TY  - CONF
AU  - Gaković, Biljana M.
AU  - Trtica, Milan
AU  - Batani, Dimitri
AU  - Desai, Tara
AU  - Redaelli, Renato
PY  - 2006
UR  - https://vinar.vin.bg.ac.rs/handle/123456789/6573
AB  - The interaction of a Nd:YAG laser, pulse duration of 40 ps, with a titanium nitride (TiN) and tungsten-titanium (W-Ti) thin films deposited at silicon was studied. The peak intensity on targets was up to 10(12) W/cm(2). Results have shown that the TiN surface was modified, by the laser beam, with energy density of GT = 0.18 J/cm(2) (lambda(laser) = 532 nm) as well as of 30.0 J/cm(2) (lambda(laser)= 1064 nm). The W-Ti was surface modified with energy density of 5.0 J/cm(2) (lambda(laser)= 532 nm). ne energy absorbed from the Nd:YAG laser beam is partially converted to thermal energy, which generates a series of effects such as melting, vaporization of molten materials, dissociation and ionization of the vaporized material, appearance of plasma, etc. The following morphological changes of both targets were observed: (i) The appearance of periodic microstructures, in the central zone of the irradiated area, for laser irradiation at 532 nm. Accumulation of great number of laser pulses caused film ablation and silicon modification. (ii) Hole formation on the titanium nitride/silicon target was registered at 1064 nm. The process of the Nd:YAG laser interaction with both targets was accompanied by plasma formation above the target.
C3  - AIP Conference Proceedings
T1  - Picoseconds-laser modification of thin films
VL  - 827
SP  - 546
EP  - +
UR  - https://hdl.handle.net/21.15107/rcub_vinar_6573
ER  - 

@conference{
author = "Gaković, Biljana M. and Trtica, Milan and Batani, Dimitri and Desai, Tara and Redaelli, Renato",
year = "2006",
abstract = "The interaction of a Nd:YAG laser, pulse duration of 40 ps, with a titanium nitride (TiN) and tungsten-titanium (W-Ti) thin films deposited at silicon was studied. The peak intensity on targets was up to 10(12) W/cm(2). Results have shown that the TiN surface was modified, by the laser beam, with energy density of GT = 0.18 J/cm(2) (lambda(laser) = 532 nm) as well as of 30.0 J/cm(2) (lambda(laser)= 1064 nm). The W-Ti was surface modified with energy density of 5.0 J/cm(2) (lambda(laser)= 532 nm). ne energy absorbed from the Nd:YAG laser beam is partially converted to thermal energy, which generates a series of effects such as melting, vaporization of molten materials, dissociation and ionization of the vaporized material, appearance of plasma, etc. The following morphological changes of both targets were observed: (i) The appearance of periodic microstructures, in the central zone of the irradiated area, for laser irradiation at 532 nm. Accumulation of great number of laser pulses caused film ablation and silicon modification. (ii) Hole formation on the titanium nitride/silicon target was registered at 1064 nm. The process of the Nd:YAG laser interaction with both targets was accompanied by plasma formation above the target.",
journal = "AIP Conference Proceedings",
title = "Picoseconds-laser modification of thin films",
volume = "827",
pages = "546-+",
url = "https://hdl.handle.net/21.15107/rcub_vinar_6573"
}

Gaković, B. M., Trtica, M., Batani, D., Desai, T.,& Redaelli, R.. (2006). Picoseconds-laser modification of thin films. in AIP Conference Proceedings, 827, 546-+.
https://hdl.handle.net/21.15107/rcub_vinar_6573

Gaković BM, Trtica M, Batani D, Desai T, Redaelli R. Picoseconds-laser modification of thin films. in AIP Conference Proceedings. 2006;827:546-+.
https://hdl.handle.net/21.15107/rcub_vinar_6573 .

Gaković, Biljana M., Trtica, Milan, Batani, Dimitri, Desai, Tara, Redaelli, Renato, "Picoseconds-laser modification of thin films" in AIP Conference Proceedings, 827 (2006):546-+,
https://hdl.handle.net/21.15107/rcub_vinar_6573 .