TY  - JOUR
AU  - Obradović, Marko O.
AU  - Kovač, Janez
AU  - Petrović, Suzana
AU  - Lazović, Vladimir M.
AU  - Salatić, Branislav
AU  - Ciganović, Jovan
AU  - Pjević, Dejan J.
AU  - Milosavljević, Momir
AU  - Peruško, Davor
PY  - 2018
UR  - https://vinar.vin.bg.ac.rs/handle/123456789/7721
AB  - The possibility of interlayer mixing in a Ti/Ta multilayer system, induced by laser irradiation, was the main purpose of these experiments. Ti/Ta multilayer system, consisting of ten alternating Ti and Ta thin films and covered by slightly thicker Ti layer, was deposited on Si (100) wafers to a total thickness of 205 nm. Laser irradiation was performed in air by picoseconds Nd:YAG laser pulses in defocused regime with fluences of 0.057 and 0.11 J cm−2. Laser beam was scanned over the 5 × 5 mm surface area with different steps along y-axes. Structural and compositional characterisation was done by auger electron spectroscopy, X-ray photoelectron spectroscopy, atomic force microscopy, and scanning electron microscopy. Laser processing at lower fluence caused only oxidation of the top Ti layer, despite of the number of applied laser pulses. Interlayer mixing was not observed. Application of laser pulses at fluence of 0.11 J cm−2caused partial and/or complete ablation of deposited layers. In partially ablated regions considerable mixing between Ti and Ta films was registered.
T2  - Optical and Quantum Electronics
T1  - Laser induced mixing in multilayered Ti/Ta thin film structures
VL  - 50
IS  - 6
SP  - 257
DO  - 10.1007/s11082-018-1525-x
ER  - 

@article{
author = "Obradović, Marko O. and Kovač, Janez and Petrović, Suzana and Lazović, Vladimir M. and Salatić, Branislav and Ciganović, Jovan and Pjević, Dejan J. and Milosavljević, Momir and Peruško, Davor",
year = "2018",
abstract = "The possibility of interlayer mixing in a Ti/Ta multilayer system, induced by laser irradiation, was the main purpose of these experiments. Ti/Ta multilayer system, consisting of ten alternating Ti and Ta thin films and covered by slightly thicker Ti layer, was deposited on Si (100) wafers to a total thickness of 205 nm. Laser irradiation was performed in air by picoseconds Nd:YAG laser pulses in defocused regime with fluences of 0.057 and 0.11 J cm−2. Laser beam was scanned over the 5 × 5 mm surface area with different steps along y-axes. Structural and compositional characterisation was done by auger electron spectroscopy, X-ray photoelectron spectroscopy, atomic force microscopy, and scanning electron microscopy. Laser processing at lower fluence caused only oxidation of the top Ti layer, despite of the number of applied laser pulses. Interlayer mixing was not observed. Application of laser pulses at fluence of 0.11 J cm−2caused partial and/or complete ablation of deposited layers. In partially ablated regions considerable mixing between Ti and Ta films was registered.",
journal = "Optical and Quantum Electronics",
title = "Laser induced mixing in multilayered Ti/Ta thin film structures",
volume = "50",
number = "6",
pages = "257",
doi = "10.1007/s11082-018-1525-x"
}

Obradović, M. O., Kovač, J., Petrović, S., Lazović, V. M., Salatić, B., Ciganović, J., Pjević, D. J., Milosavljević, M.,& Peruško, D.. (2018). Laser induced mixing in multilayered Ti/Ta thin film structures. in Optical and Quantum Electronics, 50(6), 257.
https://doi.org/10.1007/s11082-018-1525-x

Obradović MO, Kovač J, Petrović S, Lazović VM, Salatić B, Ciganović J, Pjević DJ, Milosavljević M, Peruško D. Laser induced mixing in multilayered Ti/Ta thin film structures. in Optical and Quantum Electronics. 2018;50(6):257.
doi:10.1007/s11082-018-1525-x .

Obradović, Marko O., Kovač, Janez, Petrović, Suzana, Lazović, Vladimir M., Salatić, Branislav, Ciganović, Jovan, Pjević, Dejan J., Milosavljević, Momir, Peruško, Davor, "Laser induced mixing in multilayered Ti/Ta thin film structures" in Optical and Quantum Electronics, 50, no. 6 (2018):257,
https://doi.org/10.1007/s11082-018-1525-x . .