.x"
}
Rakočević, Z. Lj., Petrović, R.,& Štrbac, S.. (2008). Surface roughness of ultra-thin silver films sputter depositedon a glass. in Journal of Microscopy, Oxford, 232(3), 595-600.
https://doi.org/10.1111/j.1365-2818.2008.02123.x
Rakočević ZL, Petrović R, Štrbac S. Surface roughness of ultra-thin silver films sputter depositedon a glass. in Journal of Microscopy, Oxford. 2008;232(3):595-600.
doi:10.1111/j.1365-2818.2008.02123.x .
Rakočević, Zlatko Lj., Petrović, R., Štrbac, Svetlana, "Surface roughness of ultra-thin silver films sputter depositedon a glass" in Journal of Microscopy, Oxford, 232, no. 3 (2008):595-600,
https://doi.org/10.1111/j.1365-2818.2008.02123.x . .
10
9
11

Nano-structured TiN thin films deposited by single ion beam reactive sputtering

Bogdanov, Žarko; Popovic, N.; Zlatanovic, M.; Goncić, Bratislav; Rakočević, Zlatko Lj.; Zec, Slavica

(2007)

TY  - CONF
AU  - Bogdanov, Žarko
AU  - Popovic, N.
AU  - Zlatanovic, M.
AU  - Goncić, Bratislav
AU  - Rakočević, Zlatko Lj.
AU  - Zec, Slavica
PY  - 2007
UR  - https://vinar.vin.bg.ac.rs/handle/123456789/6692
AB  - The reactive sputter deposition of TiN thin films onto glass substrate at the ambient temperature using a homemade broad beam argon ion source was investigated in order to deposit the films with nanostructural characteristics. While constant Ar beam energy of 2 keV was used, the N-2 partial pressure and the substrate current, adjusted by different accelerator grid potentials (V-acc) were varied. A negative substrate bias voltage (100 V) was additionally applied. The TiN film structure was investigated by XRD and STM methods. All deposited films exhibited (220) preferred orientation, and the change in normalized peak intensity (I-220/d), lattice spacing (d(220)) and full-with at half-maximum (FWHM) were investigated. As a result of higher energy bombardment with 100 V negative substrate bias, compared to the substrate current change with V-acc, nearly constant (220) peak broadening with the increase of N-2 partial pressure was obtained. The measured grain diameter (STM and XRD) confirms that the grain size is less than 12 nm, and the (220) preferred orientation was disturbed but not destructed.
C3  - Materials Science Forum
T1  - Nano-structured TiN thin films deposited by single ion beam reactive sputtering
VL  - 555
SP  - 303
EP  - +
UR  - https://hdl.handle.net/21.15107/rcub_vinar_6692
ER  - 
@conference{
author = "Bogdanov, Žarko and Popovic, N. and Zlatanovic, M. and Goncić, Bratislav and Rakočević, Zlatko Lj. and Zec, Slavica",
year = "2007",
abstract = "The reactive sputter deposition of TiN thin films onto glass substrate at the ambient temperature using a homemade broad beam argon ion source was investigated in order to deposit the films with nanostructural characteristics. While constant Ar beam energy of 2 keV was used, the N-2 partial pressure and the substrate current, adjusted by different accelerator grid potentials (V-acc) were varied. A negative substrate bias voltage (100 V) was additionally applied. The TiN film structure was investigated by XRD and STM methods. All deposited films exhibited (220) preferred orientation, and the change in normalized peak intensity (I-220/d), lattice spacing (d(220)) and full-with at half-maximum (FWHM) were investigated. As a result of higher energy bombardment with 100 V negative substrate bias, compared to the substrate current change with V-acc, nearly constant (220) peak broadening with the increase of N-2 partial pressure was obtained. The measured grain diameter (STM and XRD) confirms that the grain size is less than 12 nm, and the (220) preferred orientation was disturbed but not destructed.",
journal = "Materials Science Forum",
title = "Nano-structured TiN thin films deposited by single ion beam reactive sputtering",
volume = "555",
pages = "303-+",
url = "https://hdl.handle.net/21.15107/rcub_vinar_6692"
}
Bogdanov, Ž., Popovic, N., Zlatanovic, M., Goncić, B., Rakočević, Z. Lj.,& Zec, S.. (2007). Nano-structured TiN thin films deposited by single ion beam reactive sputtering. in Materials Science Forum, 555, 303-+.
https://hdl.handle.net/21.15107/rcub_vinar_6692
Bogdanov Ž, Popovic N, Zlatanovic M, Goncić B, Rakočević ZL, Zec S. Nano-structured TiN thin films deposited by single ion beam reactive sputtering. in Materials Science Forum. 2007;555:303-+.
https://hdl.handle.net/21.15107/rcub_vinar_6692 .
Bogdanov, Žarko, Popovic, N., Zlatanovic, M., Goncić, Bratislav, Rakočević, Zlatko Lj., Zec, Slavica, "Nano-structured TiN thin films deposited by single ion beam reactive sputtering" in Materials Science Forum, 555 (2007):303-+,
https://hdl.handle.net/21.15107/rcub_vinar_6692 .