@article{
author = "Novaković, Mirjana M. and Popović, Maja and Peruško, Davor and Radović, Ivan and Milinović, Velimir and Milosavljević, Momir",
year = "2007",
abstract = "We present a study of the micro-structural changes induced in Cr-N layers by irradiation with argon ions. The layers were deposited by reactive ion sputtering on (100) Si wafers, to a thickness of 240-280 nm, at different nitrogen partial pressures and different substrate temperatures. The samples were subsequently irradiated with 120 keV Ar+, to 1x10(15) and 1x10(16) ions/cm(2). Structural characterization was performed with Rutherford backscattering spectroscopy, x-ray diffraction analysis and transmission electron microscopy, and we also did electrical resistivity measurements on the samples. It has been found that the layers grow in the form of a polycrystalline columnar structure, with a columnar width of a few tens of nm. The layer composition, Cr2N or CrN, strongly depends on the nitrogen partial pressure during deposition. Ion irradiation induces local micro-structural changes, formation of nano-particles and defects, though the structures retain their polycrystalline nature. The induced crystalline defects yield an increase of electrical resistivity after ion irradiation.",
journal = "Materials Science Forum",
title = "Ion Implantation Induced Modifications in Reactively Sputtered Cr-N Layers on Si Substrates",
volume = "555",
pages = "35-40",
doi = "10.4028/www.scientific.net/MSF.555.35"
}